Patents by Inventor Keith R. Milkove

Keith R. Milkove has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Fabrication process for a magnetic tunnel junction device
    Patent number: 6984529
    Abstract: A method of fabricating a magnetic tunnel junction (MTJ) device is provided. A patterned hard mask is oxidized to form a surface oxide thereon. An MTJ stack is etched in alignment with the patterned hard mask after the oxidizing of the patterned hard mask. Preferably, the MTJ stack etch recipe includes chlorine and oxygen. Etch selectivity between the hard mask and the MTJ stack is improved.
    Type: Grant
    Filed: September 10, 2003
    Date of Patent: January 10, 2006
    Assignees: Infineon Technologies AG, International Business Machines Corporation
    Inventors: George Stojakovic, Rajiv M. Ranade, Ihar Kasko, Joachim Neutzel, Keith R. Milkove, Russell D. Allen, Kim Poong Mee Lee, legal representative, Young Hoon Lee, deceased
  • Semiconductor with nanoscale features
    Patent number: 6506660
    Abstract: Described is a method of increasing the capacitance of semiconductor capacitors by providing a first solid-state electrode pattern on a semiconductor medium, etching topographic features on said first electrode pattern in a manner effective in increasing the surface area of said first electrode pattern, depositing a dielectric layer upon said electrode pattern that substantially conforms to said topographic features, and depositing a second solid-state electrode pattern upon said dielectric layer and sufficiently insulated from said first solid-state electrode pattern so as to create a capacitance with said first solid-state electrode pattern.
    Type: Grant
    Filed: November 13, 2001
    Date of Patent: January 14, 2003
    Assignee: International Business Machines Corporation
    Inventors: Steven J. Holmes, Charles Black, David J. Frank, Toshiharu Furukawa, Mark C. Hakey, David V. Horak, William Hsioh-Lien Ma, Keith R. Milkove, Kathryn W. Guarini
  • Semiconductor capacitors
    Publication number: 20020058394
    Abstract: Described is a method of increasing the capacitance of semiconductor capacitors by providing a first solid-state electrode pattern on a semiconductor medium, etching topographic features on said first electrode pattern in a manner effective in increasing the surface area of said first electrode pattern, depositing a dielectric layer upon said electrode pattern that substantially conforms to said topographic features, and depositing a second solid-state electrode pattern upon said dielectric layer and sufficiently insulated from said first solid-state electrode pattern so as to create a capacitance with said first solid-state electrode pattern.
    Type: Application
    Filed: November 13, 2001
    Publication date: May 16, 2002
    Applicant: International Business Machines Corporation
    Inventors: Steven J. Holmes, Charles Black, David J. Frank, Toshiharu Furukawa, Mark C. Hakey, David V. Horak, William Hsioh-Lien Ma, Keith R. Milkove, Kathryn W. Guarini
  • Method for increasing the capacitance of a semiconductor capacitors
    Patent number: 6358813
    Abstract: Described is a method of increasing the capacitance of semiconductor capacitors by providing a first solid-state electrode pattern on a semiconductor medium, etching topographic features on said first electrode pattern in a manner effective in increasing the surface area of said first electrode pattern, depositing a dielectric layer upon said electrode pattern that substantially conforms to said topographic features, and depositing a second solid-state electrode pattern upon said dielectric layer and sufficiently insulated from said first solid-state electrode pattern so as to create a capacitance with said first solid-state electrode pattern.
    Type: Grant
    Filed: November 15, 2000
    Date of Patent: March 19, 2002
    Assignee: International Business Machines Corporation
    Inventors: Steven J. Holmes, Charles Black, David J. Frank, Toshiharu Furukawa, Mark C. Hakey, David V. Horak, William Hsioh-Lien Ma, Keith R. Milkove, Kathryn W. Guarini