Abstract: The present invention is directed to the prevention of an exothermic reaction in the gas purifier of an ultra-high purity gas system.

Abstract: Methods, apparatuses and systems are disclosed for supplying gas from a multi-container Bulk Specialty Gases Supply System wherein at least one process parameter is automatically monitored to prevent over-filling of at least a first and second container without operator intervention.

Abstract: A system for delivering vapor phase fluid at an elevated pressure from a transport vessel containing liquefied or two-phase fluid is provided. The system includes: (a) a transport vessel positioned in a substantially horizontal position; (b) one or more energy delivery elements disposed on the lower portion of the transport vessel wherein the energy delivery devices include a heating means and a first insulation means, wherein the energy delivery devices are configured to the contour of the transport vessel; (c) one or more substantially rigid support devices disposed on the outer periphery of the energy delivery devices, wherein the support devices hold the energy delivery devices in thermal contact with a lower portion of the transport vessel; and (d) one or more attaching devices secure the rigid support devices onto the transport vessel and hold the energy delivery devices between the substantially rigid support device and a wall of the transport vessel.

Abstract: The present invention is directed to the prevention of an exothermic reaction in the gas purifier of an ultra-high purity gas system.

Abstract: The present invention is directed to the prevention of an exothermic reaction in the gas purifier of an ultra-high purity gas system.

Abstract: A novel fail-safe temperature monitoring system that can distinguish excessive chemical adsorbent temperature from temperature sensing component failure is provided. This system prevents the gas purifier from shutting down as a result of temperature sensing component failure, and thereby prevents a false shutdown of a high-purity gas production plant.

Abstract: The present invention is directed to the prevention of an exothermic reaction in the gas purifier of an ultra-high purity gas system.

Abstract: This invention relates to gas vaporization and supply system that includes (a) a vessel suitable for holding a bulk quantity of a liquefied gas; (b) at least one heating source positioned on or near the vessel to supply energy to, or remove energy from, the liquefied gas; and (c) a heating source controller adapted to use process variables feedback for dynamically regulating the heating source and maintaining and regulating gas output. The process variables feedback results from cascading sequence control of at least two process variables. The process variables include pressure, temperature, and/or gas output flow rate. This invention also relates to a method for delivery of a gas, e.g., ultra high purity gases, from a liquefied state in a controlled manner to a usage site, e.g., a semiconductor manufacturing facility. This invention provides faster heating system response to fluctuations in customer demand, a longer heater life, and improved reliability.

Abstract: The present invention is directed to the prevention of an exothermic reaction in the gas purifier of an ultra-high purity gas system.

Abstract: A system for delivering vapor phase fluid at an elevated pressure from a transport vessel containing liquefied or two-phase fluid is provided. The system includes: (a) a transport vessel positioned in a substantially horizontal position; (b) one or more energy delivery elements disposed on the lower portion of the transport vessel wherein the energy delivery devices include a heating means and a first insulation means, wherein the energy delivery devices are configured to the contour of the transport vessel; (c) one or more substantially rigid support devices disposed on the outer periphery of the energy delivery devices, wherein the support devices hold the energy delivery devices in thermal contact with a lower portion of the transport vessel; and (d) one or more attaching devices secure the rigid support devices onto the transport vessel and hold the energy delivery devices between the substantially rigid support device and a wall of the transport vessel.

Abstract: A system for delivering vapor phase fluid at an elevated pressure from a transport vessel containing liquefied or two-phase fluid is provided. The system includes: (a) a transport vessel positioned in a substantially horizontal position; (b) one or more energy delivery elements disposed on the lower portion of the transport vessel wherein the energy delivery devices include a heating means and a first insulation means, wherein the energy delivery devices are configured to the contour of the transport vessel; (c) one or more substantially rigid support devices disposed on the outer periphery of the energy delivery devices, wherein the support devices hold the energy delivery devices in thermal contact with a lower portion of the transport vessel; and (d) one or more attaching devices secure the rigid support devices onto the transport vessel and hold the energy delivery devices between the substantially rigid support device and a wall of the transport vessel.

Abstract: Methods, apparatuses and systems are disclosed for supplying gas from a multi-container BSGS system wherein at least one process parameter is automatically monitored to prevent over-filling of at least a first and second container without operator intervention.

Abstract: The present invention is directed to the prevention of an exothermic reaction in the gas purifier of an ultra-high purity gas system.

Abstract: A novel fail-safe temperature monitoring system that can distinguish excessive chemical adsorbent temperature from temperature sensing component failure is provided. This system prevents the gas purifier from shutting down as a result of temperature sensing component failure, and thereby prevents a false shutdown of a high-purity gas production plant.

Abstract: A system for delivering vapor phase fluid at an elevated pressure from a transport vessel containing liquefied or two-phase fluid is provided. The system includes: (a) a transport vessel positioned in a substantially horizontal position; (b) one or more energy delivery elements disposed on the lower portion of the transport vessel wherein the energy delivery devices include a heating means and a first insulation means, wherein the energy delivery devices are configured to the contour of the transport vessel; (c) one or more substantially rigid support devices disposed on the outer periphery of the energy delivery devices, wherein the support devices hold the energy delivery devices in thermal contact with a lower portion of the transport vessel; and (d) one or more attaching devices secure the rigid support devices onto the transport vessel and hold the energy delivery devices between the substantially rigid support device and a wall of the transport vessel.