Patents by Inventor Keith Zawadzkl

Keith Zawadzkl has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Ultra-abrupt semiconductor junction profile
    Publication number: 20090090982
    Abstract: The present invention discloses a method including: providing a substrate; forming recessed regions adjacent to both sides of a gate on the substrate; performing an angled co-implant of a species in two steps with two different energies and two different doses into the recessed regions; forming Silicon-Germanium in the recessed regions; forming source/drain extensions adjacent to both sides of the gate with a dopant; and performing an anneal to activate the dopant.
    Type: Application
    Filed: December 10, 2008
    Publication date: April 9, 2009
    Inventors: Pushkar Ranade, Keith Zawadzkl, Leif Paulson