Patents by Inventor Keke Zhang

Keke Zhang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20240134503
    Abstract: A control method and apparatus for displaying multimedia content, an electronic device, and a medium. The method includes: displaying a first-type multimedia content on a first content display layer of a first-type multimedia content display interface, the first-type multimedia content display interface including: a first user interaction layer and the first content display layer, the first user interaction layer being superimposed and displayed on the first content display layer; and receiving a first swiping operation inputted by a user on the user interaction layer, and exiting the first-type multimedia content display interface. That is, a swiping operation triggers to exit the first-type multimedia content display interface, as the swiping operation is significantly different from a click operation, the user is provided with a multimedia content display control method that is more consistent with the user's operation habit, improving the user experience.
    Type: Application
    Filed: February 25, 2022
    Publication date: April 25, 2024
    Inventors: Keke HUANG, Xue YAO, Xiaolei SHI, Mengqi WU, Weiqin LIAN, Junhao ZHANG, Zhiquan ZHANG, Bo ZHOU, Zhiyong LUO, Ji LI
  • Patent number: 10134983
    Abstract: A nonvolatile resistive switching memory, comprising an inert metal electrode, a resistive switching functional layer, and an easily oxidizable metal electrode, and characterized in that: a graphene barrier layer is inserted between the inert metal electrode and the resistive switching functional layer, which is capable of preventing the easily oxidizable metal ions from migrating into the inert metal electrode through the resistive switching functional layer under the action of electric field during the programming of the device.
    Type: Grant
    Filed: May 14, 2015
    Date of Patent: November 20, 2018
    Assignee: INSTITUTE OF MICROELECTRONICS, CHINESE ACADEMY OF SCIENCES
    Inventors: Qi Liu, Ming Liu, Haitao Sun, Keke Zhang, Shibing Long, Hangbing Lv, Writam Banerjee, Kangwei Zhang
  • Publication number: 20180026183
    Abstract: A nonvolatile resistive switching memory, comprising an inert metal electrode, a resistive switching functional layer, and an easily oxidizable metal electrode, and characterized in that: a graphene barrier layer is inserted between the inert metal electrode and the resistive switching functional layer, which is capable of preventing the easily oxidizable metal ions from migrating into the inert metal electrode through the resistive switching functional layer under the action of electric field during the programming of the device.
    Type: Application
    Filed: May 14, 2015
    Publication date: January 25, 2018
    Inventors: Qi Liu, Ming Liu, Haitao Sun, Keke Zhang, Shibing Long, Hangbing Lv, Writam Banerjee, Kangwei Zhang
  • Patent number: 9640660
    Abstract: A method of fabricating an asymmetric FinFET is provided in the invention, comprising: a. providing a substrate (101); b. forming a fin (102) on the substrate (101), wherein the width of the fin (102) is defined as a second channel thickness; c. forming a shallow trench isolation; d. forming a sacrificial gate stack on the top surface and sidewalls of the channel which is in the middle of the fin, and forming source/drain regions in both ends of the fin; e. depositing an interlayer dielectric layer to cover the sacrificial gate stack and the source/drain regions, planarizing the interlayer dielectric layer to expose sacrificial gate stack; f. removing the sacrificial gate stack to expose the channel; g. forming an etch-stop layer (106) on top of the channel; h. covering a photoresist film (400) on a portion of the semiconductor structure near the source region; i.
    Type: Grant
    Filed: October 21, 2013
    Date of Patent: May 2, 2017
    Assignee: INSTITUTE OF MICROELECTRONICS, CHINESE ACADEMY OF SCIENCES
    Inventors: Haizhou Yin, Keke Zhang
  • Patent number: 9614050
    Abstract: The present invention provides a method for manufacturing a semiconductor device, comprising: forming a contact sacrificial pattern on a substrate to cover source and drain regions and expose a gate region; forming an interlayer dielectric layer on the substrate to cover the contact sacrificial pattern and expose the gate region; forming a gate stack structure in the exposed gate region; removing the contact sacrificial pattern to form the source/drain contact trench; and forming a source/drain contact in the source/drain contact trench. By means of a contact sacrificial layer process, the method of manufacturing a semiconductor device according to the present invention effectively reduces the distance between the gate spacer and the contact region and increases the area of the contact region, thus effectively reducing the parasitic resistance of the device.
    Type: Grant
    Filed: August 6, 2012
    Date of Patent: April 4, 2017
    Assignee: INSTITUTE OF MICROELECTRONICS, CHINESE ACADEMY OF SCIENCES
    Inventors: Haizhou Yin, Keke Zhang
  • Patent number: 9577074
    Abstract: A method of manufacturing a FinFET device is provided, comprising: a. providing a substrate (100); b. forming a fin (200) on the substrate; c. forming an shallow trench isolation structure (300) on the substrate; d. forming an sacrificial gate stack on the isolation structure, wherein the sacrificial gate stack intersects the fin; e. forming source/drain doping regions by ion implantation into the fin; f. depositing an interlayer dielectric layer (400) on the substrate; g. removing the sacrificial gate stack to form a sacrificial gate vacancy; h. forming an doped region (201) under the sacrificial gate vacancy; i. etching the shallow trench isolation structure (300) under the sacrificial gate vacancy until the top surface of the shallow trench isolation structure (300) levels with the bottom surface of the source/drain doping regions; j. forming a new gate stack in the sacrificial gate vacancy.
    Type: Grant
    Filed: October 22, 2013
    Date of Patent: February 21, 2017
    Assignee: INSTITUTE OF MICROELECTRONICS, CHINESE ACADEMY OF SCIENCES
    Inventors: Yunfei Liu, Haizhou Yin, Keke Zhang
  • Patent number: 9576802
    Abstract: A method for manufacturing a semiconductor device is disclosed. The method comprises: forming a T-shape dummy gate structure on the substrate; removing the T-shape dummy gate structure and retaining a T-shape gate trench; forming a T-shape metal gate structure by filling a metal layer in the T-shape gate trench. According to the semiconductor device manufacturing method disclosed in the present application, the overhang phenomenon and the formation of voids are avoided in the subsequent metal gate filling process by forming a T-shape dummy gate and a T-shape gate trench, and the device performance is improved.
    Type: Grant
    Filed: July 19, 2012
    Date of Patent: February 21, 2017
    Inventors: Haizhou Yin, Huilong Zhu, Keke Zhang
  • Patent number: 9530861
    Abstract: The present invention discloses a method for manufacturing a semiconductor device, comprising the steps of: forming a dummy gate stack structure on a substrate, wherein the dummy gate stack structure contains carbon-based materials; forming source/drain region in the substrate on both sides of the dummy gate stack structure; performing etching to remove the dummy gate stack structure until the substrate is exposed, resulting in a gate trench; and forming a gate stack structure in the gate trench. In accordance with the method for manufacturing a semiconductor device of the present invention, the dummy gate made of carbon-based materials is used to substitute the dummy gate made of silicon-based materials, then no oxide liner and/or etch blocking layer needs be added while the dummy gate is removed by etching in the gate last process, thus the reliability of device is ensured while the process is simplified and the cost is reduced.
    Type: Grant
    Filed: July 3, 2012
    Date of Patent: December 27, 2016
    Assignee: Institute of Microelectronics, Chinese Academy of Sciences
    Inventors: Haizhou Yin, Keke Zhang
  • Publication number: 20160276467
    Abstract: A method of manufacturing a FinFET device is provided, comprising: a. providing a substrate (100); b. forming a fin (200) on the substrate; c. forming an shallow trench isolation structure (300) on the substrate; d. forming an sacrificial gate stack on the isolation structure, wherein the sacrificial gate stack intersects the fin; e. forming source/drain doping regions by ion implantation into the fin; f. depositing an interlayer dielectric layer (400) on the substrate; g. removing the sacrificial gate stack to form a sacrificial gate vacancy; h. forming an doped region (201) under the sacrificial gate vacancy; i. etching the shallow trench isolation structure (300) under the sacrificial gate vacancy until the top surface of the shallow trench isolation structure (300) levels with the bottom surface of the source/drain doping regions; j. forming a new gate stack in the sacrificial gate vacancy.
    Type: Application
    Filed: October 22, 2013
    Publication date: September 22, 2016
    Applicant: Institute of Microelectronics, Chinese Academy of Sciences
    Inventors: Yunfei Liu, Haizhou Yin, Keke Zhang
  • Publication number: 20160155844
    Abstract: A method for manufacturing an asymmetric super-thin SOIMOS transistor is disclosed. The method comprises: a. providing a substrate composed of an insulating layer (200) and a semiconductor layer (300); b. forming a gate stack (304) on the substrate; c. removing semiconductor materials of the semiconductor layer (300) on a source region side to form a first vacancy (001); d. removing insulating materials of the insulating layer (200) in the source region and under channel near the source region to form a second vacancy (002); e. filling semiconductor materials into the first vacancy (001) and the second vacancy (002) to connect with the semiconductor materials above the second vacancy (002); and f. performing source/drain implantation. Compared with the prior art, the method of the disclosure can suppress the short channel effects and enhance device performance.
    Type: Application
    Filed: October 21, 2013
    Publication date: June 2, 2016
    Inventors: Haizhou YIN, Keke ZHANG
  • Publication number: 20160149027
    Abstract: A method of fabricating an asymmetric FinFET is provided in the invention, comprising: a. providing a substrate (101); b. forming a fin (102) on the substrate (101), wherein the width of the fin (102) is defined as a second channel thickness; c. forming a shallow trench isolation; d. forming a sacrificial gate stack on the top surface and sidewalls of the channel which is in the middle of the fin, and forming source/drain regions in both ends of the fin; e. depositing an interlayer dielectric layer to cover the sacrificial gate stack and the source/drain regions, planarizing the interlayer dielectric layer to expose sacrificial gate stack; f. removing the sacrificial gate stack to expose the channel; g. forming an etch-stop layer (106) on top of the channel; h. covering a photoresist film (400) on a portion of the semiconductor structure near the source region; i.
    Type: Application
    Filed: October 21, 2013
    Publication date: May 26, 2016
    Inventors: Haizhou Yin, Keke Zhang
  • Publication number: 20160133696
    Abstract: A method for fabricating a FinFET DEVICE is provided in the invention, comprising: a. providing a substrate (100);b. forming a fin (200) on the substrate (200); c. depositing a doping material layer (300) on the semiconductor structure formed after the step b; d. forming a first shallow trench isolation (400) on the semiconductor formed after the step c; e. removing a portion of the doping material layer (300) which is not covered by the first shallow trench isolation (400); f. performing an annealing process to form a doped region (500) in a channel region which is in the middle portion of the fin; g. forming a second shallow trench isolation (600) on the semiconductor formed after the step f; h. forming a source region and a drain region in opposite portions of the fin and forming a gate stack on the middle portion of the fin. Comparing with the prior art, punch through effect will be restrained and process complexity will be reduced.
    Type: Application
    Filed: October 21, 2013
    Publication date: May 12, 2016
    Applicant: Institute of Microlectronics, Chinese Academy of Sciences
    Inventors: Haizhou Yin, Keke Zhang
  • Publication number: 20150340456
    Abstract: A method for manufacturing a semiconductor device is disclosed. The method comprises: forming a T-shape dummy gate structure on the substrate; removing the T-shape dummy gate structure and retaining a T-shape gate trench; forming a T-shape metal gate structure by filling a metal layer in the T-shape gate trench. According to the semiconductor device manufacturing method disclosed in the present application, the overhang phenomenon and the formation of voids are avoided in the subsequent metal gate filling process by forming a T-shape dummy gate and a T-shape gate trench, and the device performance is improved.
    Type: Application
    Filed: July 19, 2012
    Publication date: November 26, 2015
    Applicant: Institute of Microelectronics, Chinese Academy of Sciences
    Inventors: Haizhou YIN, Huilong ZHU, Keke ZHANG
  • Publication number: 20150214097
    Abstract: The present invention provides a method for manufacturing a shallow trench isolation, comprising: forming a hard mask layer on the substrate; phottoetching/etching the hard mask layer and the substrate to form a plurality of first trenches along a first direction and a plurality of second trenches along a second direction perpendicular to the first direction, wherein the volume of the second trench is greater than that of the first trench; depositing an insulating material in the first and second trenches; planarizing the insulating material and the hard mask layer until the substrate is exposed so as to form a shallow trench isolation.
    Type: Application
    Filed: August 3, 2012
    Publication date: July 30, 2015
    Inventors: Haizhou Yin, Keke Zhang
  • Publication number: 20150200269
    Abstract: The present invention provides a method for manufacturing a semiconductor device, comprising: forming a contact sacrificial pattern on a substrate to cover source and drain regions and expose a gate region; forming an interlayer dielectric layer on the substrate to cover the contact sacrificial pattern and expose the gate region; forming a gate stack structure in the exposed gate region; removing the contact sacrificial pattern to form the source/drain contact trench; and forming a source/drain contact in the source/drain contact trench. By means of a contact sacrificial layer process, the method of manufacturing a semiconductor device according to the present invention effectively reduces the distance between the gate spacer and the contact region and increases the area of the contact region, thus effectively reducing the parasitic resistance of the device.
    Type: Application
    Filed: August 6, 2012
    Publication date: July 16, 2015
    Applicant: Institute of Microelectronics, Chinese Academy of Sciences
    Inventors: Haizhou Yin, Keke Zhang
  • Publication number: 20150194501
    Abstract: A method for manufacturing a semiconductor device, comprising: forming a gate stack structure and gate spacers on the substrate; forming the raised S/D regions on the substrate on both sides of the gate stack structure and the gate spacers; depositing a lower interlayer dielectric layer on the entire device, and planarizing the lower interlayer dielectric layer and the gate stack structure until the raised S/D regions are exposed; selective epitaxial growing to form the S/D extension regions in the raised S/D regions; forming an upper interlayer dielectric layer on the S/D extension regions; etching the upper interlayer dielectric layer until the S/D extension regions to form an S/D contact hole; forming a metal silicide in the S/D contact hole.
    Type: Application
    Filed: August 3, 2012
    Publication date: July 9, 2015
    Applicant: Institute of Microelectronics, Chinese Academy of Sciences
    Inventors: Haizhou Yin, Keke Zhang
  • Publication number: 20150187892
    Abstract: A method for manufacturing a semiconductor device is disclosed, comprising: forming a contact sacrificial layer on the substrate, etching the contact sacrificial layer to form a contact sacrificial pattern, wherein the contact sacrificial pattern covers the source region and the drain region and has a gate trench that exposes the substrate; forming a gate spacer and a gate stack structure in the gate trench; partially or completely etching off the contact sacrificial pattern that covers the source region and the drain region so as to form a source/drain contact trench; and forming a source/drain contact in the source/drain contact trench. By means of the double-layer contact sacrificial layer, the method for manufacturing a semiconductor device in accordance with the present invention effectively reduces the spacing between the gate spacer and the contact region and increases the area of contact region, thus effectively reducing the parasitic resistance of the device.
    Type: Application
    Filed: August 3, 2012
    Publication date: July 2, 2015
    Inventors: Haizhou Yin, Keke Zhang
  • Publication number: 20150118818
    Abstract: The present invention discloses a method for manufacturing a semiconductor device, comprising the steps of: forming a dummy gate stack structure on a substrate, wherein the dummy gate stack structure contains carbon-based materials; forming source/drain region in the substrate on both sides of the dummy gate stack structure; performing etching to remove the dummy gate stack structure until the substrate is exposed, resulting in a gate trench; and forming a gate stack structure in the gate trench. In accordance with the method for manufacturing a semiconductor device of the present invention, the dummy gate made of carbon-based materials is used to substitute the dummy gate made of silicon-based materials, then no oxide liner and/or etch blocking layer needs be added while the dummy gate is removed by etching in the gate last process, thus the reliability of device is ensured while the process is simplified and the cost is reduced.
    Type: Application
    Filed: July 3, 2012
    Publication date: April 30, 2015
    Inventors: Haizhou Yin, Keke Zhang
  • Publication number: 20140361353
    Abstract: The present application discloses a method for manufacturing a semiconductor device, comprising: forming a T-shape dummy gate structure on the substrate; removing the T-shape dummy gate structure and retaining a T-shape gate trench; filling successively a gate insulation layer and a metal layer in the T-shape gate trench, wherein the metal layer forms the T-shape metal gate structure. According to the semiconductor device manufacturing method disclosed in the present application, the overhang phenomenon and the formation of voids are avoided in the subsequent metal gate filling process by forming a T-shape dummy gate and a T-shape gate trench, and the device performance is improved.
    Type: Application
    Filed: July 18, 2012
    Publication date: December 11, 2014
    Inventors: Haizhou Yin, Huilong Zhu, Keke Zhang
  • Publication number: 20130299920
    Abstract: The present invention discloses a semiconductor device, comprising a substrate, a gate stack structure on the substrate, a gate spacer structure at both sides of the gate stack structure, source/drain regions in the substrate and at opposite sides of the gate stack structure and the gate spacer structure, characterized in that the gate spacer structure comprises at least one gate spacer void filled with air. In accordance with the semiconductor device and the method for manufacturing the same of the present invention, carbon-based materials are used to form a sacrificial spacer, and at least one air void is formed after removing the sacrificial spacer, the overall dielectric constant of the spacer is effectively reduced. Thus, the gate parasitic capacitance is reduced and the device performance is enhanced.
    Type: Application
    Filed: July 3, 2012
    Publication date: November 14, 2013
    Inventors: Haizhou Yin, Keke Zhang