Abstract: A mixing inlet device of semiconductor processing equipment is arranged at a top of a process chamber of the semiconductor processing equipment and configured to input a process gas into the process chamber. The mixing inlet device includes a cover assembly and a mixing inlet block. A bottom of the cover assembly covers the top of the process chamber. The mixing channel is arranged in the cover assembly. The mixing inlet block is arranged at a center position at a top of the cover assembly and includes a plurality of inlet channels and a first annular chamber. A top of the first annular chamber communicates with the plurality of inlet channels, and a bottom of the first annular chamber communicates with the mixing channel of the cover assembly.

Abstract: A mixing inlet device of semiconductor processing equipment is arranged at a top of a process chamber of the semiconductor processing equipment and configured to input a process gas into the process chamber. The mixing inlet device includes a cover assembly and a mixing inlet block. A bottom of the cover assembly covers the top of the process chamber. The mixing channel is arranged in the cover assembly. The mixing inlet block is arranged at a center position at a top of the cover assembly and includes a plurality of inlet channels and a first annular chamber. A top of the first annular chamber communicates with the plurality of inlet channels, and a bottom of the first annular chamber communicates with the mixing channel of the cover assembly.

Abstract: The present disclosure provides a sputtering reaction chamber and a process assembly of the sputtering reaction chamber. The process assembly includes a liner, and the liner includes an integrally formed body member and a cover member. The cover member may extend from a bottom of the body member to an inner side of the body member and may be configured to press an edge of a to-be-processed workpiece when a process is performed. A cooling channel may be arranged in the cover member and the body member and may be configured to cool the cover member and the body member by transferring coolant. The process assembly of the sputtering reaction chamber and the sputtering reaction chamber provided by the present disclosure can reduce heat radiation of the process assembly to the to-be-processed workpiece and released gases and impurities to effectively reduce a whisker defect and improve a product yield.

Abstract: An integrated circuit (IC) control device for a multi-phase switching converter having a master phase and at least one slave phase, has a first ON-time control circuit to provide a first ON-time control signal and at least one slave ON-time control circuit. Each slave ON-time control circuit has a closed-loop gainer to provide a gain by executing proportional integral to a difference between a master phase temperature and a slave phase temperature, a multiplier to provide a current feedback signal by multiplying a slave current signal with the gain, a bias circuit to provide a bias by executing proportional integral to a difference between a master phase current and the current feedback signal, and an adder to provide a corresponding slave ON-time control signal by adding the first ON-time control signal to a bias ON-time control signal provided by a bias ON-time generator based the bias.

Abstract: A controller used in a switching converter having a switch and converting an input voltage into an output voltage having a transient profile. The controller includes a transient sensing circuit, a mode determining circuit and an on time regulating circuit. The transient sensing circuit generates a transient voltage signal indicative of the transient profile of the output voltage. The mode determining circuit receives the transient voltage signal and a first feedback voltage signal indicative of the output voltage, and generates a mode signal based on a first comparison between the first feedback voltage signal and a first threshold voltage and a second comparison between the transient voltage signal and a second threshold voltage. The on time regulating circuit generates an on time signal to regulate an on time of the switch based on the mode signal.

Abstract: The present disclosure provides a sputtering reaction chamber and a process assembly of the sputtering reaction chamber. The process assembly includes a shield, and the shield includes an integrally formed body member and a cover ring member, wherein the body member may be in a ring shape. The cover ring member may extend from a bottom of the body member to an inner side of the body member and may be configured to press an edge of a to-be-processed workpiece when a process is performed. A cooling channel may be arranged in the cover ring member and the body member and may be configured to cool the cover ring member and the body member by transferring coolant. The process assembly of the sputtering reaction chamber and the sputtering reaction chamber provided by the present disclosure can reduce heat radiation of the process assembly to the to-be-processed workpiece and released gases and impurities to effectively reduce a whisker defect and improve a product yield.

Abstract: An air conditioner with an air purifying function includes a housing having an air inlet and an air outlet thereon. An air conditioning assembly and an air purifying assembly are disposed in the housing. The air conditioning assembly includes an air conditioning flue. A first fan and a heat exchanger are disposed in the air conditioning flue. The air conditioning flue connects with the air inlet and the air outlet respectively. The air purifying assembly includes an air purifying flue. A second fan and an air filter screen are disposed in the air purifying flue. The air purifying flue connects with the air inlet and the air outlet respectively.

Abstract: An air conditioner with an air purifying function includes a housing having an air inlet and an air outlet thereon. An air conditioning assembly and an air purifying assembly are disposed in the housing. The air conditioning assembly includes an air conditioning flue. A first fan and a heat exchanger are disposed in the air conditioning flue. The air conditioning flue connects with the air inlet and the air outlet respectively. The air purifying assembly includes an air purifying flue. A second fan and an air filter screen are disposed in the air purifying flue. The air purifying flue connects with the air inlet and the air outlet respectively.