Patents by Inventor Kellen SANNA

Kellen SANNA has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • METROLOGY SYSTEMS, MEASUREMENT OF WEAR SYSTEMS AND METHODS THEREOF
    Publication number: 20240167809
    Abstract: A method includes irradiating an object with an illumination beam, receiving, using a detector, scattered light from a first side of the object, generating a signal based on the scattered light, comparing the signal to a reference model, and determining a quantity of wear of the first side of the object based on the comparing. The first side of the object includes a layer of a coating material, and the irradiating is from a second side of the object. The scattered light includes transmitted light through the object from the second side to the first side.
    Type: Application
    Filed: March 31, 2022
    Publication date: May 23, 2024
    Applicant: ASML Holding N.V.
    Inventors: Venkata Siva Chaithanya CHILLARA, Kellen SANNA