Patents by Inventor Kelly Bruland

Kelly Bruland has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 9991090
    Abstract: The present invention discloses an electron microscope and FIB system for processing and imaging of a variety of materials using two separate laser beams of different characteristics. The first laser beam is used for large bulk material removal and deep trench etching of a workpiece. The second laser beam is used for finer precision work, such as micromachining of the workpiece, small spot processing, or the production of small heat affected zones. The first laser beam and the second laser beam can come from the same laser source or come from separate laser sources. Having one laser source has the additional benefits of making the system cheaper and being able to create separate external and internal station such that the debris generated from bulk material removal from the first laser beam will not interfere with vacuum or components inside the particle beam chamber.
    Type: Grant
    Filed: November 15, 2012
    Date of Patent: June 5, 2018
    Assignee: FEI Company
    Inventor: Kelly Bruland
  • Patent number: 9821486
    Abstract: An integrated station for extracting specimens suitable for viewing by a transmission electron microscope from a patterned semiconductor wafer, including a wafer cassette holder; a wafer transfer device; a nanomachining device, including a scanning electron microscope and a focused ion beam, a vacuum load lock and an operator control device, and wherein the operator control device notes locations of created lamellae; a plucker device; a control computer, adapted to control the wafer transfer device and the plucker device, commanding the plucker device to remover lamellae at the locations noted by the operator control device; and a user monitor and data input device, communicatively coupled to the computer. The wafer transfer device can transfer wafers from the wafer cassette holder to the vacuum load lock; from the vacuum load lock to the plucker device and from the plucker device to the wafer cassette holder.
    Type: Grant
    Filed: October 30, 2013
    Date of Patent: November 21, 2017
    Assignee: FEI Company
    Inventor: Kelly Bruland
  • Publication number: 20150114193
    Abstract: An integrated station for extracting specimens suitable for viewing by a transmission electron microscope from a patterned semiconductor wafer, including a wafer cassette holder; a wafer transfer device; a nanomachining device, including a scanning electron microscope and a focused ion beam, a vacuum load lock and an operator control device, and wherein the operator control device notes locations of created lamellae; a plucker device; a control computer, adapted to control the wafer transfer device and the plucker device, commanding the plucker device to remover lamellae at the locations noted by the operator control device; and a user monitor and data input device, communicatively coupled to the computer. The wafer transfer device can transfer wafers from the wafer cassette holder to the vacuum load lock; from the vacuum load lock to the plucker device and from the plucker device to the wafer cassette holder.
    Type: Application
    Filed: October 30, 2013
    Publication date: April 30, 2015
    Applicant: FEI Company
    Inventor: Kelly Bruland
  • Publication number: 20140131195
    Abstract: The present invention discloses an electron microscope and FIB system for processing and imaging of a variety of materials using two separate laser beams of different characteristics. The first laser beam is used for large bulk material removal and deep trench etching of a workpiece. The second laser beam is used for finer precision work, such as micromachining of the workpiece, small spot processing, or the production of small heat affected zones. The first laser beam and the second laser beam can come from the same laser source or come from separate laser sources. Having one laser source has the additional benefits of making the system cheaper and being able to create separate external and internal station such that the debris generated from bulk material removal from the first laser beam will not interfere with vacuum or components inside the particle beam chamber.
    Type: Application
    Filed: November 15, 2012
    Publication date: May 15, 2014
    Applicant: FEI Company
    Inventor: Kelly Bruland
  • Patent number: 8515701
    Abstract: A method for detecting particulate contamination under a workpiece fixtured by a calibrated material handling system includes performing 3D measurements of a workpiece at multiple of positions to construct a 3D map of the workpiece, calibrating the 3D map by comparing a pre-computed calibration map to the 3D measurements, and detecting particulate contamination by processing the calibrated map.
    Type: Grant
    Filed: March 20, 2008
    Date of Patent: August 20, 2013
    Assignee: Electro Scientific Industries, Inc.
    Inventors: Stephen Neal Swaringen, Kelly Bruland, Andrew Wells
  • Patent number: 8497450
    Abstract: A laser-based workpiece processing system includes sensors connected to a sensor controller that converts sensor signals into focused spot motion commands for actuating a beam steering device, such as a two-axis steering mirror. The sensors may include a beam position sensor for correcting errors detected in the optical path, such as thermally-induced beam wandering in response to laser or acousto-optic modulator pointing stability, or optical mount dynamics.
    Type: Grant
    Filed: October 26, 2007
    Date of Patent: July 30, 2013
    Assignee: Electro Scientific Industries, Inc.
    Inventors: Kelly Bruland, Mark Unrath, Stephen Swaringen, Ho Wai Lo, Clint Vandergiessen, Keith Grant
  • Patent number: 8278595
    Abstract: A predictive pulse triggering (PPT) method enables precise triggering of a laser beam in a link-processing system. The PPT method entails triggering the laser beam based on estimated relative motion parameters of the target and laser beam axis. The PPT method allows for a six-fold improvement in laser positioning accuracy over the conventional, entirely measurement-based method.
    Type: Grant
    Filed: March 16, 2007
    Date of Patent: October 2, 2012
    Assignee: Electro Scientific Industries, Inc.
    Inventors: Kelly Bruland, Clint Vandergiessen
  • Patent number: 8238007
    Abstract: A laser-based workpiece processing system includes sensors connected to a sensor controller that converts sensor signals into focused spot motion commands for actuating a beam steering device, such as a two-axis steering mirror. The sensors may include a beam position sensor for correcting errors detected in the optical path, such as thermally-induced beam wandering in response to laser or acousto-optic modulator pointing stability, or optical mount dynamics.
    Type: Grant
    Filed: December 26, 2006
    Date of Patent: August 7, 2012
    Assignee: Electro Scientific Industries, Inc.
    Inventors: Kelly Bruland, Mark Unrath, Stephen Swaringen, Ho Wai Lo, Clint Vandergiessen, Keith Grant
  • Publication number: 20120133381
    Abstract: A method of performing a function on a three-dimensional semiconductor chip package as well as on individual chips in the package is disclosed. That method involves the creation of an operative relationship between a function performer and an edge feature on the chip or chips wherein the edge feature consists of one or more of an electrically conductive pad, thermally conductive pad, a probe pad, a fuse, a resistor, a capacitor, an inductor, an optical emitter, an optical receiver, a test pad, a bond pad, a contact pin, a heat dissipator, an alignment marker, a metrology feature and a function performer may be any one or more of a test probe, the laser, a programming device, an interrogation device, a loading device or a tuning device. In addition, a chip per se with edge features is disclosed along with a three-dimensional stack of such chips in either of several different configurations.
    Type: Application
    Filed: November 30, 2010
    Publication date: May 31, 2012
    Applicant: ELECTRO SCIENTIFIC INDUSTRIES, INC.
    Inventors: Kelly BRULAND, Timothy R. WEBB, Andy E. HOOPER, John R. CARRUTHERS
  • Patent number: 7760331
    Abstract: A split axis stage architecture is implemented as a multiple stage positioning system that is capable of vibrationally and thermally stable material transport at high speed and rates of acceleration. A split axis design decouples stage motion along two perpendicular axes lying in separate, parallel planes. A dimensionally stable substrate in the form of a granite, or other stone slab, or of ceramic material or cast iron, is used as the base for lower and upper stages. The substrate is precisely cut (“lapped”) such that its upper and lower stage surface portions are flat and parallel to each other.
    Type: Grant
    Filed: February 20, 2007
    Date of Patent: July 20, 2010
    Assignee: Electro Scientific Industries, Inc.
    Inventors: Mark T. Kosmowski, Kelly Bruland
  • Patent number: 7608800
    Abstract: A method selectively processes structures on a workpiece with laser pulses. The structures are arranged in a linear pattern having approximately equal pitch. The pulses propagate along a laser beam propagation path terminating at a laser beam spot on the workpiece. The method fires a first processing pulse when the spot coincides with a first structure location, selectively blocks or clears the propagation path during the first pulse, moves the workpiece and the spot relative to one another such that the spot moves toward a second structure location at a speed less than the product of the laser's PRF and the pitch, fires a dummy pulse before the spot reaches the second structure location, blocks the propagation path during the dummy laser pulse, fires another processing pulse when the beam spot coincides with the second structure location, and selectively blocks or clears the propagation path during the second processing pulse.
    Type: Grant
    Filed: June 5, 2007
    Date of Patent: October 27, 2009
    Assignee: Electro Scientific Industries, Inc.
    Inventors: Kelly Bruland, Steve Swaringen, Steve Stone, Keith Grant
  • Publication number: 20080223837
    Abstract: A predictive pulse triggering (PPT) method enables precise triggering of a laser beam in a link-processing system. The PPT method entails triggering the laser beam based on estimated relative motion parameters of the target and laser beam axis. The PPT method allows for a six-fold improvement in laser positioning accuracy over the conventional, entirely measurement-based method.
    Type: Application
    Filed: March 16, 2007
    Publication date: September 18, 2008
    Applicant: Electro Scientific Industries, Inc.
    Inventors: Kelly Bruland, Clint Vandergiessen
  • Publication number: 20080221817
    Abstract: A method for detecting particulate contamination under a workpiece fixtured by a calibrated material handling system includes performing 3D measurements of a workpiece at multiple of positions to construct a 3D map of the workpiece, calibrating the 3D map by comparing a pre-computed calibration map to the 3D measurements, and detecting particulate contamination by processing the calibrated map.
    Type: Application
    Filed: March 20, 2008
    Publication date: September 11, 2008
    Applicant: Electro Scientific Industries, Inc.
    Inventors: Stephen Neal Swaringen, Kelly Bruland, Andrew Wells
  • Publication number: 20080196631
    Abstract: A split axis stage architecture is implemented as a multiple stage positioning system that is capable of vibrationally and thermally stable material transport at high speed and rates of acceleration. A split axis design decouples stage motion along two perpendicular axes lying in separate, parallel planes. A dimensionally stable substrate in the form of a granite, or other stone slab, or of ceramic material or cast iron, is used as the base for lower and upper stages. The substrate is precisely cut (“lapped”) such that its upper and lower stage surface portions are flat and parallel to each other.
    Type: Application
    Filed: February 20, 2007
    Publication date: August 21, 2008
    Inventors: Mark T. Kosmowski, Kelly Bruland
  • Publication number: 20080093349
    Abstract: A laser-based workpiece processing system includes sensors connected to a sensor controller that converts sensor signals into focused spot motion commands for actuating a beam steering device, such as a two-axis steering mirror. The sensors may include a beam position sensor for correcting errors detected in the optical path, such as thermally-induced beam wandering in response to laser or acousto-optic modulator pointing stability, or optical mount dynamics.
    Type: Application
    Filed: October 26, 2007
    Publication date: April 24, 2008
    Applicant: Electro Scientific Industries, Inc.
    Inventors: Kelly Bruland, Mark Unrath, Stephen Swaringen, Ho Lo, Clint Vandergiessen, Keith Grant
  • Patent number: 7363180
    Abstract: A method for calibrating a laser micro-machining system in three dimensions includes scanning a sample workpiece to determine the 3D surface, calculating the best fit surfaces to the scanned data in a series of steps, and storing the results so that subsequent workpieces can be calibrated to remove systematic errors introduced by variations in an associated material handling subsystem. The method optionally uses plate bending theory to model particulate contamination and splines to fit the 3D surface in a piecewise fashion to minimize the effect of local variations on the entire surface fit.
    Type: Grant
    Filed: February 15, 2005
    Date of Patent: April 22, 2008
    Assignee: Electro Scientific Industries, Inc.
    Inventors: Stephen Neal Swaringen, Kelly Bruland, Andrew Wells
  • Publication number: 20080035618
    Abstract: Various methods and systems measure, determine, or align a position of a laser beam spot relative to a semiconductor substrate having structures on or within the semiconductor substrate to be selectively processed by delivering a processing laser beam to a processing laser beam spot. The various methods and systems utilize those structures themselves to perform the measurement, determination, or alignment.
    Type: Application
    Filed: October 18, 2007
    Publication date: February 14, 2008
    Applicant: Electro Scientific Industries, Inc.
    Inventor: Kelly BRULAND
  • Publication number: 20080017618
    Abstract: A laser-based workpiece processing system includes sensors connected to a sensor controller that converts sensor signals into focused spot motion commands for actuating a beam steering device, such as a two-axis steering mirror. The sensors may include a beam position sensor for correcting errors detected in the optical path, such as thermally-induced beam wandering in response to laser or acousto-optic modulator pointing stability, or optical mount dynamics.
    Type: Application
    Filed: December 26, 2006
    Publication date: January 24, 2008
    Inventors: Kelly Bruland, Clint Vandergiessen, Keith Grant, Stephen Swaringen
  • Publication number: 20070228024
    Abstract: A method selectively processes structures on a workpiece with laser pulses. The structures are arranged in a linear pattern having approximately equal pitch. The pulses propagate along a laser beam propagation path terminating at a laser beam spot on the workpiece. The method fires a first processing pulse when the spot coincides with a first structure location, selectively blocks or clears the propagation path during the first pulse, moves the workpiece and the spot relative to one another such that the spot moves toward a second structure location at a speed less than the product of the laser's PRF and the pitch, fires a dummy pulse before the spot reaches the second structure location, blocks the propagation path during the dummy laser pulse, fires another processing pulse when the beam spot coincides with the second structure location, and selectively blocks or clears the propagation path during the second processing pulse.
    Type: Application
    Filed: June 5, 2007
    Publication date: October 4, 2007
    Inventors: Kelly Bruland, Steve Swaringen, Steve Stone, Keith Grant
  • Patent number: 7245412
    Abstract: A laser-based workpiece processing system includes sensors connected to a sensor controller that converts sensor signals into focused spot motion commands for actuating a beam steering device, such as a two-axis steering mirror. The sensors may include a beam position sensor for correcting errors detected in the optical path, such as thermally-induced beam wandering in response to laser or acousto-optic modulator pointing stability, or optical mount dynamics.
    Type: Grant
    Filed: November 9, 2004
    Date of Patent: July 17, 2007
    Assignee: Electro Scientific Industries, Inc.
    Inventors: Kelly Bruland, Clint Vandergiessen, Keith Grant, Stephen Swaringen