Patents by Inventor Kelly Churton

Kelly Churton has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Silver reflectors for semiconductor processing chambers
    Patent number: 8314368
    Abstract: A silver reflector for reflecting radiation from a lamp in a semiconductor processing chamber is disclosed. The reflector may be a sleeve to be disposed in a lightpipe or part of a lamphead. The silver may be in the form of a coating on the sleeve or the lamphead.
    Type: Grant
    Filed: February 22, 2008
    Date of Patent: November 20, 2012
    Assignee: Applied Materials, Inc.
    Inventors: Joseph M. Ranish, Kelly Churton, Mark E. Lindsay, Mischa Ann Plesha, Sage Berta
  • SILVER REFLECTORS FOR SEMICONDUCTOR PROCESSING CHAMBERS
    Publication number: 20090212037
    Abstract: A silver reflector for reflecting radiation from a lamp in a semiconductor processing chamber is disclosed. The reflector may be a sleeve to be disposed in a lightpipe or part of a lamphead. The silver may be in the form of a coating on the sleeve or the lamphead.
    Type: Application
    Filed: February 22, 2008
    Publication date: August 27, 2009
    Inventors: Joseph M. Ranish, Kelly Churton, Mark E. Lindsay, Mischa Ann Plesha, Sage Berta