Patents by Inventor Ken Funato

Ken Funato has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • In-line sputtering apparatus
    Patent number: 6592729
    Abstract: An in-line sputtering apparatus includes a deposition chamber, a target installed inside the deposition chamber, a substrate holder to hold a substrate, a substrate holder transferring mechanism which transfers the substrate holder relative to the target such that a thin film made of a material of the target that is formed on the substrate held by the substrate holder, first and second thickness distribution correcting members and a plate driving mechanism. The first and second thickness distribution correcting members are provided above the target, and each of the first and second thickness distribution correcting members has a plurality of movable plates. The plate driving mechanism is linked to the first and second thickness distribution correcting members and moves the corresponding movable plates of the first and second distribution correcting plates, symmetrically.
    Type: Grant
    Filed: August 17, 2001
    Date of Patent: July 15, 2003
    Assignee: Murata Manufacturing Co., Ltd.
    Inventors: Kazunori Shimoda, Eiichi Takata, Michio Kadota, Ken Funato
  • In-line sputtering apparatus
    Publication number: 20020046946
    Abstract: An in-line sputtering apparatus includes a deposition chamber, a target installed inside the deposition chamber, a substrate holder to hold a substrate, a substrate holder transferring mechanism which transfers the substrate holder relative to the target such that a thin film made of a material of the target that is formed on the substrate held by the substrate holder, first and second thickness distribution correcting members and a plate driving mechanism. The first and second thickness distribution correcting members are provided above the target, and each of the first and second thickness distribution correcting members has a plurality of movable plates. The plate driving mechanism is linked to the first and second thickness distribution correcting members and moves the corresponding movable plates of the first and second distribution correcting plates, symmetrically.
    Type: Application
    Filed: August 17, 2001
    Publication date: April 25, 2002
    Inventors: Kazunori Shimoda, Eiichi Takata, Michio Kadota, Ken Funato