Abstract: A manifold apparatus includes a plurality of manifold blocks which are coupled together in a line. In each of the manifold blocks, an axial line of a branch port is deviated from an axial line of a main port in a direction perpendicular to a coupling direction in which the manifold blocks are coupled together. The plurality of manifold blocks are configured to be coupled together in a state where one of the adjacent manifold blocks is inverted 180° from the other of the adjacent manifold blocks in a direction perpendicular to the axial direction of the branch port and the coupling direction.

Abstract: A manifold apparatus includes a plurality of manifold blocks which are coupled together in a line. In each of the manifold blocks, an axial line of a branch port is deviated from an axial line of a main port in a direction perpendicular to a coupling direction in which the manifold blocks are coupled together. The plurality of manifold blocks are configured to be coupled together in a state where one of the adjacent manifold blocks is inverted 180° from the other of the adjacent manifold blocks in a direction perpendicular to the axial direction of the branch port and the coupling direction.

Abstract: A flow sensor includes a detector provided on a side surface of a body formed in a tubular shape. First and second passages formed in the interior of the body communicate with an introduction passage of the detector via first and second sensor passages. The first and second sensor passages penetrate through and open respectively on first and second projections, which project at predetermined heights from an inner circumferential surface of the body, communicating with the first and second passages. A fluid, which flows from the first passage and into the first sensor passage, after being guided to the introduction passage and the flow rate thereof detected by a detector, flows through the second sensor passage and into the second passage.

Abstract: A flow sensor includes a detector provided on a side surface of a body formed in a tubular shape. First and second passages formed in the interior of the body communicate with an introduction passage of the detector via first and second sensor passages. The first and second sensor passages penetrate through and open respectively on first and second projections, which project at predetermined heights from an inner circumferential surface of the body, communicating with the first and second passages. A fluid, which flows from the first passage and into the first sensor passage, after being guided to the introduction passage and the flow rate thereof detected by a detector, flows through the second sensor passage and into the second passage.