Abstract: An analysis apparatus, a substrate processing system, a substrate processing apparatus, an analysis method, and an analysis program improve adjustment accuracy in adjusting the temperature of a substrate. The analysis apparatus includes circuitry that performs training to generate a trained model using setting parameters for temperature adjustment elements in regions divided from a substrate support in a process space in a first vacuum environment and using a first temperature data set that is data of temperatures at positions on a substrate supported by the substrate support, and that calculates setting parameters for the temperature adjustment elements corresponding to a target temperature of the substrate using the trained model.

Abstract: A plasma processing apparatus includes a chamber; an apparatus-side controller configured to control plasma processing in the chamber; and a monitoring unit configured to monitor a monitoring target that is disposed within the chamber, or is connected directly or indirectly to the chamber. The apparatus-side controller sets the monitoring target and a timing at which monitoring target information is to be acquired. The monitoring unit acquires the monitoring target information transmitted from the monitoring target to the apparatus-side controller, detects an occurrence of an abnormality in the chamber based on the monitoring target information, and controls the monitoring target for the chamber in which the abnormality occurs.

Abstract: A plasma processing apparatus includes a chamber; an apparatus-side controller configured to control plasma processing in the chamber; and a monitoring unit configured to monitor a monitoring target that is disposed within the chamber, or is connected directly or indirectly to the chamber. The apparatus-side controller sets the monitoring target and a timing at which monitoring target information is to be acquired. The monitoring unit acquires the monitoring target information transmitted from the monitoring target to the apparatus-side controller, detects an occurrence of an abnormality in the chamber based on the monitoring target information, and controls the monitoring target for the chamber in which the abnormality occurs.

Abstract: The present invention provides a nucleic acid synthesis method capable of continuously carrying out an extension reaction and a single molecule sequencing method capable of obtaining base information accurately at high speed. A method for synthesizing a nucleic acid, including the steps of: forming a complex of a target nucleic acid hybridized to a primer oligonucleotide and a DNA polymerase ?; allowing the DNA polymerase ? to incorporate a fluorescently-labeled dNTP so that the fluorescently-labeled dNTP is bound to the 3? end of the primer oligonucleotide; and allowing the DNA polymerase ? to continuously incorporate fluorescently-labeled dNTP to extend a nucleic acid complementary to the target nucleic acid from the 3? end of the bound fluorescently-labeled dNTP.

Abstract: The present invention provides a fine-particle sorting technique that uses optical pressure (optical force) and that can be applied in place of heretofore known cell sorting techniques; and a fine-particle recovering technique therefor. The fine-particle recovering method of the present invention comprises directing a laser beam toward a flow path of fine particles in such a manner that the laser beam crosses the flow direction of the fine particles to thereby deflect the direction of movement of the fine particles to be recovered, in the direction of convergence of the laser beam. The sorting method of the present invention comprises performing flow cytometric sorting of fine particles according to the above recovering method of the present invention.

Abstract: The present invention provides a fine-particle sorting technique that uses optical pressure (optical force) and that can be applied in place of heretofore known cell sorting techniques; and a fine-particle recovering technique therefor. The fine-particle recovering method of the present invention comprises directing a laser beam toward a flow path of fine particles in such a manner that the laser beam crosses the flow direction of the fine particles to thereby deflect the direction of movement of the fine particles to be recovered, in the direction of convergence of the laser beam. The sorting method of the present invention comprises performing flow cytometric sorting of fine particles according to the above recovering method of the present invention.

Abstract: The present invention relates to an electron tube comprising, at least, a cathode electrode, a face plate having a photocathode, and an electron entrance surface provided at a position where the electron emitted from the photocathode reaches. The object of the present invention is to provide an electron tube which can reduce its size and has a structure for improving the workability in its assembling process. In particular, the electron tube according to the present invention has a bonding ring, provided between the face plate and the cathode electrode, for bonding the face plate and the cathode electrode together. The bonding ring is made of a metal material selected from the group consisting of In, Au, Pb, alloys containing In, and alloys containing Pb.

Abstract: This invention relates to an electron tube which stabilizes the orbits of electrons accelerated and focused by an electron lens and has a structure for effectively suppressing noise generated due to discharge. This electron tube has, at two ends of an insulating container, a cathode electrode and an anode electrode which constitute the electron lens. Particularly, in the electron tube, one end of the cathode electrode and a photocathode are supported by a conductive member arranged at one end of the insulating container, and the cathode electrode is electrically connected to the photocathode. The cathode electrode partially extends to a stem along the inner wall of the insulating container and is tapered toward the stem so that the distal end portion of the cathode electrode is separated from the inner wall of the insulating container.

Abstract: The present invention relates to an electron tube includes, at least, a cathode electrode and a face plate having a photocathode which are arranged at one end of a body, and a stem arranged at the other end of the body for defining the position of an electron entrance surface where the electron emitted from the photocathode reaches. The object of the present invention is to provide an electron tube which can reduce its size and has a structure for improving the workability in its assembling process. In particular, the electron tube in accordance with the present invention comprises a bonding ring, provided between the face plate and the cathode electrode, for bonding the face plate and the cathode electrode together. The bonding ring is made of a metal material selected from the group consisting of In, Au, Pb, alloys containing In, and alloys containing Pb.