Patents by Inventor Ken K. Yu

Ken K. Yu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • CMOS process for fabricating integrated circuits, particularly dynamic memory cells with storage capacitors
    Patent number: 4536947
    Abstract: A CMOS process is described which is particularly suited for forming dynamic memory cells. The cells are formed in an n-well and a single plate member formed from a first layer of polysilicon is used for the entire array. Unique etching of the first polysilicon layer prevents stringers from occurring when the second layer of polysilicon is deposited. A tri-layer dielectric is used for the capacitors in the array. Novel "rear-end" processing is disclosed using a phosphorus doped glass.
    Type: Grant
    Filed: July 2, 1984
    Date of Patent: August 27, 1985
    Assignee: Intel Corporation
    Inventors: Mark T. Bohr, Ken K. Yu, Leo D. Yau, Shyam G. Garg
  • CMOS Process for fabricating integrated circuits, particularly dynamic memory cells
    Patent number: 4505026
    Abstract: A CMOS process is described which is particularly suited for forming dynamic memory cells. The cells are formed in an n-well and a single plate member formed from a first layer of polysilicon is used for the entire array. Unique etching of the first polysilicon layer prevents stringers from occurring when the second layer of polysilicon is deposited. A tri-layer dielectric is used for the capacitors in the array. Novel "rear-end" processing is disclosed using a phosphorus doped glass.
    Type: Grant
    Filed: July 14, 1983
    Date of Patent: March 19, 1985
    Assignee: Intel Corporation
    Inventors: Mark T. Bohr, Ken K. Yu, Leo D. Yau, Shyam G. Garg