Patents by Inventor Ken Katsukura

Ken Katsukura has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Lithography apparatus and method of manufacturing article
    Patent number: 9257921
    Abstract: The present invention provides a lithography apparatus for forming a pattern on a substrate, including a motor configured to drive a table for holding the substrate in accordance with a driving profile, a setting unit configured to set one of a normal mode and a power saving mode as an operation mode of the motor, and a controller configured to change the driving profile when the power saving mode is set, such that an amount of generated heat of the motor caused by driving of the table is smaller than that in the normal mode, and the number of substrates to be processed by the lithography apparatus per unit time is satisfied.
    Type: Grant
    Filed: May 27, 2015
    Date of Patent: February 9, 2016
    Assignee: CANON KABUSHIKI KAISHA
    Inventors: Yoshinori Makita, Tadashi Aoki, Hiroshi Isoyama, Ken Katsukura, Hiroshi Tanaka
  • LITHOGRAPHY APPARATUS AND METHOD OF MANUFACTURING ARTICLE
    Publication number: 20150357944
    Abstract: The present invention provides a lithography apparatus for forming a pattern on a substrate, including a motor configured to drive a table for holding the substrate in accordance with a driving profile, a setting unit configured to set one of a normal mode and a power saving mode as an operation mode of the motor, and a controller configured to change the driving profile when the power saving mode is set, such that an amount of generated heat of the motor caused by driving of the table is smaller than that in the normal mode, and the number of substrates to be processed by the lithography apparatus per unit time is satisfied.
    Type: Application
    Filed: May 27, 2015
    Publication date: December 10, 2015
    Inventors: Yoshinori Makita, Tadashi Aoki, Hiroshi Isoyama, Ken Katsukura, Hiroshi Tanaka