Patents by Inventor Ken Maehara

Ken Maehara has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Electrostatic chuck for an electrically insulative substrate, and a method of using same
    Patent number: 7209339
    Abstract: An electrostatic chuck for attracting an insulative substrate to be processed, the electrostatic chuck comprising a dielectric layer having a first surface which attracts an insulative substrate, and a second surface on which are provided a plurality of electrodes, and an insulative support base plate fixing said dielectric layer. A distance between adjacent ones of the electrodes and the thickness of the dielectric layer are adjusted such that when a potential difference is established between the electrodes, a non-uniform electric field is formed in which the insulative substrate is partially polarized and attracted to the first surface by gradient force.
    Type: Grant
    Filed: May 28, 2004
    Date of Patent: April 24, 2007
    Assignees: Ulvac, Inc., Toto Ltd.
    Inventors: Tetsuo Kitabayashi, Hiroaki Hori, Takeshi Uchimura, Noriaki Tateno, Koh Fuwa, Ken Maehara
  • Electrostatic chuck for an electrically insulative substrate, and a method of using same
    Publication number: 20040218340
    Abstract: An electrostatic chuck for attracting an insulative substrate to be processed, the electrostatic chuck comprising a dielectric layer having a first surface which attracts an insulative substrate, and a second surface on which are provided a plurality of electrodes, and an insulative support base plate fixing said dielectric layer. A distance between adjacent ones of the electrodes and the thickness of the dielectric layer are adjusted such that when a potential difference is established between the electrodes, a non-uniform electric field is formed in which the insulative substrate is partially polarized and attracted to the first surface by gradient force.
    Type: Application
    Filed: May 28, 2004
    Publication date: November 4, 2004
    Applicants: Toto, Ltd., Ulvac, Inc.
    Inventors: Tetsuo Kitabayashi, Hiroaki Hori, Takeshi Uchimura, Noriaki Tateno, Koh Fuwa, Ken Maehara