Abstract: In an automated guided vehicle including a transfer equipment which transfers a wafer, a buffer cassette which temporarily stores the wafer, and a pressing member which is provided at an opening of the buffer cassette, when traveling the automated guided vehicle, if the pressing member is slid to a center position from an end position of the opening of the buffer cassette to contact and press against the edge of the wafer, the pressing member was easily damaged by being rubbed against a periphery of the wafer, and there was a problem in durability of the pressing member. The pressing member 55 can transfer between a “pressing” position which contacts against the edge of the wafer 10 to press the wafer 10, and a “receding” position which is located away from the edge of the wafer 10.

Abstract: In an automated guided vehicle including a transfer equipment which transfers a wafer, a buffer cassette which temporarily stores the wafer, and a pressing member which is provided at an opening of the buffer cassette, when traveling the automated guided vehicle, if the pressing member is slid to a center position from an end position of the opening of the buffer cassette to contact and press against the edge of the wafer, the pressing member was easily damaged by being rubbed against a periphery of the wafer, and there was a problem in durability of the pressing member.

Abstract: An optical disk pasting apparatus 1 for pasting two disks by overlapping the second disk D2 on the first disk D1 on which an adhesive agent 4 is coated, is featured in that said second disk D2 is overlapped on the first disk D1 while adsorbing and holding said second disk D2 by warping so that the second disk is swelled in a direction (the direction of the arrow X) opposite to the first disk D1 side opposed the second disk D2, wherein closed space 5 formed between both disks D1 and D2 is vacuumed and attracted by bringing the outside areas of the first disk D1 and the second disk D2 in contact with each other.