Abstract: A work piece handling apparatus moves workpieces with a plurality of independently movable load cups that have combined multiple axes of motion. The apparatus can load and unload work pieces from a wet process station and move work pieces between wet process stations and maintain wet chemistry delivery to the workpiece without involving a robot. A method of work piece handling using the apparatus provides a significant throughput improvement by reducing the inherent time lag of pneumatic systems and eliminating multiple steps involving the robot during inter-station wafer transfer.

Abstract: An exhaust system to remove exhaust from an engine of a vehicle may include a first exhaust member to conduct the exhaust from the engine of the vehicle to the atmosphere and a source of pressurized fluid which may be air or gas to conduct the pressurized fluid to the first exhaust member to cool the exhaust from the engine of the vehicle. The source of pressurized fluid may be a blower, and the source of pressurized fluids may be a air dam. The blower may be connected to a battery of the vehicle, and the blower may include a sensor to determine if a predetermined speed has been reached to allow ram air input or to warn of back pressure, high temperature or current flow. The sensor may inactivate the blower when the predetermined speed has been reached. The source of pressurized fluid may be compressed air, and the source of the pressurized fluid may be refrigerated air.