Abstract: There are provided a hydrogen production apparatus, a fuel cell system and operation method thereof, which can more reliably suppress degradation due to oxidation of a catalyst in a hydrogen production apparatus even when start-ups and shutdowns are repeated without a purge operation during the shutdowns. The hydrogen production apparatus includes a reforming part, a shift reaction part, and a selective oxidation reaction part having a selective oxidation catalyst bed packed with a selective oxidation catalyst, wherein the hydrogen production apparatus has an oxygen absorbent bed packed with an oxygen absorbent capable of absorbing oxygen and capable of being regenerated by a reducing gas, and the oxygen absorbent bed and the selective oxidation catalyst bed are stacked with the oxygen absorbent bed on the downstream side, and the hydrogen production apparatus has means for opening the downstream of the oxygen absorbent bed to the atmosphere. The fuel cell system has this hydrogen production apparatus.

Abstract: A reforming apparatus for reforming a raw fuel into a hydrogen-rich reformed gas includes a reformer for generating the reformed gas from the raw fuel, and a steam supply means for supplying the steam to the reformer. The steam supply means has a dry-out heat exchanger that dries out the water by conducting heat exchange with the reformed gas generated when the raw fuel is combusted. The cross-sectional area of passage in the dry-out heat exchanger is larger than that of a pipe connected upstream of the dry-out heat exchanger.

Abstract: In a reforming apparatus, for use in a fuel cell, for reforming a raw fuel into a hydrogen-rich reformed gas, a reformer generates the reformed gas from the raw fuel. A shift reactor reduces carbon monoxide contained in the reformed gas through a shift reaction. A selective oxidation unit reduces the carbon monoxide contained in the reformed gas that has passed through the shift reactor by performing selective oxidation on the carbon monoxide. A reforming reaction tube houses linearly the reformer, the shift reactor and the selective oxidation unit in this order.

Abstract: In a reforming apparatus, for use in a fuel cell, for reforming a raw fuel into a hydrogen-rich reformed gas, a reformer generates the reformed gas from the raw fuel. A shift reactor reduces carbon monoxide contained in the reformed gas through a shift reaction. A selective oxidation unit reduces the carbon monoxide contained in the reformed gas that has passed through the shift reactor by performing selective oxidation on the carbon monoxide. A reforming reaction tube houses linearly the reformer, the shift reactor and the selective oxidation unit in this order.

Abstract: An exhaust gas processing apparatus for processing a mixed gas discharged from a semiconductor manufacturing apparatus is provided with: an adsorption separation unit for separating a monosilane gas that requires abatement and a hydrogen gas that does not require abatement by allowing the mixed gas to pass through and then by mainly adsorbing the monosilane gas among a plurality of types of gases contained in the mixed gas; a heating unit for desorbing the monosilane adsorbed onto the adsorption separation unit; a silane gas abatement unit for abating a monosilane gas desorbed from the adsorption separation unit; and a hydrogen gas discharge unit for discharging a hydrogen gas separated from the mixed gas by the adsorption separation unit.

Abstract: In a reforming apparatus, for use in a fuel cell, for reforming a raw fuel into a hydrogen-rich reformed gas, a reformer generates the reformed gas from the raw fuel. A shift reactor reduces carbon monoxide contained in the reformed gas through a shift reaction. A selective oxidation unit reduces the carbon monoxide contained in the reformed gas that has passed through the shift reactor by performing selective oxidation on the carbon monoxide. A reforming reaction tube houses linearly the reformer, the shift reactor and the selective oxidation unit in this order. A combustion means produces combustion exhaust gas by combusting the raw fuel. An outer casing is placed around the reforming reaction tube, and the outer casing has a larger diameter than that of the reforming reaction tube. A heated flow passage through which the combustion exhaust gas passes to heat the reforming reaction tube is formed between the reforming reaction tube and the outer casing.

Abstract: A reforming apparatus for reforming a raw fuel into a hydrogen-rich reformed gas includes a reformer for generating the reformed gas from the raw fuel, and a steam supply means for supplying the steam to the reformer. The steam supply means has a dry-out heat exchanger that dries out the water by conducting heat exchange with the reformed gas generated when the raw fuel is combusted. The cross-sectional area of passage in the dry-out heat exchanger is larger than that of a pipe connected upstream of the dry-out heat exchanger.

Abstract: In a reforming apparatus, for use in a fuel cell, for reforming a raw fuel into a hydrogen-rich reformed gas, a reformer generates the reformed gas from the raw fuel. A shift reactor reduces carbon monoxide contained in the reformed gas through a shift reaction. A selective oxidation unit reduces the carbon monoxide contained in the reformed gas that has passed through the shift reactor by performing selective oxidation on the carbon monoxide. A reforming reaction tube houses linearly the reformer, the shift reactor and the selective oxidation unit in this order. A combustion means produces combustion exhaust gas by combusting the raw fuel. An outer casing is placed around the reforming reaction tube, and the outer casing has a larger diameter than that of the reforming reaction tube. A heated flow passage through which the combustion exhaust gas passes to heat the reforming reaction tube is formed between the reforming reaction tube and the outer casing.

Abstract: There are provided a hydrogen production apparatus, a fuel cell system and operation method thereof, which can more reliably suppress degradation due to oxidation of a catalyst in a hydrogen production apparatus even when start-ups and shutdowns are repeated without a purge operation during the shutdowns. The hydrogen production apparatus includes a reforming part, a shift reaction part, and a selective oxidation reaction part having a selective oxidation catalyst bed packed with a selective oxidation catalyst, wherein the hydrogen production apparatus has an oxygen absorbent bed packed with an oxygen absorbent capable of absorbing oxygen and capable of being regenerated by a reducing gas, and the oxygen absorbent bed and the selective oxidation catalyst bed are stacked with the oxygen absorbent bed on the downstream side, and the hydrogen production apparatus has means for opening the downstream of the oxygen absorbent bed to the atmosphere. The fuel cell system has this hydrogen production apparatus.