Patents by Inventor Ken T. Chan

Ken T. Chan has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Registration of patterns formed of multiple fields
    Patent number: 5301124
    Abstract: A pattern is aligned and exposed with a lithography system so that chips larger than the deflection field can be formed by exposing M.times.N fields in a mosaic pattern. The method corrects the deflection field to compensate for the orientation of a previous pattern on a substrate and compensates for errors due to height caused by the beam landing non perpendicular to the target. Two basic procedures disclosed are called "3-mark" which are only applicable to 2.times.2 arrays of fields, and "M.times.N" which covers the general situation, but with slightly less accuracy.
    Type: Grant
    Filed: September 9, 1993
    Date of Patent: April 5, 1994
    Assignee: International Business Machines Corporation
    Inventors: Ken T. Chan, Donald E. Davis, William A. Enichen, Cecil T. Ho, Edward V. Weber, Guenther Langner