Patents by Inventor Ken Tran
Ken Tran has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20180233333Abstract: An apparatus for abatement of gases is provided. The apparatus includes a toroidal plasma chamber having a plurality of inlets and an outlet, and at least one chamber wall. One or more magnetic cores are disposed relative to the toroidal plasma chamber. The plasma chamber confines a toroidal plasma. A second gas inlet is positioned on the toroidal plasma chamber between a first gas inlet and the gas outlet at a distance d from the gas outlet, such that a toroidal plasma channel volume between the first gas inlet and the second gas inlet in the is substantially filled by the inert gas, the distance d based on a desired residence time of the gas to be abated.Type: ApplicationFiled: April 12, 2018Publication date: August 16, 2018Inventors: Xing Chen, Ilya Pokidov, Feng Tian, Ken Tran, David Lam, Kevin W. Wenzel
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Patent number: 9991098Abstract: An apparatus for abatement of gases is provided. The apparatus includes a toroidal plasma chamber having a plurality of inlets and an outlet, and at least one chamber wall. One or more magnetic cores are disposed relative to the toroidal plasma chamber. The plasma chamber confines a toroidal plasma. A second gas inlet is positioned on the toroidal plasma chamber between a first gas inlet and the gas outlet at a distance d from the gas outlet, such that a toroidal plasma channel volume between the first gas inlet and the second gas inlet in the is substantially filled by the inert gas, the distance d based on a desired residence time of the gas to be abated.Type: GrantFiled: April 10, 2017Date of Patent: June 5, 2018Assignee: MKS Instruments, Inc.Inventors: Xing Chen, Ilya Pokidov, Feng Tian, Ken Tran, David Lam, Kevin W. Wenzel
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Patent number: 9865426Abstract: Improvements in the supply of high-frequency electrical power to ozone-producing cells can be accomplished using the systems and techniques described herein. Application of a DC-DC converter operating at a switching frequency substantially greater than a load frequency, supports generation of a high-voltage AC for powering such cells, while allowing for reductions in component size and reductions in a quality factor of a load tuning circuit. Controllable power inverters used in obtaining one or more of the switching and load frequencies can be controlled using feedback techniques to provide stable, high-quality power to ozone-producing cells under variations in one or more of externally supplied power and load conditions. An inrush protection circuit can also be provided to selectively introduce a current-limiting resistance until an input DC bus has been sufficiently initialized as determined by measurements obtained from the DC bus.Type: GrantFiled: February 29, 2016Date of Patent: January 9, 2018Assignee: MKS Instruments, Inc.Inventors: Ken Tran, Feng Tian, Xing Chen, Franklin Lee
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Publication number: 20170213704Abstract: An apparatus for abatement of gases is provided. The apparatus includes a toroidal plasma chamber having a plurality of inlets and an outlet, and at least one chamber wall. One or more magnetic cores are disposed relative to the toroidal plasma chamber. The plasma chamber confines a toroidal plasma. A second gas inlet is positioned on the toroidal plasma chamber between a first gas inlet and the gas outlet at a distance d from the gas outlet, such that a toroidal plasma channel volume between the first gas inlet and the second gas inlet in the is substantially filled by the inert gas, the distance d based on a desired residence time of the gas to be abated.Type: ApplicationFiled: April 10, 2017Publication date: July 27, 2017Inventors: Xing Chen, Ilya Pokidov, Feng Tian, Ken Tran, David Lam, Kevin W. Wenzel
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Patent number: 9648716Abstract: A power system for a reactive gas generator can include a direct three phase inverter. A resonant tank can further be included to receive a square wave output of the direct three phase inverter and provide a sine wave output. The power system can include an inverter controller that turns on and off selected switches of the direct three phase inverter based on states of the three phases of a three phase AC power supply, where a switch is turned on with an adaptive ON time and a modulated OFF time depending on a desired output power.Type: GrantFiled: September 2, 2015Date of Patent: May 9, 2017Assignee: MKS Instruments, Inc.Inventors: Ken Tran, Feng Tian
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Patent number: 9630142Abstract: An apparatus for abatement of gases is provided. The apparatus includes a toroidal plasma chamber having a plurality of inlets and an outlet, and at least one chamber wall. One or more magnetic cores are disposed relative to the toroidal plasma chamber. The plasma chamber confines a toroidal plasma. A second gas inlet is positioned on the toroidal plasma chamber between a first gas inlet and the gas outlet at a distance d from the gas outlet, such that a toroidal plasma channel volume between the first gas inlet and the second gas inlet in the is substantially filled by the inert gas, the distance d based on a desired residence time of the gas to be abated.Type: GrantFiled: March 14, 2014Date of Patent: April 25, 2017Assignee: MKS Instruments, Inc.Inventors: Xing Chen, Ilya Pokidov, Feng Tian, Ken Tran, David Lam, Kevin W. Wenzel
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Publication number: 20170064802Abstract: A power system for a reactive gas generator can include a direct three phase inverter. A resonant tank can further be included to receive a square wave output of the direct three phase inverter and provide a sine wave output. The power system can include an inverter controller that turns on and off selected switches of the direct three phase inverter based on states of the three phases of a three phase AC power supply, where a switch is turned on with an adaptive ON time and a modulated OFF time depending on a desired output power.Type: ApplicationFiled: September 2, 2015Publication date: March 2, 2017Inventors: Ken TRAN, Feng TIAN
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Publication number: 20160181063Abstract: Improvements in the supply of high-frequency electrical power to ozone-producing cells can be accomplished using the systems and techniques described herein. Application of a DC-DC converter operating at a switching frequency substantially greater than a load frequency, supports generation of a high-voltage AC for powering such cells, while allowing for reductions in component size and reductions in a quality factor of a load tuning circuit. Controllable power inverters used in obtaining one or more of the switching and load frequencies can be controlled using feedback techniques to provide stable, high-quality power to ozone-producing cells under variations in one or more of externally supplied power and load conditions. An inrush protection circuit can also be provided to selectively introduce a current-limiting resistance until an input DC bus has been sufficiently initialized as determined by measurements obtained from the DC bus.Type: ApplicationFiled: February 29, 2016Publication date: June 23, 2016Applicant: MKS Instruments, Inc.Inventors: Ken Tran, Feng Tian, Xing Chen, Franklin Lee
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Patent number: 9302912Abstract: Improvements in the supply of high-frequency electrical power to ozone-producing cells can be accomplished using the systems and techniques described herein. Application of a DC-DC converter operating at a switching frequency substantially greater than a load frequency, supports generation of a high-voltage AC for powering such cells, while allowing for reductions in component size and reductions in a quality factor of a load tuning circuit. Controllable power inverters used in obtaining one or more of the switching and load frequencies can be controlled using feedback techniques to provide stable, high-quality power to ozone-producing cells under variations in one or more of externally supplied power and load conditions. An inrush protection circuit can also be provided to selectively introduce a current-limiting resistance until an input DC bus has been sufficiently initialized as determined by measurements obtained from the DC bus.Type: GrantFiled: March 28, 2012Date of Patent: April 5, 2016Assignee: MKS Instruments, Inc.Inventors: Ken Tran, Feng Tian, Xing Chen, Franklin Lee
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Publication number: 20140262746Abstract: An apparatus for abatement of gases is provided. The apparatus includes a toroidal plasma chamber having a plurality of inlets and an outlet, and at least one chamber wall. One or more magnetic cores are disposed relative to the toroidal plasma chamber. The plasma chamber confines a toroidal plasma. A second gas inlet is positioned on the toroidal plasma chamber between a first gas inlet and the gas outlet at a distance d from the gas outlet, such that a toroidal plasma channel volume between the first gas inlet and the second gas inlet in the is substantially filled by the inert gas, the distance d based on a desired residence time of the gas to be abated.Type: ApplicationFiled: March 14, 2014Publication date: September 18, 2014Applicant: MKS Instruments, Inc.Inventors: Xing Chen, IIya Pokidov, Arthur Tian, Ken Tran, David Lam, Kevin W. Wenzel
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Patent number: 8749939Abstract: A switching apparatus includes a first transistor, a second transistor, a first circuit module, a first current sensor and a control circuit. The first transistor includes first, second and third terminals. The first terminal of the first transistor is coupled to a first power terminal. The third terminal of the first transistor includes a gate or base of the first transistor. The second transistor includes first, second and third terminals. The first terminal of the second transistor is coupled to a second power terminal. The second terminal of the second transistor is coupled to the second terminal of the first transistor. The third terminal of the second transistor includes a gate or base of the second transistor. The first circuit module includes an inductor in parallel with a diode. The first circuit module is connected between the first terminal of the second transistor and the second power terminal.Type: GrantFiled: May 13, 2011Date of Patent: June 10, 2014Assignee: MKS Instruments, Inc.Inventors: Ken Tran, Feng Tian, Xing Chen
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Patent number: 8692466Abstract: Described are methods and apparatuses, including computer program products, for igniting and/or sustaining a plasma in a reactive gas generator. Power is provided from an ignition power supply to a plasma ignition circuit. A pre-ignition signal of the plasma ignition circuit is measured. The power provided to the plasma ignition circuit is adjusted based on the measured pre-ignition signal and an adjustable pre-ignition control signal. The adjustable pre-ignition control signal is adjusted after a period of time has elapsed.Type: GrantFiled: February 27, 2009Date of Patent: April 8, 2014Assignee: MKS Instruments Inc.Inventors: Souheil Benzerrouk, Siddharth P. Nagarkatti, Andrew Cowe, Ali Shajii, Jesse E. Ambrosina, Ken Tran, Xing Chen
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Patent number: 8680777Abstract: A power system for a dielectric barrier discharge system, such as used for generating ozone, can include a full bridge inverter stage and parallel resonant tank outputting a signal for powering a dielectric barrier discharge cell stack. The inverter stage is controlled using a combination of pulse width modulation (PWM) and frequency modulation (FM) to enable soft switching through all load conditions—from full load to light load. A current control loop error amplifier compensator can provide a duty cycle adjustment signal to a phase shift PWM controller chip that generates the switching signals for the inverter stage. A feedback signal is also used to adjust a clock frequency time constant of the PWM controller chip to provide the FM. In one embodiment, the feedback signal is an output of an inverting amplifier connected at an output of the current control loop error amplifier compensator.Type: GrantFiled: March 27, 2012Date of Patent: March 25, 2014Assignee: MKS Instruments, Inc.Inventors: Ken Tran, Xing Chen, Russell L. Newman, Franklin Lee
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Patent number: 8641978Abstract: A transformer-less power supply is provided for ozone generation. The power supply advantageously reduces costs and increases reliability of ozone generators. The power supply provides a first AC voltage from a power source to a resonant circuit and the resonant circuit provides a second AC voltage to the ozone generating unit, the second AC voltage being greater than the first AC voltage. A controller for the power supply that adapts to the resonance of the circuit to provide control with a wide tolerance for the high Q circuit component values of the circuit.Type: GrantFiled: June 20, 2012Date of Patent: February 4, 2014Assignee: MKS Instruments, Inc.Inventors: Igor Elkin, Alan Millner, Ken Tran, Madhuwanti Joshi
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Publication number: 20130257311Abstract: A power system for a dielectric barrier discharge system, such as used for generating ozone, can include a full bridge inverter stage and parallel resonant tank outputting a signal for powering a dielectric barrier discharge cell stack. The inverter stage is controlled using a combination of pulse width modulation (PWM) and frequency modulation (FM) to enable soft switching through all load conditions—from full load to light load. A current control loop error amplifier compensator can provide a duty cycle adjustment signal to a phase shift PWM controller chip that generates the switching signals for the inverter stage. A feedback signal is also used to adjust a clock frequency time constant of the PWM controller chip to provide the FM. In one embodiment, the feedback signal is an output of an inverting amplifier connected at an output of the current control loop error amplifier compensator.Type: ApplicationFiled: March 27, 2012Publication date: October 3, 2013Applicant: MKS INSTRUMENTS, INC.Inventors: KEN TRAN, XING CHEN, RUSSELL L. NEWMAN, FRANKLIN LEE
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Publication number: 20130257301Abstract: Improvements in the supply of high-frequency electrical power to ozone-producing cells can be accomplished using the systems and techniques described herein. Application of a DC-DC converter operating at a switching frequency substantially greater than a load frequency, supports generation of a high-voltage AC for powering such cells, while allowing for reductions in component size and reductions in a quality factor of a load tuning circuit. Controllable power inverters used in obtaining one or more of the switching and load frequencies can be controlled using feedback techniques to provide stable, high-quality power to ozone-producing cells under variations in one or more of externally supplied power and load conditions. An inrush protection circuit can also be provided to selectively introduce a current-limiting resistance until an input DC bus has been sufficiently initialized as determined by measurements obtained from the DC bus.Type: ApplicationFiled: March 28, 2012Publication date: October 3, 2013Applicant: MKS INSTRUMENTS, INC.Inventors: Ken Tran, Feng Tian, Xing Chen, Franklin Lee
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Patent number: 8520413Abstract: A power converter includes first and second circuit modules, a first capacitor, a second diode and a control module. The first circuit module includes a switching element in parallel with a first diode. The second circuit module includes a first inductor and the first circuit module. The inductor is in series with the first circuit module. The first capacitor is in parallel with the second circuit module. The second diode includes a first terminal and a second terminal, where the first terminal is in series with the second circuit module and the first capacitor, and the second terminal is coupled to a second power terminal. The control module varies one or more of the first capacitor and the first inductor based on at least one of a current of a load circuit or an input voltage. A resonating waveform is generated by a resonant circuit of the second circuit and is used by the control module to turn off the switching element under zero-current and zero-voltage conditions.Type: GrantFiled: August 17, 2011Date of Patent: August 27, 2013Assignee: MKS Instruments, Inc.Inventors: Ken Tran, Feng Tian, Franklin Lee, Wangbo Zhang
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Publication number: 20130156648Abstract: A transformer-less power supply is provided for ozone generation. The power supply advantageously reduces costs and increases reliability of ozone generators. The power supply provides a first AC voltage from a power source to a resonant circuit and the resonant circuit provides a second AC voltage to the ozone generating unit, the second AC voltage being greater than the first AC voltage. A controller for the power supply that adapts to the resonance of the circuit to provide control with a wide tolerance for the high Q circuit component values of the circuit.Type: ApplicationFiled: June 20, 2012Publication date: June 20, 2013Applicant: MKS Instruments, Inc.Inventors: Igor Elkin, Alan Millner, Ken Tran, Madhuwanti Joshi
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Publication number: 20130043854Abstract: A power converter includes first and second circuit modules, a first capacitor, a second diode and a control module. The first circuit module includes a switching element in parallel with a first diode. The second circuit module includes a first inductor and the first circuit module. The inductor is in series with the first circuit module. The first capacitor is in parallel with the second circuit module. The second diode includes a first terminal and a second terminal, where the first terminal is in series with the second circuit module and the first capacitor, and the second terminal is coupled to a second power terminal. The control module varies one or more of the first capacitor and the first inductor based on at least one of a current of a load circuit or an input voltage. A resonating waveform is generated by a resonant circuit of the second circuit and is used by the control module to turn off the switching element under zero-current and zero-voltage conditions.Type: ApplicationFiled: August 17, 2011Publication date: February 21, 2013Applicant: MKS Instruments, Inc.Inventors: Ken Tran, Feng Tian, Franklin Lee, Wangbo Zhang
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Publication number: 20130022473Abstract: An axial rotor includes a plurality of blades extending from a hub that is rotatable about an axis of rotation. Each of the plurality of blades includes a blade body that extends over a span from a base to a tip. The plurality of blades defines an exit flow angle relative to a plane that is perpendicular to the axis of rotation. The exit flow angle decreases along the span from the base to the tip.Type: ApplicationFiled: July 22, 2011Publication date: January 24, 2013Inventor: Ken Tran