Patents by Inventor Kenechi Ooshiro

Kenechi Ooshiro has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • FILM-FORMING APPARATUS AND MANUFACTURING METHOD FOR SEMICONDUCTOR DEVICE
    Publication number: 20130074764
    Abstract: According to one embodiment, a film-forming apparatus includes a coating unit which introduces a liquid material to a substrate with a groove and fills the liquid material into the groove, thereby forming a liquid layer, a drying unit which solidifies the liquid layer by drying, and a vapor supply unit which applies a vapor to a surface of the liquid layer during the drying
    Type: Application
    Filed: September 6, 2012
    Publication date: March 28, 2013
    Inventors: Haruhiko Ishihara, Tsuyoshi Sato, Kenechi Ooshiro