Patents by Inventor Kenetsu Yokokawa

Kenetsu Yokokawa has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 5314839
    Abstract: To improve the characteristics of oxides and other insulators formed by conventional techniques, particularly to improve its density, relative dielectric constant, resistance to acid, resistance to reduction and other characteristics, and to provide solid state devices or socharacteristics, the surfaces of the silicon oxide insulator, or the like, is irradiated with electrically neutral particles.
    Type: Grant
    Filed: September 6, 1991
    Date of Patent: May 24, 1994
    Assignee: Hitachi, Ltd.
    Inventors: Tatsumi Mizutani, Takashi Yunogami, Kenetsu Yokokawa, Nobuyoshi Kobayashi