Patents by Inventor Kenetu Mizusawa

Kenetu Mizusawa has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for flow rate control of clustering fluid and device for flow rate control of clustering fluid employed in the method
    Patent number: 7926509
    Abstract: Disclosed is a method of controlling the flow rate of clustering fluid using a pressure type flow rate control device in which the flow rate Q of gas passing through an orifice is computed as K=KP1 (where K is a constant) with the gas being in a state where the ratio P2/P1 between the gas pressure P1 on the upstream side of the orifice and the gas pressure P2 on the downstream side of the orifice is held at a value not higher than the critical pressure ratio of the gas wherein the association of molecules is dissociated either by heating the pressure type flow rate control device to the temperature higher than 40° C., or by applying the diluting gas to the clustering fluid to make it lower than a partial pressure so the clustering fluid is permitted to pass through the orifice in a monomolecular state.
    Type: Grant
    Filed: July 18, 2005
    Date of Patent: April 19, 2011
    Assignees: Fujikin Incorporated, Tokyo Electron Ltd.
    Inventors: Tadahiro Ohmi, Kazuhiko Sugiyama, Kenetu Mizusawa, Eiji Takahashi, Tomio Uno, Kouji Nishino, Ryousuke Dohi, Nobukazu Ikeda, Masaaki Nagase
  • Method for flow rate control of clustering fluid and device for flow rate control of clustering fluid employed in the method
    Publication number: 20060076060
    Abstract: Disclosed is a method of controlling the flow rate of clustering fluid using a pressure type flow rate control device in which the flow rate Q of gas passing through an orifice is computed as K=KP1 (where K is a constant) with the gas being in a state where the ratio P2/P1 between the gas pressure P1 on the upstream side of the orifice and the gas pressure P2 on the downstream side of the orifice is held at a value not higher than the critical pressure ratio of the gas wherein the association of molecules is dissociated either by heating the pressure type flow rate control device to the temperature higher than 40° C., or by applying the diluting gas to the clustering fluid to make it lower than a partial pressure so the clustering fluid is permitted to pass through the orifice in a monomolecular state.
    Type: Application
    Filed: July 18, 2005
    Publication date: April 13, 2006
    Applicants: FUJIKIN INCORPORATED, Tadahiro OHMI, TOKYO ELECTRON LTD.
    Inventors: Tadahiro Ohmi, Kazuhiko Sugiyama, Kenetu Mizusawa, Eiji Takahashi, Tomio Uno, Kouji Nishino, Ryousuke Dohi, Nobukazu Ikeda, Masaaki Nagase