Patents by Inventor Keng Hock Chew

Keng Hock Chew has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of detaching a film of material from a substrate
    Patent number: 6752896
    Abstract: A method of detaching a film of material (2) from the surface (5) of a substrate (1). An outlet (11) of a fluid delivery device (10) is engaged with an aperture (7, 8) in the substrate (1) from the opposite side of the substrate (1) from the surface (5) to which the film (2) is attached. Fluid is passed out of the outlet (11) and through the aperture (7, 8) to generate a detaching force between the film of material (2) and the surface (5) adjacent to the aperture (7, 8).
    Type: Grant
    Filed: July 10, 2001
    Date of Patent: June 22, 2004
    Assignee: ASM Technology Singapore PTE LTD
    Inventors: See Yap Ong, Keng Hock Chew, Shu Chuen Ho, Teng Hock Kuah
  • Method of detaching a film of material from a substrate
    Publication number: 20030010430
    Abstract: A method of detaching a film of material (2) from the surface (5) of a substrate (1). An outlet (11) of a fluid delivery device (10) is engaged with an aperture (7, 8) in the substrate (1) from the opposite side of the substrate (1) from the surface (5) to which the film (2) is attached. Fluid is passed out of the outlet (11) and through the aperture (7, 8) to generate a detaching force between the film of material (2) and the surface (5) adjacent to the aperture (7, 8).
    Type: Application
    Filed: July 10, 2001
    Publication date: January 16, 2003
    Inventors: See Yap Ong, Keng Hock Chew, Shu Chuen Ho, Teng Hock Kuah