Abstract: The present disclosure describes a method for forming metallization layers that include a ruthenium metal liner and a cobalt metal fill. The method includes depositing a first dielectric on a substrate having a gate structure and source/drain (S/D) structures, forming an opening in the first dielectric to expose the S/D structures, and depositing a ruthenium metal on bottom and sidewall surfaces of the opening. The method further includes depositing a cobalt metal on the ruthenium metal to fill the opening, reflowing the cobalt metal, and planarizing the cobalt and ruthenium metals to form S/D conductive structures with a top surface coplanar with a top surface of the first dielectric.

Abstract: A radio frequency management device includes a microprocessor, output devices connected in parallel to the microprocessor, reading units respectively connected to the output devices, each reading unit comprising an antenna coil, a blocking coil, a radio frequency driver module for driving the antenna coil, and a blocking driver module for driving said blocking coil to shield the antenna coil from the radio frequency driver module, and a reading and writing device connected to the microprocessor. The microprocessor controls the output devices in such a manner that only one radio frequency driver module is activated to drive the associated antenna coil at any time while the other antenna coils of the other reading units are shielded from the associated radio frequency driver modules by the associated blocking coils; the reading units are processed one after another in a proper order.

Abstract: A radio frequency management device includes a microprocessor, output devices connected in parallel to the microprocessor, reading units respectively connected to the output devices, each reading unit comprising an antenna coil, a blocking coil, a radio frequency driver module for driving the antenna coil, and a blocking driver module for driving said blocking coil to shield the antenna coil from the radio frequency driver module, and a reading and writing device connected to the microprocessor. The microprocessor controls the output devices in such a manner that only one radio frequency driver module is activated to drive the associated antenna coil at any time while the other antenna coils of the other reading units are shielded from the associated radio frequency driver modules by the associated blocking coils; the reading units are processed one after another in a proper order.