Patents by Inventor Kengo Ajisawa

Kengo Ajisawa has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • MEMBER FOR PLASMA PROCESSING DEVICE
    Publication number: 20210292911
    Abstract: A member for a plasma processing device includes: an aluminum base material; and an oxide film formed on the aluminum base material and having a porous structure, the oxide film including a first oxide film formed on a surface of the aluminum base material, a second oxide film formed on the first oxide film, and a third oxide film formed on the second oxide film, wherein the first oxide film is harder than the second oxide film and the third oxide film, and a hole formed in each of the first oxide film, the second oxide film and the third oxide film is sealed.
    Type: Application
    Filed: July 17, 2019
    Publication date: September 23, 2021
    Applicants: NHK Spring Co., Ltd., IZUMI TECHNO INC.
    Inventors: Toshihiko Hanamachi, Shuhei Morota, Go Takahara, Masaru Takimoto, Hibiki Yokoyama, Hiroshi Mitsuda, Yoshihito Araki, Kengo Ajisawa