Patents by Inventor Kengo MAEHATA

Kengo MAEHATA has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10607874
    Abstract: According to one embodiment, an electrostatic chuck includes a ceramic dielectric substrate, a base plate, and a heater plate. The ceramic dielectric substrate has a surface where a processing object is placed. The base plate supports the ceramic dielectric substrate. The heater plate is provided between the ceramic dielectric substrate and the base plate. The heater plate includes a first support plate including a metal, a second support plate including a metal, a heater element, a first resin layer, and a second resin layer. The heater element is provided between the first support plate and the second support plate. The heater element emits heat due to a current flowing. The first resin layer is provided between the first support plate and the heater element. The second resin layer is provided between the second support plate and the heater element.
    Type: Grant
    Filed: July 12, 2017
    Date of Patent: March 31, 2020
    Assignee: Toto Ltd.
    Inventors: Kengo Maehata, Shumpei Kondo, Hitoshi Sasaki, Kosuke Yamaguchi, Yuichi Yoshii
  • Patent number: 10373854
    Abstract: According to one embodiment, an electrostatic chuck includes a ceramic dielectric substrate, an electrode layer, a base plate, and a heater plate. The ceramic dielectric substrate has a first major surface where a processing object is placed. The electrode layer is provided in the ceramic dielectric substrate. The base plate supports the ceramic dielectric substrate. The heater plate is provided between the base plate and the first major surface. The heater plate includes a first heater element and a second heater element. The first heater element emits heat due to a current flowing. The second heater element emits heat due to a current flowing. When viewed along a direction perpendicular to the first major surface, bends of the first heater element is more than bends of the second heater element, and the first heater element includes a portion positioned at a gap of the second heater element.
    Type: Grant
    Filed: March 27, 2018
    Date of Patent: August 6, 2019
    Assignee: Toto Ltd.
    Inventors: Jumpei Uefuji, Hitoshi Sasaki, Kosuke Yamaguchi, Kengo Maehata, Yuichi Yoshii, Tetsuro Itoyama
  • Publication number: 20190148206
    Abstract: According to an aspect of the invention, an electrostatic chuck includes: a ceramic dielectric substrate having a first major surface, and a second major surface on a side opposite to the first major surface; a base plate supporting the ceramic dielectric substrate and being provided at a position separated from the ceramic dielectric substrate; and a heater plate provided between the ceramic dielectric substrate and the base plate, the heater plate including a first support plate including a metal, a heater element emitting heat due to a current flowing, and a first resin layer provided between the first support plate and the heater element, the heater element having a first surface and a second surface, the first surface opposing the first resin layer, the second surface facing a side opposite to the first surface, a width of the first surface being different from a width of the second surface.
    Type: Application
    Filed: January 16, 2019
    Publication date: May 16, 2019
    Inventors: Kosuke YAMAGUCHI, Hitoshi SASAKI, Kengo MAEHATA, Shumpei KONDO, Yuichi YOSHII
  • Publication number: 20190148204
    Abstract: According to an aspect of the invention, an electrostatic chuck comprises: a ceramic dielectric substrate; a base plate; and a heater plate. The heater plate includes a first and a second support plates including a metal, a heater element provided between the first and the second support plates, a first resin layer provided between the first support plate and the heater element, and a second resin layer provided between the second support plate and the heater element. A surface of the first support plate on the second support plate side includes a first region and a second region, the first region overlapping the heater element when viewed along the stacking direction, the second region not overlapping the heater element when viewed along the stacking direction. In a cross section parallel to the stacking direction, the second region protrudes toward the second support plate side compared to the first region.
    Type: Application
    Filed: January 9, 2019
    Publication date: May 16, 2019
    Inventors: Kosuke YAMAGUCHI, Hitoshi SASAKI, Kengo MAEHATA, Shumpei KONDO, Yuichi YOSHII
  • Publication number: 20190019715
    Abstract: An electrostatic chuck includes a ceramic dielectric substrate, a base plate, and a heater plate. The heater plate is provided between the ceramic dielectric substrate and the base plate. The heater plate includes first and second support plates, first and second resin layers, and a heater element. Each of the first and second resin layers is provided between the first support plate and the second support plate. The heater element includes first and second electrically conductive portions. The first electrically conductive portion is provided between the first resin layer and the second resin layer. The second electrically conductive portion is separated from the first electrically conductive portion in an in-plane direction. The first resin layer contacts the second resin layer between the first electrically conductive portion and the second electrically conductive portion.
    Type: Application
    Filed: September 14, 2018
    Publication date: January 17, 2019
    Inventors: Jumpei UEFUJI, Hitoshi SASAKI, Kosuke YAMAGUCHI, Kengo MAEHATA, Yuichi YOSHII
  • Publication number: 20190013231
    Abstract: According to one embodiment, an electrostatic chuck includes a ceramic dielectric substrate having a first major surface placing an object to be processed and a second major surface on an opposite side of the first major surface, and a base plate provided on a side of the second major surface and supporting the ceramic dielectric substrate. The base plate includes a first communicating passage passing a medium which adjusts a temperature of the object to be processed. The first communicating passage has an upper surface, a side surface, and a lower surface. A ratio of variation of a maximum height Sz in the upper surface to a height of the first communicating passage is not more than 1%.
    Type: Application
    Filed: September 14, 2018
    Publication date: January 10, 2019
    Inventors: Kosuke YAMAGUCHI, Yuichi YOSHII, Hitoshi SASAKI, Kengo MAEHATA
  • Publication number: 20180286732
    Abstract: According to one embodiment, an electrostatic chuck includes a ceramic dielectric substrate, an electrode layer, a base plate, and a heater plate. The ceramic dielectric substrate has a first major surface where a processing object is placed. The electrode layer is provided in the ceramic dielectric substrate. The base plate supports the ceramic dielectric substrate. The heater plate is provided between the base plate and the first major surface. The heater plate includes a first heater element and a second heater element. The first heater element emits heat due to a current flowing. The second heater element emits heat due to a current flowing. When viewed along a direction perpendicular to the first major surface, bends of the first heater element is more than bends of the second heater element, and the first heater element includes a portion positioned at a gap of the second heater element.
    Type: Application
    Filed: March 27, 2018
    Publication date: October 4, 2018
    Inventors: Jumpei UEFUJI, Hitoshi SASAKI, Kosuke YAMAGUCHI, Kengo MAEHATA, Yuichi YOSHII, Tetsuro ITOYAMA
  • Publication number: 20170309510
    Abstract: According to one embodiment, an electrostatic chuck includes a ceramic dielectric substrate, a base plate, and a heater plate. The ceramic dielectric substrate has a surface where a processing object is placed. The base plate supports the ceramic dielectric substrate. The heater plate is provided between the ceramic dielectric substrate and the base plate. The heater plate includes a first support plate including a metal, a second support plate including a metal, a heater element, a first resin layer, and a second resin layer. The heater element is provided between the first support plate and the second support plate. The heater element emits heat due to a current flowing. The first resin layer is provided between the first support plate and the heater element. The second resin layer is provided between the second support plate and the heater element.
    Type: Application
    Filed: July 12, 2017
    Publication date: October 26, 2017
    Inventors: Kengo MAEHATA, Shumpei KONDO, Hitoshi SASAKI, Kosuke YAMAGUCHI, Yuichi YOSHII