Patents by Inventor Kengo Saegusa
Kengo Saegusa has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 11898565Abstract: A vacuum pump which can prevent lowering of an exhaust performance of the vacuum pump, even if a linked-type thread groove spacer is fastened by a fixing bolt, is provided. The linked-type thread groove spacer according to an embodiment of the present invention includes a structure for linking a Siegbahn pump portion and a thread-groove pump portion. When this linked-type thread groove spacer is to be fastened, a countersunk hole is provided in advance in an exhaust channel portion, and the linked-type thread groove spacer is fastened to a base by a fixing bolt. As a result, a head part of the fixing bolt does not protrude to the exhaust channel, and the head part of the fixing bolt does not make resistance against an exhaust gas. Thus, lowering of the exhaust performance of the vacuum pump can be suppressed.Type: GrantFiled: May 22, 2020Date of Patent: February 13, 2024Assignee: Edwards Japan LimitedInventors: Kengo Saegusa, Nahoko Yoshihara, Yoshinobu Ohtachi
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Patent number: 11821440Abstract: To provide a vacuum pump capable of efficiently cooling electrical equipment. The vacuum pump comprises a pump main body, and an electrical equipment case disposed outside the pump main body, wherein the electrical equipment case includes a cooling jacket in which a cooling medium flow passage is formed, and a power supply circuit portion that has a circuit component and can be cooled by the cooling jacket, the power supply circuit portion being attached to the cooling jacket so that heat from the electrical component portion can be transferred, and the cooling jacket includes a jacket main body and a cooling pipe for circulating cooling water in the jacket main body, and partially exposes the cooling pipe toward the power supply circuit portion.Type: GrantFiled: February 8, 2019Date of Patent: November 21, 2023Assignee: Edwards Japan LimitedInventors: Yanbin Sun, Kengo Saegusa
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Publication number: 20230250826Abstract: A vacuum pump and a vacuum pump rotor blade that can effectively limit deposition of reaction products are provided. The vacuum pump includes a rotating shaft held rotationally, a drive mechanism for the rotating shaft, a first rotor blade made of a first material, a second rotor blade made of a second material having higher heat resistance than the first material, and disposed further toward a downstream side than the first rotor blade, and a casing enclosing the rotating shaft, the first rotor blade, and the second rotor blade. The second rotor blade is disposed, via a heat insulating portion, on the first rotor blade.Type: ApplicationFiled: July 30, 2021Publication date: August 10, 2023Inventors: Takashi Kabasawa, Kengo Saegusa
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Patent number: 11408429Abstract: Provided is a vacuum pump apparatus which allows reductions in thickness, weight, size, and cost of a vacuum pump control device. In the vacuum pump apparatus, a pump main body unit and a control unit which controls driving of the pump main body unit are integrated with each other. The vacuum pump apparatus has a configuration in which a spacer configured to support a load applied to a housing of the control unit is provided between a base of the pump main body unit and the housing of the control unit.Type: GrantFiled: January 12, 2018Date of Patent: August 9, 2022Assignee: Edwards Japan LimitedInventors: Yoshiyuki Sakaguchi, Yanbin Sun, Kengo Saegusa, Hideki Omori
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Publication number: 20220228594Abstract: A vacuum pump which can prevent lowering of an exhaust performance of the vacuum pump, even if a linked-type thread groove spacer is fastened by a fixing bolt, is provided. The linked-type thread groove spacer according to an embodiment of the present invention includes a structure for linking a Siegbahn pump portion and a thread-groove pump portion. When this linked-type thread groove spacer is to be fastened, a countersunk hole is provided in advance in an exhaust channel portion, and the linked-type thread groove spacer is fastened to a base by a fixing bolt. As a result, a head part of the fixing bolt does not protrude to the exhaust channel, and the head part of the fixing bolt does not make resistance against an exhaust gas. Thus, lowering of the exhaust performance of the vacuum pump can be suppressed.Type: ApplicationFiled: May 22, 2020Publication date: July 21, 2022Inventors: Kengo Saegusa, Nahoko Yoshihara, Yoshinobu Ohtachi
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Publication number: 20220170470Abstract: A vacuum pump in which a pump main body and a control apparatus that controls the pump main body are integrated with each other. The control apparatus includes a cylindrical portion which protrudes from a chassis of the control apparatus and inside which a cable that connects the pump main body and the control apparatus to each other is passed. A height of the cylindrical portion exceeds a height of a gap formed between a bottom portion of the pump main body and the chassis of the control apparatus.Type: ApplicationFiled: March 13, 2020Publication date: June 2, 2022Inventor: Kengo Saegusa
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Patent number: 11333153Abstract: A vacuum pump includes a regenerative resistor removed from the control apparatus and disposed in the vacuum pump. More specifically, the regenerative resistor is detached from a control board (control apparatus) on which a control circuit is mounted, and disposed in a base of the vacuum pump, and connected to the control board via a wire. Further, a gap is provided between the base of the vacuum pump and the control apparatus. Moreover, a cover (outer covering body) is provided in the regenerative resistor disposed in the base part of the vacuum pump and the wire part. Since the regenerative resistor is provided in the base of the vacuum pump, which has a large heat capacity, a temperature increase of the control apparatus is reduced.Type: GrantFiled: December 8, 2017Date of Patent: May 17, 2022Assignee: Edwards Japan LimitedInventors: Hideki Omori, Yanbin Sun, Kengo Saegusa, Yoshiyuki Sakaguchi
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Patent number: 11215187Abstract: A vacuum pump, and a waterproof structure and a control apparatus applied to the vacuum pump which improve efficiency of on-site maintenance work and prevent water from penetrating into a connector connecting portion when a cover is removed during circuit separation or the like. When performing maintenance work, after a chassis of a control apparatus is lowered by around several tens of millimeters, the chassis of the control apparatus is pulled out in a radial direction of a pump. Accordingly, a pump main body and the control apparatus can be readily attached and detached even when sufficient empty space is not available in an axial direction of the vacuum pump. A wall portion is circumferentially protrusively provided in side portions of the base portion and the control apparatus. Furthermore, a sealing member and a lid are inserted into a gap. Therefore, water droplets cannot easily penetrate into the gap.Type: GrantFiled: September 29, 2017Date of Patent: January 4, 2022Assignee: Edwards Japan LimitedInventors: Kengo Saegusa, Yanbin Sun
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Patent number: 11081845Abstract: A vacuum pump has a hermetic connector disposed on a base of a body of the vacuum pump. The hermetic connector has a plurality of pins connected to a plurality of electrical cables leading to the inside of the pump body. The connector is longer in a lateral direction than in an axial direction so that the connector is horizontally long in a circumferential direction of the pump body.Type: GrantFiled: December 8, 2017Date of Patent: August 3, 2021Assignee: Edwards Japan LimitedInventors: Yanbin Sun, Kengo Saegusa, Yoshiyuki Sakaguchi, Hideki Omori
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Publication number: 20210025407Abstract: To provide a vacuum pump capable of efficiently cooling electrical equipment. The vacuum pump comprises a pump main body, and an electrical equipment case disposed outside the pump main body, wherein the electrical equipment case includes a cooling jacket in which a cooling medium flow passage is formed, and a power supply circuit portion that has a circuit component and can be cooled by the cooling jacket, the power supply circuit portion being attached to the cooling jacket so that heat from the electrical component portion can be transferred, and the cooling jacket includes a jacket main body and a cooling pipe for circulating cooling water in the jacket main body, and partially exposes the cooling pipe toward the power supply circuit portion.Type: ApplicationFiled: February 8, 2019Publication date: January 28, 2021Inventors: Yanbin Sun, Kengo Saegusa
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Patent number: 10823200Abstract: A thread groove pump portion, which is an exhaust element, is structured such that a Siegbahn structure is attached onto a cylindrical thread, and such that respective parts are connected to each other at this attachment section. A flow channel of the Siegbahn portion and a flow channel of the cylindrical thread (the thread groove pump portion) are connected to each other so as to substantially form a right angle when viewed from an axis direction of the vacuum pump, thus, the flow channel of the Siegbahn portion and the flow channel of the thread groove pump portion are connected to each other. the length of a compression flow channel of the thread groove pump portion can be increased in a radial direction due to the connected Siegbahn portion.Type: GrantFiled: December 8, 2016Date of Patent: November 3, 2020Assignee: Edwards Japan LimitedInventors: Yoshiyuki Sakaguchi, Tooru Miwata, Kengo Saegusa, Nahoko Yoshihara
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Publication number: 20200124043Abstract: Provided is a vacuum pump apparatus which allows reductions in thickness, weight, size, and cost of a vacuum pump control device. In the vacuum pump apparatus, a pump main body unit and a control unit which controls driving of the pump main body unit are integrated with each other. The vacuum pump apparatus has a configuration in which a spacer configured to support a load applied to a housing of the control unit is provided between a base of the pump main body unit and the housing of the control unit.Type: ApplicationFiled: January 12, 2018Publication date: April 23, 2020Inventors: Yoshiyuki Sakaguchi, Yanbin Sun, Kengo Saegusa, Hideki Omori
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Publication number: 20200099179Abstract: A vacuum pump has a hermetic connector disposed on a base of a body of the vacuum pump. The hermetic connector has a plurality of pins connected to a plurality of electrical cables leading to the inside of the pump body. The connector is longer in a lateral direction than in an axial direction so that the connector is horizontally long in a circumferential direction of the pump body.Type: ApplicationFiled: December 8, 2017Publication date: March 26, 2020Inventors: Yanbin Sun, Kengo Saegusa, Yoshiyuki Sakaguchi, Hideki Omori
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Publication number: 20190309760Abstract: To realize a vacuum pump capable of improving the heat dissipation capability of a regenerative resistor with a simple configuration, and a control apparatus associated with the vacuum pump. The regenerative resistor is removed from the control apparatus and disposed in the vacuum pump. More specifically, the regenerative resistor is detached from a control board (control apparatus) on which a control circuit is mounted, and then disposed in a base of the vacuum pump via a wire. Further, a gap is provided between the base of the vacuum pump and the control apparatus. Moreover, a cover (outer covering body) is provided in the regenerative resistor disposed in the base part of the vacuum pump and the wire part. Since the regenerative resistor is provided in the base of the vacuum pump having a large heat capacity, a temperature increase of the control apparatus is reduced.Type: ApplicationFiled: December 8, 2017Publication date: October 10, 2019Inventors: Hideki Omori, Yanbin Sun, Kengo Saegusa, Yoshiyuki Sakaguchi
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Publication number: 20190242387Abstract: A vacuum pump, and a waterproof structure and a control apparatus applied to the vacuum pump which improve efficiency of on-site maintenance work and prevent water from penetrating into a connector connecting portion when a cover is removed during circuit separation or the like. When performing maintenance work, after a chassis of a control apparatus is lowered by around several tens of millimeters, the chassis of the control apparatus is pulled out in a radial direction of a pump. Accordingly, a pump main body and the control apparatus can be readily attached and detached even when sufficient empty space is not available in an axial direction of the vacuum pump. A wall portion is circumferentially protrusively provided in side portions of the base portion and the control apparatus. Furthermore, a sealing member and a lid are inserted into a gap. Therefore, water droplets cannot easily penetrate into the gap.Type: ApplicationFiled: September 29, 2017Publication date: August 8, 2019Applicant: Edwards Japan LimitedInventors: Kengo Saegusa, Yanbin Sun
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Publication number: 20190032669Abstract: The present invention provides a vacuum pump that prevents invasion of foreign matter, such as rust and particles caused by a process gas, during the process of manufacturing a semiconductor wafer, and a flexible cover and a rotor that are used in the vacuum pump. A vacuum pump has a casing that has a gas inlet port and a gas outlet port, a rotor that has a recessed portion opened toward the gas inlet port and is fastened to a rotor shaft by a bolt disposed in the recessed portion. The recessed portion is provided with a flexible cover that has an outer peripheral portion supported on an end surface of the rotor that opposes the gas inlet port, and a central portion caved in the recessed portion of the rotor, the flexible cover covering the recessed portion by elastically deforming into a convex shape toward the recessed portion.Type: ApplicationFiled: February 12, 2016Publication date: January 31, 2019Inventors: Shinji Kawanishi, Yoshiyuki Sakaguchi, Kengo Saegusa
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Publication number: 20180355888Abstract: A thread groove pump portion, which is an exhaust element, is structured such that a Siegbahn structure is attached onto a cylindrical thread, and such that respective parts are connected to each other at this attachment section. A flow channel of the Siegbahn portion and a flow channel of the cylindrical thread (the thread groove pump portion) are connected to each other so as to substantially form a right angle when viewed from an axis direction of the vacuum pump, thus, the flow channel of the Siegbahn portion and the flow channel of the thread groove pump portion are connected to each other. the length of a compression flow channel of the thread groove pump portion can be increased in a radial direction due to the connected Siegbahn portion.Type: ApplicationFiled: December 8, 2016Publication date: December 13, 2018Inventors: Yoshiyuki Sakaguchi, Tooru Miwata, Kengo Saegusa, Nahoko Yoshihara