Abstract: The present invention has an object to provide a lightning current detection sensor that has a configuration resistant to high voltage and high current in a lightning strike and has high sensitivity and high resolution. In a lightning current detection sensor 10, an insulation-coated wire 22 wound in multiple turns is collectively covered with a base tape 21 and a cover tape 23. Thus, even when the insulation-coated wire 22 is wound in multiple turns to increase sensitivity, a minute area can be detected to increase resolution. Also, with the base tape 21 and the cover tape 23 covering the insulation-coated wire 22 and also a shield portion 12 made of an insulating material and a gap 40 formed between the shield portion 12 and the coil portion 20, a sufficient shielding property is ensured and detection with high accuracy can be performed against high current and high voltage without capacitative coupling.

Abstract: The present invention has an object to provide a lightning current detection sensor that has a configuration resistant to high voltage and high current in a lightning strike and has high sensitivity and high resolution. In a lightning current detection sensor 10, an insulation-coated wire 22 wound in multiple turns is collectively covered with a base tape 21 and a cover tape 23. Thus, even when the insulation-coated wire 22 is wound in multiple turns to increase sensitivity, a minute area can be detected to increase resolution. Also, with the base tape 21 and the cover tape 23 covering the insulation-coated wire 22 and also a shield portion 12 made of an insulating material and a gap 40 formed between the shield portion 12 and the coil portion 20, a sufficient shielding property is ensured and detection with high accuracy can be performed against high current and high voltage without capacitative coupling.

Abstract: A plurality of electrode bars are arranged in parallel with each other, and side electrode bars are connected to the corresponding opposite ends of the electrode bars, thereby forming a ladder-like RF discharge electrode. Power supply points are arranged axisymmetrically with respect to a reference line, which is a bisector which bisects one side of the RF discharge electrode, while being spaced a predetermined distance from the reference line, thereby suppressing voltage distribution on the ladder electrode, which has an effect on uniformity of discharge distribution, to a sufficiently low level of nonuniformity. Thus, uniform distribution of film deposition rate can be obtained, thereby enabling uniform deposition even in large-area applications.