Abstract: An electrostatic chuck includes a ceramic substrate, a base plate, and an embedded member. The ceramic substrate includes a first surface on which a to-be-treated object is placed, a second surface opposite to the first surface, and a first channel penetrating through the first surface and the second surface. The base plate is bonded to the second surface of the ceramic substrate and includes a through hole at least at a position corresponding to the first channel. The embedded member is located in the through hole and includes a porous body facing the first channel and a second channel communicating with the first channel via the porous body. The first channel and the second channel are located apart from each other in a plane perspective view.

Abstract: A sample holder includes: a ceramic body including a one main surface, and a sample holding surface on the one main surface; a heat-generating resistor disposed on an other main surface of the ceramic body; and a plurality of grooves arranged in a lattice on a surface of the heat-generating resistor, the plurality of grooves having extending directions that are different on different portions of the surface of the heat-generating resistor.

Abstract: A sample holder includes: a ceramic body having a circular plate shape, the ceramic body comprising an upper surface serving as a sample holding face for holding a sample; and a suction electrode disposed within the ceramic body. The upper surface of the ceramic body includes a first circumferential wall portion having an annular shape, the first circumferential wall portion being constituted so as to protrude along an outer periphery of the ceramic body, and a plurality of projections formed in a region of the upper surface inside the first circumferential wall portion. Corners lying between an upper surface and side surfaces of the first circumferential wall portion are radiused. When viewed as a cross section of the ceramic body, a radius of curvature of an outside corner is smaller than a radius of curvature of an inside corner of the radiused corners of the first circumferential wall portion.

Abstract: A sample holder includes: a ceramic body including a one main surface, and a sample holding surface on the one main surface; a heat-generating resistor disposed on an other main surface of the ceramic body; and a plurality of grooves arranged in a lattice on a surface of the heat-generating resistor, the plurality of grooves having extending directions that are different on different portions of the surface of the heat-generating resistor.

Abstract: A sample holder includes: a ceramic body having a circular plate shape, the ceramic body comprising an upper surface serving as a sample holding face for holding a sample; and a suction electrode disposed within the ceramic body. The upper surface of the ceramic body includes a first circumferential wall portion having an annular shape, the first circumferential wall portion being constituted so as to protrude along an outer periphery of the ceramic body, and a plurality of projections formed in a region of the upper surface inside the first circumferential wall portion. Corners lying between an upper surface and side surfaces of the first circumferential wall portion are radiused. When viewed as a cross section of the ceramic body, a radius of curvature of an outside corner is smaller than a radius of curvature of an inside corner of the radiused corners of the first circumferential wall portion.

Abstract: A thermoelectric module according to the present invention includes a first support substrate including a principal surface that includes a first region and a second region that is adjacent to the first region; a second support substrate including a principal surface that faces the first region; a plurality of thermoelectric elements arranged between the first region and the principal surface of the second support substrate; and a temperature detection element mounted in the second region. The temperature detection element and the second support substrate are thermally connected to each other by a thermally conductive member.

Abstract: A thermoelectric module according to the present invention includes a first support substrate including a principal surface that includes a first region and a second region that is adjacent to the first region; a second support substrate including a principal surface that faces the first region; a plurality of thermoelectric elements arranged between the first region and the principal surface of the second support substrate; and a temperature detection element mounted in the second region. The temperature detection element and the second support substrate are thermally connected to each other by a thermally conductive member.

Abstract: A thermoelectric module includes a pair of support substrates; a wiring conductor disposed on each of one main faces opposing each other of the pair of support substrates; and thermoelectric elements electrically connected to the wiring conductor. A sealing member is disposed on a periphery of the region between the one main faces opposing each other of the pair of support substrates. The sealing member has a plurality of voids in an interior thereof.