Abstract: A relative displacement specification unit specifies a relative displacement between a jig and a tool. A position determination unit determines whether the jig and the tool are respectively positioned at a jig calibration point and a tool calibration point. A displacement correction unit corrects the measurement values of the displacements of the jig and the tool. A contact determination unit determines whether the tool has come into contact with a workpiece based on a measurement value related to a deflection of the tool. A tool length correction unit corrects tool length data based on the relative displacement when the tool is determined to have come into contact with the workpiece. A control unit generates a control command for controlling the jig or tool based on the relative displacement, a shape of the workpiece, and tool length data indicating a length of the tool.

Abstract: A processing machine includes a tool configured to perform machine processing on a workpiece, and a depth camera configured to be installed such that the workpiece lies within an imaging range and to capture a depth of a subject. A position measurement unit calculates a three-dimensional position of a surface of the workpiece based on a depth image captured by the depth camera. A position matching unit, based on three-dimensional data representing a target shape of the workpiece and a three-dimensional position of the workpiece, calculates a three-dimensional position of the target shape in a case in which the workpiece and the target shape are superimposed.

Abstract: A relative displacement-specifying unit specifies relative displacement between a jig and tool based on measurement values of displacements of the tool and jig. A position determination unit determines whether the jig and the tool are positioned at jig and tool calibration points based on the measurement values. A displacement correction unit corrects the measurement values based on captured images of the jig and tool calibration points when it is determined that the jig and the tool are positioned at the calibration points. A contact determination unit determines whether the tool contacts the workpiece based on a measurement value related to main shaft flexure. A tool data correction unit corrects tool data based on the relative displacement when it is determined that the tool contacts the workpiece. A control unit generates a control command to control the jig or the tool based on the relative displacement, workpiece shape, and tool data.

Abstract: A relative displacement specification unit specifies a relative displacement between a jig and a tool.A position determination unit determines whether the jig and the tool are respectively positioned at a jig calibration point and a tool calibration point. A displacement correction unit corrects the measurement values of the displacements of the jig and the tool. A contact determination unit determines whether the tool has come into contact with a workpiece based on a measurement value related to a deflection of the tool. A tool length correction unit corrects tool length data based on the relative displacement when the tool is determined to have come into contact with the workpiece. A control unit generates a control command for controlling the jig or tool based on the relative displacement, a shape of the workpiece, and tool length data indicating a length of the tool.

Abstract: A machine tool includes a tool that machines a workpiece while being contact with the workpiece, a state-quantity-data acquisition unit that acquires state quantity data of the workpiece and of the tool, a state-quantity-estimation-data calculation unit that calculates state quantity estimation data from a simulation model including a device dynamic characteristic model indicating a dynamic characteristic of the tool and a workpiece model indicating a target shape of the workpiece, and a machining-state calculation unit that calculates machining state data indicating a machining state of the workpiece based on the state quantity data and the state quantity estimation data.

Abstract: A machine tool includes a tool that machines a workpiece while being contact with the workpiece, a state-quantity-data acquisition unit that acquires state quantity data of the workpiece and of the tool, a state-quantity-estimation-data calculation unit that calculates state quantity estimation data from a simulation model including a device dynamic characteristic model indicating a dynamic characteristic of the tool and a workpiece model indicating a target shape of the workpiece, and a machining-state calculation unit that calculates machining state data indicating a machining state of the workpiece based on the state quantity data and the state quantity estimation data.

Abstract: A stage for a substrate temperature control apparatus having high reliability at low cost by preventing thermal deformation of a plate while employing a material other than ceramics as a material of the plate. The stage is used for mounting a substrate in the substrate temperature control apparatus for controlling a temperature of the substrate, and the stage includes: a plate having a first surface facing the substrate and a second surface opposite to the first surface; and a planar heater bonded to the second surface of the plate, wherein surface treatment is performed in a first thickness on the first surface of the plate, and the surface treatment is performed in a second thickness thinner than the first thickness or no surface treatment is performed on a predetermined area of the second surface of the plate.

Abstract: A temperature sensor (10) includes: a temperature-sensing portion for measuring a temperature of an object (50) by contacting the object; and a supporting portion for supporting the temperature-sensing portion from a side opposite to a contact surface, the supporting portion having a space at a portion partially corresponding to the temperature-sensing portion. A temperature controller includes: a temperature control device; the temperature sensor (10) for measuring the temperature by contacting the object (50); and a controller for controlling the temperature control device. The controller includes: a mounting-state judging means for judging a mounting-state of the object (50); a switching means for switching a control gain and a target temperature of the temperature control device based on the judging result; and a control-command generating means for generating a control command based on the control gain, the target temperature and a measurement value of the temperature sensor (10).

Abstract: A device controls an object in a time variant system with a dead time such as a Czochralski method single crystal production device (CZ equipment). The dead time, time constant, and process gain value of an object (CZ equipment) are set. The process gain preset value has time variant characteristics. An output value and its first-order and second-order time differentiated values serve as the state variable. A nonlinear state predicting unit predicts a state variable value at a future time, based upon the current output value, dead time, time constant, and process gain preset value. A gain scheduled sliding mode control unit performs a gain scheduled sliding mode control operation based upon the state variable value at the future time, an output deviation at the future time, the time constant, and the set value of the process gain at the future time, to determine the manipulated variable of the object.

Abstract: A stage for substrate temperature control apparatus in which an extent of a transient temperature distribution that occurs when a substrate is heated or cooled can be reduced in comparison with the conventional one. The stage for substrate temperature control apparatus is a stage to be used for mounting a substrate having a predetermined diameter in a predetermined position in a substrate temperature control apparatus for controlling a temperature of the substrate, and includes: a plate formed with a step part, which is lower than a center part, on a first surface facing the substrate in a region including a position corresponding to an edge of the substrate; and a temperature control unit provided on a second surface opposite to the first surface of the plate.

Abstract: A stage for a substrate temperature control apparatus having high responsibility at low cost by preventing thermal deformation of a plate while employing a material other than ceramics as a material of the plate. The stage for a substrate temperature control apparatus is a stage to be used for mounting a substrate in the substrate temperature control apparatus for controlling a temperature of the substrate, and the stage includes: a plate having a first surface facing the substrate and a second surface opposite to the first surface; and a planar heater bonded to the second surface of the plate, wherein surface treatment is performed in a first thickness on the first surface of the plate, and the surface treatment is performed in a second thickness thinner than the first thickness or no surface treatment is performed on a predetermined area of the second surface of the plate.

Abstract: To accurately control controlled object in a time variant system with a dead time such as a Czochralski method single crystal production device (CZ equipment). The dead time, the time constant, and the process gain value of a controlled object (CZ equipment) (200) are set. The process gain preset value has specified time variant characteristics. An output value y and its first-order and second-order time differentiated values are used as the state variable x of the controlled object (200). A nonlinear state predicting unit (206) predicts a state variable value x(t+Ld) at a future point in time after the dead time, based upon the current output value y, the dead time, the time constant, and the process gain preset value.

Abstract: A temperature sensor (10) includes: a temperature-sensing portion for measuring a temperature of an object (50) by contacting the object; and a supporting portion for supporting the temperature-sensing portion from a side opposite to a contact surface, the supporting portion having a space at a portion partially corresponding to the temperature-sensing portion. A temperature controller includes: a temperature control device; the temperature sensor (10) for measuring the temperature by contacting the object (50); and a controller for controlling the temperature control device. The controller includes: a mounting-state judging means for judging a mounting-state of the object (50); a switching means for switching a control gain and a target temperature of the temperature control device based on the judging result; and a control-command generating means for generating a control command based on the control gain, the target temperature and a measurement value of the temperature sensor (10).

Abstract: Object of the present invention is to provide uniform heat distribution to a substrate undergoing heat treatment on top of a heat exchange plate. A heat exchange plate 1 is a flat, circular receptacle, has a cooling liquid inflow opening 11 on one end and outflow opening 13 on the other end, and cooling liquid flows on the inside. The surface of the plate 1 is divided, for example, into four zones having different heat capacities and heat transfer characteristics, and an independently controllable foil heater 21A, 23A, 25A, 27A is attached to each zone. Heater 21A covers a zone, which circumferentially surrounds a substrate placed on top of a plate, heater 23A covers a zone directly beneath a substrate, heater 25A covers a zone of the vicinity of the outflow opening 13, and heater 27A covers a zone of the vicinity of the inflow opening 11. Temperature sensors 31-33 are disposed on the inside of a plate at four locations of a second zone, which are apt to receive the affects of the first to fourth zones.