Abstract: A substrate processing apparatus includes a device management controller including a parts management control part configured to monitor the state of parts constituting the apparatus, a device state monitoring control part configured to monitor integrity of device data obtained from an operation state of the parts constituting the apparatus, and a data matching control part configured to monitor facility data provided from a factory facility to the apparatus. The device management controller is configured to derive information evaluating the operation state of the apparatus based on a plurality of monitoring result data selected from a group consisting of maintenance timing monitoring result data acquired by the parts management control part, device state monitoring result data acquired by the device state monitoring control part, and utility monitoring result data acquired by the data matching control part.

Abstract: A compressed powder body comprises metal particles and an interposed substance which is interposed between the metal particles. Each of the metal particles is made of FeSiAl-based soft magnetic alloy and has a flat shape when seen along a predetermined direction. The metal particles include one or more of the metal particles each of which is formed with one or more predetermined holes. Each of the predetermined holes passes through the metal particle in the predetermined direction. Each of the predetermined holes has a maximum width in a predetermined plane perpendicular to the predetermined direction the maximum width being equal to or larger than a thickness of the metal particle with the predetermined hole in the predetermined direction.

Abstract: A substrate processing apparatus includes a device management controller including a parts management control part configured to monitor the state of parts constituting the apparatus, a device state monitoring control part configured to monitor integrity of device data obtained from an operation state of the parts constituting the apparatus, and a data matching control part configured to monitor facility data provided from a factory facility to the apparatus. The device management controller is configured to derive information evaluating the operation state of the apparatus based on a plurality of monitoring result data selected from a group consisting of maintenance timing monitoring result data acquired by the parts management control part, device state monitoring result data acquired by the device state monitoring control part, and utility monitoring result data acquired by the data matching control part.

Abstract: A substrate processing apparatus includes a device management controller including a parts management control part configured to monitor the state of parts constituting the apparatus, a device state monitoring control part configured to monitor integrity of device data obtained from an operation state of the parts constituting the apparatus, and a data matching control part configured to monitor facility data provided from a factory facility to the apparatus. The device management controller is configured to derive information evaluating the operation state of the apparatus based on a plurality of monitoring result data selected from a group consisting of maintenance timing monitoring result data acquired by the parts management control part, device state monitoring result data acquired by the device state monitoring control part, and utility monitoring result data acquired by the data matching control part.

Abstract: A substrate processing apparatus includes a device management controller including a parts management control part configured to monitor the state of parts constituting the apparatus, a device state monitoring control part configured to monitor integrity of device data obtained from an operation state of the parts constituting the apparatus, and a data matching control part configured to monitor facility data provided from a factory facility to the apparatus. The device management controller is configured to derive information evaluating the operation state of the apparatus based on a plurality of monitoring result data selected from a group consisting of maintenance timing monitoring result data acquired by the parts management control part, device state monitoring result data acquired by the device state monitoring control part, and utility monitoring result data acquired by the data matching control part.

Abstract: A substrate processing apparatus includes a device management controller including a parts management control part configured to monitor the state of parts constituting the apparatus, a device state monitoring control part configured to monitor integrity of device data obtained from an operation state of the parts constituting the apparatus, and a data matching control part configured to monitor facility data provided from a factory facility to the apparatus. The device management controller is configured to derive information evaluating the operation state of the apparatus based on a plurality of monitoring result data selected from a group consisting of maintenance timing monitoring result data acquired by the parts management control part, device state monitoring result data acquired by the device state monitoring control part, and utility monitoring result data acquired by the data matching control part.

Abstract: Provided is an eccentric oscillation gear device including: a crank shaft having eccentric portions; oscillation gears having insertion holes into which the eccentric portions are inserted; an outer cylinder; and a carrier. The outer cylinder and the carrier concentrically rotate relative to each other by the oscillation of the oscillation gears due to the rotation of the crank shaft. The eccentric oscillation gear device includes a storage unit which stores at least one type of information out of: information on a parameter that originates from a processing error and influences rotation angle characteristics; information on a parameter that changes depending on temperature and influences rotation angle characteristics; and information on a parameter that influences time-dependent change characteristics and influences rotation angle characteristics.

Abstract: A speed reducer for an industrial robot includes a speed reducer main body and a lubricant deterioration sensor for detecting deterioration of a lubricant in the speed reducer main body. The lubricant deterioration sensor includes a light emitting element for emitting light, a color light receiving element for detecting a color of received light, a clearance forming member forming an oil clearance in which the lubricant enters, and a support member supporting the light emitting element, the color light receiving element, and the clearance forming member. The clearance forming member is transmissive so that the light emitted from the light emitting element transmits therethrough. The oil clearance is provided on an optical path from the light emitting element to the color light receiving element.

Abstract: Disclosed is a fluororubber composition comprising (A) 100 parts by weight of a peroxide-crosslinkable fluororubber, (B) 1 to 15 parts by weight of ZnO, (C) at least one of a basic metal hydroxide and a metal oxide other than ZnO at a weight ratio of 0.5 or more with respect to the weight of ZnO, and (D) 0.5 to 10 parts by weight of an organic peroxide. When used for contact with biodiesel fuel, the peroxide-crosslinkable fluororubber composition effectively prevents material degradation shown in BDF while maintaining excellent compression set characteristics due to the addition of ZnO, as in conventional peroxide-crosslinkable fluororubbers, and therefore can be suitably used as, for example, a vulcanization molding material for sealing materials.

Abstract: Provided is an eccentric oscillation gear device including: a crank shaft having eccentric portions; oscillation gears having insertion holes into which the eccentric portions are inserted; an outer cylinder; and a carrier. The outer cylinder and the carrier concentrically rotate relative to each other by the oscillation of the oscillation gears due to the rotation of the crank shaft. The eccentric oscillation gear device includes a storage unit which stores at least one type of information out of: information on a parameter that originates from a processing error and influences rotation angle characteristics; information on a parameter that changes depending on temperature and influences rotation angle characteristics; and information on a parameter that influences time-dependent change characteristics and influences rotation angle characteristics.

Abstract: A speed reducer for an industrial robot includes a speed reducer main body and a lubricant deterioration sensor for detecting deterioration of a lubricant in the speed reducer main body. The lubricant deterioration sensor includes a light emitting element for emitting light, a color light receiving element for detecting a color of received light, a clearance forming member forming an oil clearance in which the lubricant enters, and a support member supporting the light emitting element, the color light receiving element, and the clearance forming member. The clearance forming member is transmissive so that the light emitted from the light emitting element transmits therethrough.

Abstract: A gear device has an outer cylinder fixed to a first mating member and a crankshaft inside the outer cylinder. An external gear is mounted to an eccentric portion of the crankshaft and meshes with internal teeth of the outer cylinder. A carrier is fixed to a second mating member. Rocking rotation of the external gear rotates the carrier coaxially to the outer cylinder. A cylindrical body is inserted in an axial through-hole of the carrier. The carrier has a first portion on one end of the cylindrical body and a second portion on an axially intermediate portion of the cylindrical body. The other end of the cylindrical body extends toward a corresponding mating member while protruding axially beyond the second portion. An outer diameter of remaining portions of the cylindrical body do not exceed an outermost diameter of the portion on which the first and second portions are fit.

Abstract: Provided are a substrate processing apparatus, a semiconductor device manufacturing method, and a temperature controlling method, which are adapted to improve equipment operational rate. A calculation parameter computing unit computes a calculation parameter using at least a first calculation parameter correction value determined by a first calculation parameter setting unit based on an accumulated film thickness on a reaction vessel, a second calculation parameter correction value determined by a second calculation parameter setting unit based on an accumulated film thickness on a filler wafer, and a third calculation parameter correction value determined by a third calculation parameter setting unit based on the number of filler wafers.

Abstract: Disclosed is a fluororubber composition comprising (A) 100 parts by weight of a peroxide-crosslinkable fluororubber, (B) 1 to 15 parts by weight of ZnO, (C) at least one of a basic metal hydroxide and a metal oxide other than ZnO at a weight ratio of 0.5 or more with respect to the weight of ZnO, and (D) 0.5 to 10 parts by weight of an organic peroxide. When used for contact with biodiesel fuel, the peroxide-crosslinkable fluororubber composition effectively prevents material degradation shown in BDF while maintaining excellent compression set characteristics due to the addition of ZnO, as in conventional peroxide-crosslinkable fluororubbers, and therefore can be suitably used as, for example, a vulcanization molding material for sealing materials.

Abstract: A gear device has an outer cylinder fixed to a first mating member and a crankshaft inside the outer cylinder. An external gear is mounted to an eccentric portion of the crankshaft and meshes with internal teeth of the outer cylinder. A carrier is fixed to a second mating member. Rocking rotation of the external gear rotates the carrier coaxially to the outer cylinder. A cylindrical body is inserted in an axial through-hole of the carrier. The carrier has a first portion on one end of the cylindrical body and a second portion on an axially intermediate portion of the cylindrical body. The other end of the cylindrical body extends toward a corresponding mating member while protruding axially beyond the second portion. An outer diameter of remaining portions of the cylindrical body do not exceed an outermost diameter of the portion on which the first and second portions are fit.

Abstract: Provided are a substrate processing apparatus, a semiconductor device manufacturing method, and a temperature controlling method, which are adapted to improve equipment operational rate. A calculation parameter computing unit computes a calculation parameter using at least a first calculation parameter correction value determined by a first calculation parameter setting unit based on an accumulated film thickness on a reaction vessel, a second calculation parameter correction value determined by a second calculation parameter setting unit based on an accumulated film thickness on a filler wafer, and a third calculation parameter correction value determined by a third calculation parameter setting unit based on the number of filler wafers.

Abstract: A high-performance gasket (1) capable of coping with a reduction in size and developing a sealing property without producing a squeeze-out at the time of attachment and using a material having a hardness range of 30 to 80 degrees (JIS durometer type A), wherein the requirement of W1/W0<0.9 is satisfied where the bonding width of a base part (1a) is (W0) and the width thereof at a position half a height from the bonding part of the base part (1a) to the tip end of a main bead part (2) is (W1), the requirement of 1.15<H/W0<1.80 is satisfied where the height from the bonding part of the base part (1a) to the tip end of the main bead part (2) is (H), the requirement of L/W0>=3 is satisfied where the length of the non-bonded portion of the base part (1a) around the cross-section thereof excluding the bonded portion is (L), and the compressibility of the gasket when compressed is 13.5% or higher.

Abstract: The eccentrically oscillating gear device is equipped with an internal gear (15) having internal gear pins (15a), a carrier (11) rotating relative to the internal gear, a pair of bearings (19, 20) that have a rolling element and a ring body for supporting the rolling element, a crank shaft supported by the carrier so as to be freely rotatable and external gears (13, 14) that are equipped with external teeth having a trochoid tooth profile whose tooth top portions are cut out, and disposed between the pair of bearings. The outer peripheries of the external gears are engaged with the internal gear pins and fitted to the crank portion of the crank shaft. The eccentrically oscillating gear device is designed so that the external gear makes an eccentrically oscillating motion by rotation of the crank shaft and the rotational output is taken out from the internal gear or the carrier.