Patents by Inventor Kenichi FUKAZAWA

Kenichi FUKAZAWA has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Substrate supporting device
    Patent number: 11004715
    Abstract: A substrate supporting device having a feeder structure that enables a large number of electrodes to be successfully supplied with power. A ceramic heater 100 includes a base 10 having an upper surface as a support surface on which a substrate is supported, electrodes 20 embedded in the base 10, a base-supporting member 30 that is mounted on a lower surface of the base 10 and that is formed of a heat insulating material, and feeder rods 40 that extend through respective through-holes 35 formed in a circumferential wall 34 of the base-supporting member 30 and extending in the vertical direction and that are electrically connected to the electrodes 20.
    Type: Grant
    Filed: February 6, 2017
    Date of Patent: May 11, 2021
    Assignee: NGK SPARK PLUG CO., LTD.
    Inventors: Noriaki Tokusho, Shunichi Sasaki, Tomohiro Ishino, Hisanori Aoyama, Makoto Hino, Kenichi Fukazawa, Atsushi Tsuchida, Toshiya Umeki
  • SUBSTRATE SUPPORTING DEVICE
    Publication number: 20180204754
    Abstract: A substrate supporting device having a feeder structure that enables a large number of electrodes to be successfully supplied with power. A ceramic heater 100 includes a base 10 having an upper surface as a support surface on which a substrate is supported, electrodes 20 embedded in the base 10, a base-supporting member 30 that is mounted on a lower surface of the base 10 and that is formed of a heat insulating material, and feeder rods 40 that extend through respective through-holes 35 formed in a circumferential wall 34 of the base-supporting member 30 and extending in the vertical direction and that are electrically connected to the electrodes 20.
    Type: Application
    Filed: February 6, 2017
    Publication date: July 19, 2018
    Applicant: NGK SPARK PLUG CO., LTD.
    Inventors: Noriaki TOKUSHO, Shunichi SASAKI, Tomohiro ISHINO, Hisanori AOYAMA, Makoto HINO, Kenichi FUKAZAWA, Atsushi TSUCHIDA, Toshiya UMEKI