Patents by Inventor Kenichi Iwashita

Kenichi Iwashita has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20240015889
    Abstract: A method for producing a wiring board, including: a step of pretreating the surface of a metal layer exposed into an opening by bringing the surface into contact with a pretreatment liquid at a predetermined pretreatment temperature; and a step of forming a copper plating layer on the metal layer by electrolytic plating. The resist layer and the pretreatment liquid are selected such that a mass change rate of the resist layer when the resist layer before being exposed and developed is immersed in the pretreatment liquid is ?2.0% by mass or more. The mass change rate is a value calculated by Expression: Mass change rate (% by mass)={(W1?W0)/W0}×100. W1 is the mass of the resist layer after a laminated body including a resist layer 3 and a copper foil is immersed in the pretreatment liquid at the pretreatment temperature for 30 minutes.
    Type: Application
    Filed: September 9, 2021
    Publication date: January 11, 2024
    Inventors: Kei TOGASAKI, Kenichi IWASHITA, Keishi ONO, Mao NARITA, Kazuyuki MITSUKURA, Masaya TOBA
  • Patent number: 10656521
    Abstract: A photosensitive resin composition comprises: a resin having a phenolic hydroxyl group; a photosensitive acid generator; a compound having at least one selected from the group consisting of an aromatic ring, a heterocycle and an alicycle, and at least one selected from the group consisting of a methylol group and an alkoxyalkyl group; and an aliphatic compound having two or more functional groups, the functional groups being at least one functional group selected from the group consisting of an acryloyloxy group, a methacryloyloxy group, a glycidyloxy group, an oxetanyl alkyl ether group, a vinyl ether group and a hydroxyl group, wherein the photosensitive acid generator is a sulfonium salt containing an anion having at least one skeleton selected from the group consisting of a tetraphenylborate skeleton, an alkylsulfonate skeleton having 1 to 20 carbon atoms, a phenylsulfonate skeleton and a 10-camphorsulfonate skeleton.
    Type: Grant
    Filed: November 25, 2015
    Date of Patent: May 19, 2020
    Assignee: HITACHI CHEMICAL COMPANY, LTD.
    Inventors: Tetsuya Kato, Kenichi Iwashita, Akihiro Nakamura, Akio Nakano, Hiroshi Ono
  • Patent number: 10388608
    Abstract: To provide a manufacturing method capable of manufacturing a high density semiconductor device excellent in transmission between chips at a favorable yield and at low cost. A method for manufacturing a semiconductor device includes an insulating layer forming step of forming an insulating layer 3 having a trench 4 above a substrate 1, a copper layer forming step of forming a copper layer 5a on the insulating layer 3 so as to fill the trench 4, and a removing step of removing the copper layer 5a on the insulating layer 3 by a fly cutting method so as to retain a copper layer part in the trench 4.
    Type: Grant
    Filed: February 9, 2016
    Date of Patent: August 20, 2019
    Assignee: HITACHI CHEMICAL COMPANY, LTD.
    Inventors: Kazuyuki Mitsukura, Masaya Toba, Kenichi Iwashita, Kohsuke Urashima, Kazuhiko Kurafuchi
  • Patent number: 10324375
    Abstract: Provided is a photosensitive resin composition comprising (A) a resin having a phenolic hydroxyl group; (B) an aliphatic or alicyclic epoxy compound having two or more oxirane rings; (C) a photosensitive acid generator; and (D) a solvent; wherein the photosensitive resin composition comprises 20 to 70 parts by mass of the component (B) relative to 100 parts by mass of the component (A).
    Type: Grant
    Filed: November 5, 2013
    Date of Patent: June 18, 2019
    Assignee: HITACHI CHEMICAL COMPANY, LTD.
    Inventors: Kenichi Iwashita, Yasuharu Murakami, Hanako Yori, Tetsuya Kato
  • Publication number: 20180337134
    Abstract: To provide a manufacturing method capable of manufacturing a high density semiconductor device excellent in transmission between chips at a favorable yield and at low cost. A method for manufacturing a semiconductor device includes an insulating layer forming step of forming an insulating layer 3 having a trench 4 above a substrate 1, a copper layer forming step of forming a copper layer 5a on the insulating layer 3 so as to fill the trench 4, and a removing step of removing the copper layer 5a on the insulating layer 3 by a fly cutting method so as to retain a copper layer part in the trench 4.
    Type: Application
    Filed: February 9, 2016
    Publication date: November 22, 2018
    Inventors: Kazuyuki MITSUKURA, Masaya TOBA, Kenichi IWASHITA, Kohsuke URASHIMA, Kazuhiko KURAFUCHI
  • Patent number: 9841678
    Abstract: A photosensitive resin composition comprises: a component (A): a resin having a phenolic hydroxyl group; a component (B): a compound having a methylol group or an alkoxyalkyl group; a component (C): an aliphatic compound having two or more functional groups, the functional groups being one or more types selected from an acryloyloxy group, a methacryloyloxy group, a glycidyloxy group and a hydroxyl group; and a component (D): a photosensitive acid generator.
    Type: Grant
    Filed: September 29, 2014
    Date of Patent: December 12, 2017
    Assignee: HITACHI CHEMICAL COMPANY, LTD.
    Inventors: Kenichi Iwashita, Tetsuya Kato, Masahiko Ebihara
  • Patent number: 9829791
    Abstract: A photosensitive resin composition comprises a component (A): a resin having a phenolic hydroxyl group; a component (B): an aliphatic compound having two or more functional groups, the functional groups being one or more group selected from an acryloyloxy group, a methacryloyloxy group, a glycidyloxy group and a hydroxyl group; a component (C): a photosensitive acid generator; and a component (D): an inorganic filler having an average particle diameter of 100 nm or less.
    Type: Grant
    Filed: September 29, 2014
    Date of Patent: November 28, 2017
    Assignee: HITACHI CHEMICAL COMPANY, LTD.
    Inventors: Kenichi Iwashita, Tetsuya Kato, Masahiko Ebihara, Yasuharu Murakami
  • Publication number: 20170329220
    Abstract: A photosensitive resin composition comprises: a resin having a phenolic hydroxyl group; a photosensitive acid generator; a compound having at least one selected from the group consisting of an aromatic ring, a heterocycle and an alicycle, and at least one selected from the group consisting of a methylol group and an alkoxyalkyl group; an aliphatic compound having two or more functional groups being at least one selected from the group consisting of an acryloyloxy group, a methacryloyloxy group, a glycidyloxy group, an oxetanyl alkyl ether group, a vinyl ether group and a hydroxyl group; and a compound having at least one skeleton selected from the group consisting of an anthracene skeleton, a phenanthrene skeleton, a pyrene skeleton, a perylene skeleton, a carbazole skeleton, a phenothiazine skeleton, a xanthone skeleton, a thioxanthone skeleton, an acridine skeleton, a phenylpyrazoline skeleton, a distyrylbenzene skeleton and a distyrylpyridine skeleton, or a benzophenone compound.
    Type: Application
    Filed: November 25, 2015
    Publication date: November 16, 2017
    Inventors: Tetsuya KATO, Kenichi IWASHITA, Akihiro NAKAMURA, Akio NAKANO, Hiroshi ONO
  • Publication number: 20170261852
    Abstract: A photosensitive resin composition comprises: a resin having a phenolic hydroxyl group; a photosensitive acid generator; a compound having at least one selected from the group consisting of an aromatic ring, a heterocycle and an alicycle, and at least one selected from the group consisting of a methylol group and an alkoxyalkyl group; and an aliphatic compound having two or more functional groups, the functional groups being at least one functional group selected from the group consisting of an acryloyloxy group, a methacryloyloxy group, a glycidyloxy group, an oxetanyl alkyl ether group, a vinyl ether group and a hydroxyl group, wherein the photosensitive acid generator is a sulfonium salt containing an anion having at least one skeleton selected from the group consisting of a tetraphenylborate skeleton, an alkylsulfonate skeleton having 1 to 20 carbon atoms, a phenylsulfonate skeleton and a 10-camphorsulfonate skeleton.
    Type: Application
    Filed: November 25, 2015
    Publication date: September 14, 2017
    Inventors: Tetsuya KATO, Kenichi IWASHITA, Akihiro NAKAMURA, Akio NAKANO, Hiroshi ONO
  • Publication number: 20160246174
    Abstract: A photosensitive resin composition comprises: a component (A): a resin having a phenolic hydroxyl group; a component (B): a compound having a methylol group or an alkoxyalkyl group; a component (C): an aliphatic compound having two or more functional groups, the functional groups being one or more types selected from an acryloyloxy group, a methacryloyloxy group, a glycidyloxy group and a hydroxyl group; and a component (D): a photosensitive acid generator.
    Type: Application
    Filed: September 29, 2014
    Publication date: August 25, 2016
    Inventors: Kenichi IWASHITA, Tetsuya KATO, Masahiko EBIHARA
  • Publication number: 20160216608
    Abstract: A photosensitive resin composition comprises a component (A): a resin having a phenolic hydroxyl group; a component (B): an aliphatic compound having two or more functional groups, the functional groups being one or more group selected from an acryloyloxy group, a methacryloyloxy group, a glycidyloxy group and a hydroxyl group; a component (C): a photosensitive acid generator; and a component (D): an inorganic filler having an average particle diameter of 100 nm or less.
    Type: Application
    Filed: September 29, 2014
    Publication date: July 28, 2016
    Inventors: Kenichi IWASHITA, Tetsuya KATO, Masahiko EBIHARA, Yasuharu MURAKAMI
  • Publication number: 20150323867
    Abstract: Provided is a photosensitive resin composition comprising (A) a resin having a phenolic hydroxyl group; (B) an aliphatic or alicyclic epoxy compound having two or more oxirane rings; (C) a photosensitive acid generator; and (D) a solvent; wherein the photosensitive resin composition comprises 20 to 70 parts by mass of the component (B) relative to 100 parts by mass of the component (A).
    Type: Application
    Filed: November 5, 2013
    Publication date: November 12, 2015
    Applicant: HITACHI CHEMICAL COMPANY, LTD.
    Inventors: Kenichi IWASHITA, Yasuharu MURAKAMI, Hanako YORI, Tetsuya KATO
  • Patent number: 8298747
    Abstract: To provide a photosensitive resin composition in which a hardened film obtained from the photosensitive resin composition has properties comparable to those of a film hardened at a high temperature, a method for manufacturing a patterned hardened film using the photosensitive resin composition, and an electronic part. The photosensitive resin composition includes (a) a polybenzoxazole precursor having a repeating unit represented by a general formula (I): wherein U and V represent a divalent organic group, and at least one of U and V is a group containing an aliphatic chain structure having 1 to 30 carbon atoms; (b) a photosensitizer; (c) a solvent; and (d) a crosslinking agent capable of causing crosslinking or polymerization by heating.
    Type: Grant
    Filed: March 6, 2008
    Date of Patent: October 30, 2012
    Assignee: Hitachi Chemical Dupont Microsystems, Ltd.
    Inventors: Tomonori Minegishi, Rika Nogita, Kenichi Iwashita
  • Publication number: 20100092879
    Abstract: To provide a photosensitive resin composition in which a hardened film obtained from the photosensitive resin composition has properties comparable to those of a film hardened at a high temperature, a method for manufacturing a patterned hardened film using the photosensitive resin composition, and an electronic part. The photosensitive resin composition includes (a) a polybenzoxazole precursor having a repeating unit represented by a general formula (I): wherein U and V represent a divalent organic group, and at least one of U and V is a group containing an aliphatic chain structure having 1 to 30 carbon atoms; (b) a photosensitizer; (c) a solvent; and (d) a crosslinking agent capable of causing crosslinking or polymerization by heating.
    Type: Application
    Filed: March 6, 2008
    Publication date: April 15, 2010
    Applicant: HITACHI CHEMICAL DUPONT MICROSYSTEMS, LTD.
    Inventors: Tomonori Minegishi, Rika Nogita, Kenichi Iwashita