Abstract: In a scale for a reflective photoelectric encoder in which a reflective film is not formed on the side faces of phase gratings, an edge angle ? of the phase grating is set larger than 80 degrees and less than 90 degrees. Accordingly, stable diffraction efficiency is obtained, even if there are variations in the shape and size of the gratings.

Abstract: In a scale for a reflective photoelectric encoder in which a reflective film is not formed on the side faces of phase gratings, an edge angle ? of the phase grating is set larger than 80 degrees and less than 90 degrees. Accordingly, stable diffraction efficiency is obtained, even if there are variations in the shape and size of the gratings.

Abstract: A first metal layer of tungsten is formed on a substrate in a scale. A second metal layer of chromium is formed on the first metal layer. The second metal layer is selectively removed with a mask of resist and an etching stopper of the first metal layer to form an optical grating.

Abstract: A method for increasing the resistance of plants to the phytotoxicity of agrochemicals comprises treating the plants, the soil or seeds with an effective amount of a compound of the formula I in which X is halogen, alkyl or trifluoromethyl; m is 0 or 1; Q is C(?CH—CH3)—COOCH3, C(?CH—OCH3)—COOCH3, C(?N—OCH3)—CONHCH3, C(?N—OCH3)—COOCH3, N(—OCH3)—COOCH3 or a group Q1, where # indicates the bond to the phenyl ring; A is —O—B, —CH2O—B, —OCH2—B, —CH?CH—B, —C—C—B, —CH2O—N?C(R1)—B or —CH2O—N?C(R1)—C(R2)?N—OR3, where B is phenyl, naphthyl, 5-membered or 6-membered hetaryl or 5-membered or 6-membered heterocyclyl, the ring systems being unsubstituted or substituted as specified in the description; R1 is hydrogen, cyano, alkyl, haloalkyl, cycloalkyl or alkoxy; R2 is phenyl, phenylcarbonyl, phenylsulfonyl, 5- or 6-membered hetaryl, 5- or 6-membered hetarylcarbonyl or 5- or 6-membered hetarylsulfonyl, the ring systems being unsubstituted or substituted as specified in the description, alkyl, cycloalkyl, alkenyl

Abstract: The plasma processing apparatus of the present invention increases the throughput of plasma processing. This objective is achieved by a composition which comprises a processing chamber (10) for performing surface processing of substrates (W) by means of a plasma discharge, load-lock chambers (20R) and (20L) whereto passage from the processing chamber (10) is possible through slots (11R) and (11L) formed in a wall portion (10a) of the processing chamber (10), a gate element (30) which opens and closes the slots (11R) and (11L) from within the processing chamber 10, and transport element(s) for transporting substrates (W) between the processing chamber (10) and the load-lock chambers (20R) and (20L).

Abstract: A novel class of compounds, tris(triorganosilylalkyl) phosphites, represented by the general formula [R.sub.3 Si(CH.sub.2).sub.n O].sub.3 P where R is a monovalent hydrocarbon group and n is 1, 2 or 3. These novel compounds may be synthesized by dehydrochlorination reaction between a triorganosilyl-substituted alkanol and phosphorus trichloride in the presence of a tertiary amine. They have useful values as agricultural chemicals because of their biological activities and also as intermediate compounds in the preparation of certain medicines and chemicals.