Patents by Inventor Kenichi MYOCHIN

Kenichi MYOCHIN has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Charged particle beam device
    Patent number: 10541103
    Abstract: The purpose of the present invention is to reduce the amount of charged particles that are lost by colliding with the interior of a column of a charged particle beam device, and detect charged particles with high efficiency. To achieve this purpose, proposed is a charged particle beam device provided with: an objective lens that focuses a charged particle beam; a detector that is disposed between the objective lens and a charged particle source; a deflector that deflects charged particles emitted from a sample such that the charged particles separate from the axis of the charged particle beam; and a plurality of electrodes that are disposed between the deflector and the objective lens and that form a plurality of electrostatic lenses for focusing the charged particles emitted from the sample on a deflection point of the deflector.
    Type: Grant
    Filed: December 10, 2014
    Date of Patent: January 21, 2020
    Assignee: Hitachi High-Technologies Corporation
    Inventors: Yuzuru Mizuhara, Toshiyuki Yokosuka, Hideyuki Kazumi, Kouichi Kurosawa, Kenichi Myochin
  • Charged Particle Beam Device
    Publication number: 20170345613
    Abstract: The purpose of the present invention is to reduce the amount of charged particles that are lost by colliding with the interior of a column of a charged particle beam device, and detect charged particles with high efficiency. To achieve this purpose, proposed is a charged particle beam device provided with: an objective lens that focuses a charged particle beam; a detector that is disposed between the objective lens and a charged particle source; a deflector that deflects charged particles emitted from a sample such that the charged particles separate from the axis of the charged particle beam; and a plurality of electrodes that are disposed between the deflector and the objective lens and that form a plurality of electrostatic lenses for focusing the charged particles emitted from the sample on a deflection point of the deflector.
    Type: Application
    Filed: December 10, 2014
    Publication date: November 30, 2017
    Applicant: Hitachi High-Technologies Corporation
    Inventors: Yuzuru MIZUHARA, Toshiyuki YOKOSUKA, Hideyuki KAZUMI, Kouichi KUROSAWA, Kenichi MYOCHIN