Patents by Inventor Kenichi Nagata
Kenichi Nagata has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20230027317Abstract: Provided is an animal model that can replicate a disease state of human AD. A non-human primate model animal of Alzheimer's disease includes the PSEN1 gene in which a site related to splicing of exon 9 is made deficient.Type: ApplicationFiled: December 18, 2020Publication date: January 26, 2023Inventors: Erika SASAKI, Kenya SATO, Wakako KUMITA, Hiroki SASAGURI, Takaomi SAIDO, Kenichi NAGATA, Takashi YAMAMOTO, Tetsushi SAKUMA
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Patent number: 10557195Abstract: A sputtering target and/or a coil disposed at a periphery of a plasma-generating region for confining plasma are provided. The target and/or coil has a surface to be eroded having a hydrogen content of 500 ?L/cm2 or less. In dealing with reduction in hydrogen content of the surface of the target and/or coil, a process of producing the target and/or coil, in particular, conditions for heating the surface of the target and/or coil, which is believed to be a cause of hydrogen occlusion, are appropriately regulated. As a result, hydrogen occlusion at the surface of the target can be reduced, and the degree of vacuum during sputtering can be improved. Thus, a target and/or coil is provided that has a uniform and fine structure, makes plasma stable, and allows a film to be formed with excellent uniformity. A method of producing the target and/or the coil is also provided.Type: GrantFiled: September 25, 2017Date of Patent: February 11, 2020Assignee: JX NIPPON MINING & METALS CORPORATIONInventors: Kenichi Nagata, Nobuhito Makino
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Patent number: 10276356Abstract: A copper alloy sputtering target having a composition comprising 1.0 to 5.0 at % of Mn, 0.1 to 4.0 at % of Al, and remainder being Cu and unavoidable impurities, wherein a compositional variation in a plane of the sputtering target is within 20%. The present invention provides a copper alloy sputtering target capable of forming a semiconductor element wiring material, particularly a stable and uniform seed layer which is free of aggregation during copper electroplating, and which has superior sputter deposition properties, and a semiconductor element wiring formed using the copper alloy sputtering target.Type: GrantFiled: February 28, 2014Date of Patent: April 30, 2019Assignee: JX Nippon Mining & Metals CorporationInventors: Tomio Otsuki, Kenichi Nagata
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Publication number: 20190085442Abstract: Provided is a sputtering target formed from copper or a copper alloy, and the sputtering target contains either argon or hydrogen, or both, each in an amount of 1 wtppm or more and 10 wtppm or less. An object of the embodiment of the present invention is to provide a copper or copper alloy sputtering target which is capable of stably maintaining discharge even under conditions such as low pressure and low gas flow rate where it is difficult to continuously maintain sputtering discharge.Type: ApplicationFiled: March 7, 2017Publication date: March 21, 2019Inventors: Tomio Otsuki, Kenichi Nagata, Yasushi Morii
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Patent number: 9951412Abstract: Provided is a sputtering target and/or a coil disposed at the periphery of a plasma-generating region for confining plasma. The target and/or the coil has a surface to be eroded having a hydrogen content of 500 ?L/cm2 or less. In dealing with reduction in the hydrogen content of the surface of the target and/or the coil, the process of producing the target and/or the coil, in particular, the conditions for heating the surface of the target and/or the coil, which is thought to be cause of hydrogen occlusion, are appropriately regulated. As a result, hydrogen occlusion at the surface of the target can be reduced, and the degree of vacuum during sputtering can be improved. Thus, the present invention provides a target and/or a coil that has a uniform and fine structure, makes plasma stable, and allows a film to be formed with excellent uniformity and provides a method of producing the target and/or the coil.Type: GrantFiled: July 27, 2011Date of Patent: April 24, 2018Assignee: JX Nippon Mining & Metals CorporationInventors: Kenichi Nagata, Nobuhito Makino
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Patent number: 9909196Abstract: A high purity copper-cobalt alloy sputtering target containing 0.1 to 20 at % of Co, and remainder being Cu and unavoidable impurities, wherein a size (dimension) of precipitates in the target structure is 10 ?m or less, and a number of precipitates is 500 precipitates/mm2 or less. It is thereby possible to provide a high purity copper-cobalt alloy sputtering target capable of inhibiting the generation of particles during sputtering, and in particular improving the yield and reliability of semiconductor products that are being subject to further miniaturization and higher integration.Type: GrantFiled: February 19, 2014Date of Patent: March 6, 2018Assignee: JX Nippon Mining & Metals CorporationInventors: Kenichi Nagata, Tomio Otsuki
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Publication number: 20180010241Abstract: A sputtering target and/or a coil disposed at a periphery of a plasma-generating region for confining plasma are provided. The target and/or coil has a surface to be eroded having a hydrogen content of 500 ?L/cm2 or less. In dealing with reduction in hydrogen content of the surface of the target and/or coil, a process of producing the target and/or coil, in particular, conditions for heating the surface of the target and/or coil, which is believed to be a cause of hydrogen occlusion, are appropriately regulated. As a result, hydrogen occlusion at the surface of the target can be reduced, and the degree of vacuum during sputtering can be improved. Thus, a target and/or coil is provided that has a uniform and fine structure, makes plasma stable, and allows a film to be formed with excellent uniformity. A method of producing the target and/or the coil is also provided.Type: ApplicationFiled: September 25, 2017Publication date: January 11, 2018Inventors: Kenichi Nagata, Nobuhito Makino
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Patent number: 9704695Abstract: A backing plate integrated sputtering target includes a flange part having a Vicker's hardness (Hv) of 90 or more and a 0.2% yield stress of 6.98×107 N/m2 or more. Enhancing the mechanical strength of only the flange part of the target inhibits the target from being deformed during sputtering, and further, does not vary the original sputtering characteristics. Consequently, the target can form a thin film having excellent uniformity. This can improve the yield and the reliability of semiconductor products, which have been progressing in miniaturization and integration.Type: GrantFiled: September 12, 2012Date of Patent: July 11, 2017Assignee: JX Nippon Mining & Metals CorporationInventors: Kenichi Nagata, Tomio Otsuki, Takeo Okabe, Nobuhito Makino, Atsushi Fukushima
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Patent number: 9632454Abstract: A cartridge capable of preventing careless damage or the like of a memory unit and an image forming apparatus including the cartridge are provided.Type: GrantFiled: February 22, 2016Date of Patent: April 25, 2017Assignee: Sharp Kabushiki KaishaInventor: Kenichi Nagata
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Publication number: 20160291521Abstract: A cartridge capable of preventing careless damage or the like of a memory unit and an image forming apparatus including the cartridge are provided.Type: ApplicationFiled: February 22, 2016Publication date: October 6, 2016Inventor: Kenichi NAGATA
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Publication number: 20150354047Abstract: A high purity copper-cobalt alloy sputtering target containing 0.1 to 20 at % of Co, and remainder being Cu and unavoidable impurities, wherein a size (dimension) of precipitates in the target structure is 10 ?m or less, and a number of precipitates is 500 precipitates/mm2 or less. It is thereby possible to provide a high purity copper-cobalt alloy sputtering target capable of inhibiting the generation of particles during sputtering, and in particular improving the yield and reliability of semiconductor products that are being subject to further miniaturization and higher integration.Type: ApplicationFiled: February 19, 2014Publication date: December 10, 2015Inventors: Kenichi Nagata, Tomio Otsuki
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Patent number: 9165750Abstract: A high purity copper-manganese alloy sputtering target containing 0.05 to 20 wt % of Mn and, excluding additive elements, remainder being Cu and unavoidable impurities, wherein the target contains 0.001 to 0.06 wtppm of P and 0.005 to 5 wtppm of S, and further contains Ca and Si, and a total content of P, S, Ca, and Si is 0.01 to 20 wtppm. The incorporation of appropriate amounts of Mn as well as Ca, P, Si, and S in copper improves the machinability that is required in the stage of producing a target to facilitate the manufacture (workability) of the target, improves the smoothness of the target surface, and inhibits the generation of particles during sputtering. Thus, provided is a high purity copper-manganese alloy sputtering target which is particularly useful for improving the yield and reliability of semiconductor products that progress toward miniaturization and integration.Type: GrantFiled: January 4, 2013Date of Patent: October 20, 2015Assignee: JX Nippon Mining & Metals CorporationInventors: Kenichi Nagata, Tomio Otsuki, Takeo Okabe, Nobuhito Makino, Atsushi Fukushima
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Publication number: 20150279638Abstract: A copper alloy sputtering target having a composition comprising 1.0 to 5.0 at % of Mn, 0.1 to 4.0 at % of Al, and remainder being Cu and unavoidable impurities, wherein a compositional variation in a plane of the sputtering target is within 20%. The present invention provides a copper alloy sputtering target capable of forming a semiconductor element wiring material, particularly a stable and uniform seed layer which is free of aggregation during copper electroplating, and which has superior sputter deposition properties, and a semiconductor element wiring formed using the copper alloy sputtering target.Type: ApplicationFiled: February 28, 2014Publication date: October 1, 2015Inventors: Tomio Otsuki, Kenichi Nagata
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Patent number: 9090970Abstract: Provided is a high-purity copper-manganese-alloy sputtering target comprising 0.05 to 20 wt % of Mn and the remainder being Cu and inevitable impurities. The high-purity copper-manganese-alloy sputtering target is characterized in that the in-plane variation (CV value) in Mn concentration of the target is 3% or less. It is thus possible to form a thin film having excellent uniformity by adding an appropriate amount of a Mn element to copper and reducing the in-plane variation of the sputtering target. In particular, there is provided a high-purity copper-manganese-alloy sputtering target which is useful for improving the yield and the reliability of semiconductor products which are making progress in a degree of refinement and integration.Type: GrantFiled: September 6, 2012Date of Patent: July 28, 2015Assignee: JX Nippon Mining & Metals CorporationInventors: Kenichi Nagata, Tomio Otsuki, Takeo Okabe, Nobuhito Makino, Atsushi Fukushima
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Publication number: 20140318953Abstract: A backing plate integrated sputtering target includes a flange part having a Vicker's hardness (Hv) of 90 or more and a 0.2% yield stress of 6.98×107 N/m2 or more. Enhancing the mechanical strength of only the flange part of the target inhibits the target from being deformed during sputtering, and further, does not vary the original sputtering characteristics. Consequently, the target can form a thin film having excellent uniformity. This can improve the yield and the reliability of semiconductor products, which have been progressing in miniaturization and integration.Type: ApplicationFiled: September 12, 2012Publication date: October 30, 2014Applicant: JX NIPPON MINING & METALS CORPORATIONInventors: Kenichi Nagata, Tomio Otsuki, Takeo Okabe, Nobuhito Makino, Atsushi Fukushima
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Publication number: 20140284211Abstract: A high purity copper-manganese alloy sputtering target containing 0.05 to 20 wt % of Mn and, excluding additive elements, remainder being Cu and unavoidable impurities, wherein the target contains 0.001 to 0.06 wtppm of P and 0.005 to 5 wtppm of S, and further contains Ca and Si, and a total content of P, S, Ca, and Si is 0.01 to 20 wtppm. The incorporation of appropriate amounts of Mn as well as Ca, P, Si, and S in copper improves the machinability that is required in the stage of producing a target to facilitate the manufacture (workability) of the target, improves the smoothness of the target surface, and inhibits the generation of particles during sputtering. Thus, provided is a high purity copper-manganese alloy sputtering target which is particularly useful for improving the yield and reliability of semiconductor products that progress toward miniaturization and integration.Type: ApplicationFiled: January 4, 2013Publication date: September 25, 2014Inventors: Kenichi Nagata, Tomio Otsuki, Takeo Okabe, Nobuhito Makino, Atsushi Fukushima
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Publication number: 20140158532Abstract: Provided is a high-purity copper-manganese-alloy sputtering target comprising 0.05 to 20 wt. % of Mn, 2 wt ppm or less of C, and the remainder being Cu and inevitable impurities, wherein in formation of a film on a wafer by sputtering the target, the number of particles composed of C, at least one element selected from Mn, Si, and Mg, or a compound composed of C and at least one element selected from Mn, Si, and Mg and having a diameter of 0.20 ?m or more is 30 or less on average. Particle generation during sputtering can be effectively suppressed by thus adding an appropriate amount of Mn element to copper and controlling the amount of carbon. In particular, a high-purity copper-manganese-alloy sputtering target that is useful for forming semiconductor copper alloy line having a self-diffusion suppression function is provided.Type: ApplicationFiled: September 5, 2012Publication date: June 12, 2014Applicant: JX NIPPON MINING & METALS CORPORATIONInventors: Kenichi Nagata, Tomio Otsuki, Takeo Okabe, Nobuhito Makino, Atsushi Fukushima
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Publication number: 20140097084Abstract: Provided is a high-purity copper-manganese-alloy sputtering target comprising 0.05 to 20 wt % of Mn and the remainder being Cu and inevitable impurities. The high-purity copper-manganese-alloy sputtering target is characterized in that the in-plane variation (CV value) in Mn concentration of the target is 3% or less. It is thus possible to form a thin film having excellent uniformity by adding an appropriate amount of a Mn element to copper and reducing the in-plane variation of the sputtering target. In particular, there is provided a high-purity copper-manganese-alloy sputtering target which is useful for improving the yield and the reliability of semiconductor products which are making progress in a degree of refinement and integration.Type: ApplicationFiled: September 6, 2012Publication date: April 10, 2014Applicant: JX NIPPON MINING & METALS CORPORATIONInventors: Kenichi Nagata, Tomio Otsuki, Takeo Okabe, Nobuhito Makino, Atsushi Fukushima
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Publication number: 20130112556Abstract: Provided is a sputtering target and/or a coil disposed at the periphery of a plasma-generating region for confining plasma. The target and/or the coil has a surface to be eroded having a hydrogen content of 500 ?L/cm2 or less. In dealing with reduction in the hydrogen content of the surface of the target and/or the coil, the process of producing the target and/or the coil, in particular, the conditions for heating the surface of the target and/or the coil, which is thought to be cause of hydrogen occlusion, are appropriately regulated. As a result, hydrogen occlusion at the surface of the target can be reduced, and the degree of vacuum during sputtering can be improved. Thus, the present invention provides a target and/or a coil that has a uniform and fine structure, makes plasma stable, and allows a film to be formed with excellent uniformity and provides a method of producing the target and/or the coil.Type: ApplicationFiled: July 27, 2011Publication date: May 9, 2013Applicant: JX NIPPON MINING & METALS CORPORATIONInventors: Kenichi Nagata, Nobuhito Makino
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Patent number: 8406640Abstract: A toner cartridge for an image forming apparatus includes: a toner container; a toner feed port for supplying toner to a developing device; a toner feeding blade structure for feeding the toner from the toner container to the developing device; and a recording chip for recording history information on the toner container. The toner container includes a toner feed motor for rotationally driving the toner feeding blade structure. The recording chip includes a supplied toner quantity totalizer for summing the amounts of toner supplied and a residual toner quantity display controller for displaying the residual toner quantity in the toner container on a display portion of the image forming apparatus.Type: GrantFiled: April 29, 2010Date of Patent: March 26, 2013Assignee: Sharp Kabushiki KaishaInventors: Toshiaki Fujisawa, Kenichi Nagata