Abstract: Disclosed are an X-ray target having a micro focus size and capable of producing X-rays of high intensity, and apparatuses using such an X-ray target. The X-ray target (1) has a structure in which a first cap layer (21), a target layer (22), and a second cap layer (23) are successively laminated, wherein the first and second cap layers (21 and 23) are each composed of a material which is lower in electron beam absorptivity than that of which the target layer (22) is composed. An X-ray generator using the X-ray target (1) can generate highly intense and nanofocus (several nm) X-rays (17). Using the X-ray generator, an X-ray microscope allows obtaining a high resolution transmission image, an X-ray diffraction apparatus allows obtaining an X-ray diffraction image of a very small area, and a fluorescent X-ray analysis apparatus allows making the fluorescent X-ray analysis of a minute area.

Abstract: Disclosed are an X-ray target having a micro focus size and capable of producing X-rays of high intensity, and apparatuses using such an X-ray target. The X-ray target (1) has a structure in which a first cap layer (21), a target layer (22), and a second cap layer (23) are successively laminated, wherein the first and second cap layers (21and 23) are each composed of a material which is lower in electron beam absorptivity than that of which the target layer (22) is composed. An X-ray generator using the X-ray target (1) can generate highly intense and nanofocus (several nm) X-rays (17). Using the X-ray generator, an X-ray microscope allows obtaining a high resolution transmission image, an X-ray diffraction apparatus allows obtaining an X-ray diffraction image of a very small area, and a fluorescent X-ray analysis apparatus allows making the fluorescent X-ray analysis of a minute area.