Abstract: According to one embodiment, a film forming system includes: a stage including a placement surface on which an object to be coated is placed; a rotating mechanism rotating the stage in a rotational direction along the placement surface; an application nozzle discharging a material onto the object placed on the stage for application; a moving mechanism relatively moving the stage and the application nozzle along the placement surface in a cross direction crossing the rotational direction; a controller performing a control to rotate the stage on which the object is placed through the rotating mechanism while relatively moving the stage and application nozzle along the placement surface in the cross direction through the moving mechanism and applying the material to the object on the stage through the application nozzle; and a cleaning apparatus cleaning the application nozzle.

Abstract: According to one embodiment, a nozzle cleaning unit includes: a cleaning nozzle unit; a gas supply unit; and a regulator. The cleaning nozzle unit has a first ejection hole that opens in a ring shape to an inner wall surface of an insertion part into which the nozzle is inserted. The gas supply unit supplies gas to the first ejection hole. The regulator reduces a pressure of an atmosphere of the insertion part on a side opposite a side in which the nozzle is inserted, sandwiching a position where the first ejection hole is provided.

Abstract: According to one embodiment, a film forming apparatus includes: a stage on which a coating object is placed; a rotation mechanism rotating the stage; an application nozzle supplying a coating material to the coating object; an application moving mechanism moving the application nozzle; a controller which controls the rotation mechanism and application moving mechanism to rotate the stage and move the application nozzle between the rotation center and the outer edge and controls the application nozzle to apply the coating material to the coating object; and a sound wave generator which generates a sound wave. The film forming apparatus projects the sound wave onto the surface of the coating film.

Abstract: According one embodiment, a film forming apparatus includes a stage, a coating section, a vapor supply section, a blower section, and a controller. On the stage, an coating target is placed. The coating section applies a material to a predetermined region on the coating target placed on the stage to form a coating film. The vapor supply section generates solvent vapor capable of dissolving the coating film. The blower section blows the solvent vapor generated by the vapor supply section onto the coating film on the coating target placed on the stage. The controller controls an amount of the solvent vapor to be blown by the blower section so that: the coating film is dissolved; viscosity in a part of the coating film on a surface layer side is lower than that in a part thereof on the coating target side; and the viscosity in the part on the surface layer side and the viscosity of the coating target side take such values that prevent the coating film on the coating target from spreading.

Abstract: According to one embodiment, a coating apparatus includes a stage having a mounting surface on which a coating target is mounted, a rotating mechanism that rotates the stage, a coating nozzle that discharges a coating material, a moving mechanism that moves the coating nozzle, a supply device that supplies a material to the coating nozzle, an ejection device that ejects the material, a communication tube that allows the supply device, and a valve device. Further, the coating apparatus includes a control unit which rotates the stage by the rotating mechanism, switches the valve device to achieve the continuity of the supply unit and the coating nozzle, drives the moving mechanism to move the coating nozzle, and applies the coating material to the coating target on the stage.

Abstract: According to one embodiment, a coating apparatus includes, a stage which supports an object of coating, and a coating head integrally includes a material discharge unit, which is movable relative to the stage and configured to discharge a coating material to the object of coating on the stage, and a gas injection unit, which, along with the material discharge unit, is movable relative to the stage and configured to inject a gas to the object of coating on the stage.

Abstract: According to one embodiment, a spiral coating apparatus includes a stage, a rotation mechanism, a coating nozzle, a movement mechanical unit, a nozzle position detection unit, and a position adjustment unit. The movement mechanical unit enables the stage and the coating nozzle to relatively move across the rotational direction and in the direction of the axis of the rotation. The nozzle position detection unit is configured to acquire positional data on a bottom surface of the coating nozzle in the direction of the axis of the rotation. The position adjustment unit adjusts the positions of the coating nozzle and the surface in the direction of the axis.

Abstract: According to one embodiment, a film forming apparatus includes: a stage on which a coating object is placed; a rotation mechanism rotating the stage; an application nozzle supplying a coating material to the coating object; an application moving mechanism moving the application nozzle; a controller which controls the rotation mechanism and application moving mechanism to rotate the stage and move the application nozzle between the rotation center and the outer edge and controls the application nozzle to apply the coating material to the coating object; and a sound wave generator which generates a sound wave. The film forming apparatus projects the sound wave onto the surface of the coating film.

Abstract: A cylindrical coating nozzle having a flattened end is placed above a coating object being rotated. A coating solution is applied to a surface of the coating object by discharging the coating solution form a nozzle orifice at an end of the coating nozzle while moving the coating nozzle relative to the coating object in a direction intersecting a rotational direction of the coating object. The coating nozzle is formed with an angled notch at a part of the end thereof. A rotation control unit controls the rotation of the coating nozzle in a manner that the notch of the coating nozzle is positioned upstream from a position to feed the coating solution to the coating object being rotated.

Abstract: According one embodiment, a film forming apparatus includes a stage, a coating section, a vapor supply section, a blower section, and a controller. On the stage, an coating target is placed. The coating section applies a material to a predetermined region on the coating target placed on the stage to form a coating film. The vapor supply section generates solvent vapor capable of dissolving the coating film. The blower section blows the solvent vapor generated by the vapor supply section onto the coating film on the coating target placed on the stage. The controller controls an amount of the solvent vapor to be blown by the blower section so that: the coating film is dissolved; viscosity in a part of the coating film on a surface layer side is lower than that in a part thereof on the coating target side; and the viscosity in the part on the surface layer side and the viscosity of the coating target side take such values that prevent the coating film on the coating target from spreading.

Abstract: According to one embodiment, a film forming system includes: a stage including a placement surface on which an object to be coated is placed; a rotating mechanism rotating the stage in a rotational direction along the placement surface; an application nozzle discharging a material onto the object placed on the stage for application; a moving mechanism relatively moving the stage and the application nozzle along the placement surface in a cross direction crossing the rotational direction; a controller performing a control to rotate the stage on which the object is placed through the rotating mechanism while relatively moving the stage and application nozzle along the placement surface in the cross direction through the moving mechanism and applying the material to the object on the stage through the application nozzle; and a cleaning apparatus cleaning the application nozzle.

Abstract: A liquid circulation unit adapted to be provided in a liquid circulation apparatus to circulate a liquid, including, a first liquid storage unit to store the liquid, a sensor to detect a fluid level of the liquid stored in the first liquid storage unit, a liquid sending pump to send the liquid to an outside from the first liquid storage unit based on a detection result of the sensor, a pipe arrangement for deaeration to remove a dissolved gas in the liquid sent from the liquid sending pump, a filter to remove an impurity in the liquid sent from the liquid sending pump, a diaphragm valve which opens when the liquid is sent to the outside from the first liquid storage unit, and a cock valve which opens when the liquid is sent to the first liquid storage unit from the outside, wherein the liquid circulation unit is adapted to be provided so as to be detachable to or from the liquid circulation apparatus.

Abstract: A droplet jet inspecting device includes an image pickup part taking an image of an inspection area including an area where a droplet jetted from a droplet jetting head jetting the droplet through a nozzle and a unit configured to process the image of the inspection area taken by the image pickup part and further judge a presence of a satellite droplet which is smaller than a main droplet forming the droplet and which is incidental to the main droplet.

Abstract: A droplet jet inspecting device includes an image pickup part taking an image of an inspection area including an area where a droplet jetted from a droplet jetting head jetting the droplet through a nozzle and a unit configured to process the image of the inspection area taken by the image pickup part and further judge a presence of a satellite droplet which is smaller than a main droplet forming the droplet and which is incidental to the main droplet.

Abstract: An ink-jet head. A first plate has a back face and contains an aperture to discharge an ink. A second plate having a top face and a back face, contains a first ink channel penetrating the second plate and communicating with the aperture. The top face of the second plate is detachably contacted with the back face of the first plate. A diaphragm plate having a top face and a back face, is detachably mounted in contact with the back face of the second plate. A piezoelectric element is attached to the back face of the diaphragm plate and operable upon energization to change a volume of the first ink channel.