Patents by Inventor Kenichi Togawa

Kenichi Togawa has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Rotary machining apparatus
    Patent number: 6336842
    Abstract: An object of the present invention is to provide a polishing apparatus which is capable of configuring a surface of a polishing tool without damaging the polishing tool. In order to solve the above-mentioned problem, the present invention provide a rotary machining apparatus comprising a polishing tool for polishing a sample; a rotary disk for holding the polishing tool; a tool for configuring a surface of the polishing tool; and a position adjusting mechanism for adjusting a gap between the tool and the polishing tool, which comprises a rotating mechanism for rotating the tool; and a sensor for sensing a change in the rotation of the rotating mechanism, a height at starting to configure the polishing tool using the tool being determined based on the change in the rotation obtained by the sensor.
    Type: Grant
    Filed: May 19, 2000
    Date of Patent: January 8, 2002
    Assignee: Hitachi, Ltd.
    Inventors: Shigeo Ootsuki, Shigeo Moriyama, Takashi Kugaya, Kenichi Togawa, Makoto Kajiwara, Shyuichi Oowada, Yukio Suzuki, Yoko Sugawa