Patents by Inventor Kenichi UKI

Kenichi UKI has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Substrate processing method and ionic liquid
    Patent number: 12011738
    Abstract: A substrate processing method includes forming a film of an ionic liquid on a surface of a substrate, on which a pattern is formed, by supplying the ionic liquid to the surface of the substrate, wherein the ionic liquid has a cation containing a hydrocarbon chain having six or more carbon atoms, and wherein at least one hydrogen atom in the hydrocarbon chain is substituted with a fluorine atom.
    Type: Grant
    Filed: January 12, 2023
    Date of Patent: June 18, 2024
    Assignee: TOKYO ELECTRON LIMITED
    Inventors: Takeo Nakano, Hirokazu Ueda, Mitsuaki Iwashita, Naoki Umeshita, Ryuichi Asako, Kenichi Uki
  • SUBSTRATE PROCESSING METHOD AND IONIC LIQUID
    Publication number: 20230226571
    Abstract: A substrate processing method includes forming a film of an ionic liquid on a surface of a substrate, on which a pattern is formed, by supplying the ionic liquid to the surface of the substrate, wherein the ionic liquid has a cation containing a hydrocarbon chain having six or more carbon atoms, and wherein at least one hydrogen atom in the hydrocarbon chain is substituted with a fluorine atom.
    Type: Application
    Filed: January 12, 2023
    Publication date: July 20, 2023
    Inventors: Takeo NAKANO, Hirokazu UEDA, Mitsuaki IWASHITA, Naoki UMESHITA, Ryuichi ASAKO, Kenichi UKI