Abstract: An optical inspection unit inspects a surface of an object under inspection optically. A processing unit detects defects on the surface of the object under inspection and their features according to inspection results from the optical inspection unit, detects positions of the detected defects on the surface of the object under inspection, and classifies the detected defects according to their features. The processing unit selects the defects, on which a X-ray analysis should be performed, according to predetermined conditions about the features or the classification results of the defects. Alternatively, the processing unit displays the positions and the classification results of the defects, and an operator picks the defects, on which the X-ray analysis should be performed. A X-ray inspection unit performs the X-ray analyses on the selected or picked defects.

Abstract: An optical inspection unit inspects a surface of an object under inspection optically. A processing unit detects defects on the surface of the object under inspection and their features according to inspection results from the optical inspection unit, detects positions of the detected defects on the surface of the object under inspection, and classifies the detected defects according to their features. The processing unit selects the defects, on which a X-ray analysis should be performed, according to predetermined conditions about the features or the classification results of the defects. Or the processing unit displays the positions and the classification results of the defects, and an operator picks the defects, on which the X-ray analysis should be performed. A X-ray inspection unit performs the X-ray analyses on the selected or picked defects.

Abstract: Interference light occurring between a first laser light of a reference phase and a second laser light of a measuring phase is divided via a light divider into two interference light beams to be directed in two directions. One of the divided interference light beams is received by a polarizing light separator, which separates components of the first and second laser lights from the received interference light beam. First and second light detectors convert respective light energy of the separated components into corresponding electric signals. Adder adds together the converted electric signals. Third light detector converts light energy of the other divided interference light beam into an electric signal. Comparator compares the electric signal from the third light detector with the output of the adder as a reference value, to generate a detection output of a predetermined phase.