Abstract: It is aimed to provide a probe card test system and a relay driving test method for probe cards which can automatically and continuously perform tests without bringing needle tips into contact with a number of relays mounted on a probe card and by using a device. In a probe card test system for testing a probe card using a tester, the probe card includes a substrate having a first probe and a first relay connected to the first probe, a relay controller for the first relay and a first measurement channel for connecting the first relay and the first probe to the tester are further provided on the substrate. The tester includes a DC power supply, a control board for controlling the relay controller for the first relay, and a first measurement circuit connected to the first measurement channel, the DC power supply and a voltmeter. The first measurement circuit includes a first resistor having a predetermined time constant and a first changeover switch to be connected to the first measurement channel.

Abstract: It is aimed to provide a semiconductor test system and a relay driving test method therefor which can automatically and continuously perform tests without bringing needle tips into contact with a number of relays mounted on a probe card and by using a device. In a semiconductor test system with a probe card and a tester, the probe card includes a substrate having a probe and a relay connected to the probe, a relay controller for the relay and a first measurement channel for connecting the relay and the probe to the tester are further provided on the substrate. The tester includes a DC power supply, a control board for controlling the relay controller, and a first circuit connected to the first measurement channel, the DC power supply and a voltmeter. The first measurement circuit includes a first resistor having a predetermined time constant and a first changeover switch to be connected to measurement channel.