Abstract: A combined weighing system 1 includes a first X-ray inspection device 20, a combined weighing device 40, a bag making and packaging device 50, a weight inspection device 60, a second X-ray inspection device 70, and a management device 90 that manages each device. The management device 90 revises a weight conversion table of the first X-ray inspection device 20 and a correction value of the combined weighing device 40 based on an average value of weights of products B, which is calculated from a result of inspection over a certain time period in the weight inspection device 60.

Abstract: A vacuum processing apparatus of the present invention is a vacuum processing apparatus which performs plasma processing. The vacuum processing apparatus includes an electrode flange, a shower plate, an insulating shield, a processing chamber in which a processing-target substrate is to be disposed, an electrode frame, and a slide plate. The electrode frame and the slide plate are slidable in response to thermal deformation that occurs when a temperature of the shower plate is raised or lowered. The shower plate is supported by the electrode frame using a support member penetrating through an elongated hole. The elongated hole is formed so that the support member is relatively movable in the elongated hole in response to thermal deformation that occurs when a temperature of the shower plate is raised or lowered.

Abstract: A vacuum processing apparatus of the present invention is a vacuum processing apparatus which performs plasma processing. The vacuum processing apparatus includes an electrode flange, a shower plate, an insulating shield, a processing chamber in which a processing-target substrate is to be disposed, an electrode frame, and a slide plate. The electrode frame and the slide plate are slidable in response to thermal deformation that occurs when a temperature of the shower plate is raised or lowered. The shower plate is supported by the electrode frame using a support member penetrating through an elongated hole. The elongated hole is formed so that the support member is relatively movable in the elongated hole in response to thermal deformation that occurs when a temperature of the shower plate is raised or lowered.

Abstract: A vacuum processing apparatus of the present is a vacuum processing apparatus which performs plasma processing. The vacuum processing apparatus includes an electrode flange, a shower plate, an insulating shield, a processing chamber in which a processing-target substrate is to be disposed, an electrode frame, and a slide plate. The electrode frame and the slide plate are slidable in response to thermal deformation that occurs when a temperature of the shower plate is raised or lowered, and a space surrounded by the shower plate, the electrode flange, and the electrode frame is sealable. The electrode frame includes a frame-shaped upper plate surface portion, a vertical plate surface portion, and a lower plate surface portion.

Abstract: A vacuum processing apparatus is a vacuum processing apparatus which performs plasma processing and includes an electrode flange, a shower plate, a processing chamber, and a support shaft. The shower plate is provided with a plurality of gas flow paths that are formed therein, and a shaft gas flow path extending in an axial direction of the support shaft is provided at a portion in which the support shaft is connected to the shower plate so that the conductance does not change in an in-plane direction of the shower plate.

Abstract: A lift pin of the invention is to be in contact with a substrate having a process-target surface and a non-processed surface, and the lift pin includes: a center member that has a first surface having first surface roughness and including an electrical insulator, and a main body serving as an electroconductive member, and that faces the non-processed surface of the substrate; and a surrounding member that has a second surface having second surface roughness lower than the first surface roughness and including an electrical insulator, that surrounds the periphery of the center member, and that faces the non-processed surface of the substrate.

Abstract: A heater base of the invention includes a plurality of displacement mechanisms that are arranged between the heater and the heater base and are provided on the heater base. Of the displacement mechanisms, three or more displacement mechanisms are capable of displacing the heater with respect to the heater base in a state of being in contact with the heater.

Abstract: An attaching structure for attaching a service-plug for shutting off and conducting an electric circuit of a vehicle to a power source device, comprises a floor panel constituting a bottom wall of a compartment of the vehicle and formed with an opening which faces the compartment; a metal plate disposed outside the vehicle than the floor panel and forming a cavity between the metal plate and the floor metal plate and covering the power source device, and including an attachment portion to which the service-plug is attached and raised toward the opening in the cavity; and a sealing member for keeping the cavity liquid-tight disposed between the floor panel and the metal sheet so as to surround the attachment portion; wherein the service-plug is detachably attached to the attachment portion so as to project toward the compartment through the opening.

Abstract: Abnormal noise at a battery pack busbar module is prevented. A battery pack busbar module includes busbar accommodating portions each accommodate busbars which connect in series batteries, cover portions coupled by hinges to one of side edges of openings in the busbar accommodating portions to cover the openings, and lock portions to lock the cover portions by bringing first engagement portions provided on the other side edges of the busbar accommodating portions and second engagement portions provided on the cover portions into engagement with each other, and ribs projecting from the cover portions to come into abutment with the busbar accommodating portions are formed in positions spaced away from the lock portions, a height of the ribs being set such that the second engagement portions are not brought into engagement with the first engagement portions when the ribs abut the busbar accommodating portions.

Abstract: An attaching structure for attaching a service-plug for shutting off and conducting an electric circuit of a vehicle to a power source device, comprises a floor panel constituting a bottom wall of a compartment of the vehicle and formed with an opening which faces the compartment; a metal plate disposed outside the vehicle than the floor panel and forming a cavity between the metal plate and the floor metal plate and covering the power source device, and including an attachment portion to which the service-plug is attached and raised toward the opening in the cavity; and a sealing member for keeping the cavity liquid-tight disposed between the floor panel and the metal sheet so as to surround the attachment portion; wherein the service-plug is detachably attached to the attachment portion so as to project toward the compartment through the opening.

Abstract: The mounting structure of a power device is simplified so as to reduce cost while achieving improvements in heat dissipation and reliability. A power module 100 is comprised of a metal wiring board 13, a power device 11 disposed on an upper surface of the metal wiring board 13 via a solder layer 12, a metal heat dissipating plate 15 disposed on a lower surface of the metal wiring board 13, and a heat sink 19 disposed on a lower surface of the metal heat dissipating plate 15. A resin-based insulating layer 14 is disposed between any desired two of the aforementioned layers.