Patents by Inventor Kenji Etoh

Kenji Etoh has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Substrate processing apparatus
    Patent number: 6485604
    Abstract: A substrate processing apparatus that includes an outer tank, an inner tank, and opposed electrodes. The inner tank is provided in the outer tank and the opposed electrodes are provided in the inner tank. A distance between the opposed electrodes can be changed in a state in which the inner tank can completely confine plasma therein. The inner tank includes first and second inner tank constituent members, and the state in which the inner tank can completely confine plasma therein is established by superposing a side wall of the second inner tank constituent member on a side wall of the first inner tank constituent member.
    Type: Grant
    Filed: September 7, 1999
    Date of Patent: November 26, 2002
    Assignee: Kokusai Electric Co., Ltd.
    Inventors: Satohiro Okayama, Kenji Etoh