Abstract: A radio-frequency power supply (1) and a matching box (2) are electrically connected with a coaxial cable (4) while the matching box (2) and a main unit (3) are electrically connected with a coaxial cable (5). Around the coaxial cable (5), a radio-frequency current transformer (6) is provided and an output signal from the radio-frequency current transformer (6) is given to an oscilloscope (7). In an apparatus using the radio-frequency power supply, with this constitution, a method for measuring a radio-frequency current can be provided, by which spurious components and frequency variation of the radio-frequency current can be measured simply and precisely at a low cost, without changing a series of communication paths, such as the coaxial cable, for the radio-frequency current.

Abstract: The interior of a chamber within which a target assembly is disposed is evacuated to remove residual impurity gases while heated water flows within the target assembly. When the internal pressure within the chamber drops belows a predetermined level, cooled water flows within the target assembly, and a film is formed on a semiconductor substrate placed within the chamber as the target assembly is being cooled by the cooled water. Gases contained in the ambient atmosphere around the chamber are prevented from being introduced into the chamber when the interior of the chamber is opened. It is also possible to prevent any condensation of vapor on the target assembly.