Abstract: When a pattern is transferred via a projection optical system, a size of an image of the pattern varies depending on a defocus amount of a transferring position from the best focus position, and a flucuation curve showing the variation (the so-called CD-focus curve) varies depending on wavefront aberration of the projection optical system. There is a close relation between a linear combination value of a plurality of terms that each have a coefficient (an aberration component) of a plurality of Zernike terms (aberration component terms) into which the wavefront aberration of the projection optical system is decomposed using a Zernike polynomial in series expansion, and the variation of the flucuation curve.

Abstract: A differential gear apparatus according to the present invention comprises a first sun gear coupled to a first shaft to be rotated in conjunction with the first shaft, a second sun gear coupled to a second shaft to be rotated in conjunction with the second shaft, a first planetary gear meshed with the first sun gear, a second planetary gear rotated with the first planetary gear and meshed with the second sun gear, a carrier supporting the first and second planetary gears, and a housing supporting the second shaft upon rotation, wherein the sun gears and the planetary gears have profile shifted teeth of which addendum modifications are different at the positions in a flank width direction and a nut screwed on the mid way of the second shaft, and a through hole disposed at a position facing the nut are provided.

Abstract: Wavefront aberration of a projection optical system is measured and information on the wavefront aberration is obtained (step 102). Furthermore, a pattern of a reticle is transferred onto a wafer via a projection optical system (steps 104 to 108). Then, the waver on which the pattern is transferred is developed, and line width measurement is performed on the resist image formed on the wafer and line width difference of images of a first line pattern extending in a predetermined direction and a second line pattern that is orthogonal to the first line pattern is measured (steps 112 to 118). And, according to a value of the 12th term of the Zernike polynomial, which is an expansion of the wavefront aberration, and the line width difference, the projection optical system is adjusted so that magnitude of the 9th term (a low order spherical aberration term) is controlled (steps 120 to 124).

Abstract: A magnesium alloy and a die casting produced from the alloy include an AZ91-based magnesium alloy including 6.0 to 11.0 percent by weight of aluminum, 0.1 to 2.5 percent by weight of zinc, 0.1 to 0.5 percent by weight of manganese, and strontium and at least one of calcium and antimony added in an amount sufficient to act as a grain refining agent.

Abstract: In a normal state, a reaction force actuator (20) applies an operation reaction force to an steering member (2) through a planetary gear mechanism (6). When failure occurs in a steering actuator (12), the reaction force actuator (20) is turned off, and a plunger (13) locks the rotation of one element (18) which is connected to the reaction force actuator (20), in the planetary gear mechanism (6). In turn, a manual steering mode is set up in which a rotation of the steering member (2) is transmitted to a pinion gear (14) at a transmission ratio of the carrier (16) holding planetary gears (17) and a sun gear (15).

Abstract: It is an object to provide a product having a good crystal particle size distribution of a high-purity potassium fluorotantalate crystal or a high-purity potassium fluoroniobate crystal without using a physical method for particle classification. To that end, a method for manufacturing a high-purity potassium fluorotantalate crystal or a high-purity potassium fluoroniobate crystal is used, wherein the recrystallizing step comprising a first cooling process of cooling a saturated solution with a temperature of 60° C. to 90° C. obtained in the dissolving step at a cooling speed of T° C./hour until the solution temperature of the saturated solution becomes a temperature of the range of 35 to 50° C., and a second cooling process of cooling the solution at a cooling speed of [T?18]° C./hour to [T?1]° C./hour from the end of the first cooling process to the solution temperature becoming a temperature of 10 to 20° C.

Abstract: Wavefront aberration of a projection optical system is measured and information on the wavefront aberration is obtained (step 102). Furthermore, a pattern of a reticle is transferred onto a wafer via a projection optical system (steps 104 to 108). Then, the waver on which the pattern is transferred is developed, and line width measurement is performed on the resist image formed on the wafer and line width difference of images of a first line pattern extending in a predetermined direction and a second line pattern that is orthogonal to the first line pattern is measured (steps 112 to 118). And, according to a value of the 12th term of the Zernike polynomial, which is an expansion of the wavefront aberration, and the line width difference, the projection optical system is adjusted so that magnitude of the 9th term (a low order spherical aberration term) is controlled (steps 120 to 124).

Abstract: Disclosed herein is a method for producing potassium fluorotantalate crystals, comprising heating, to 60° C. or higher, a starting solution prepared by adding hydrofluoric acid and hydrochloric acid, and, if necessary, water to a highly pure tantalum solution, adding potassium chloride to this starting solution, and cooling the mixture to 40° C. or lower at a cooling rate of less than 15° C./h to precipitate potassium fluorotantalate crystals, wherein the concentration of the hydrofluoric acid in the starting solution is not more than 20% by weight. By this method, highly pure, large-sized potassium fluorotantalate crystals can successfully be obtained in high yield. Moreover, disadvantages to equipment and operation in the prior art can be overcome to a significant extent with this method.

Abstract: In a vehicle steering apparatus, a steering actuator is controlled so that the steering angle varies in accordance with the operation of an operating member. A transmission mechanism connects an operating side rotating member that is mechanically connected to the operating member and a vehicle wheel side rotating member that is mechanically connected to the vehicle wheels so that the mutual transmission of rotation is possible. Furthermore, the rotational transmission ratio between the operating side rotating member and the vehicle wheel side rotating member can be varied.

Abstract: In a normal state, a reaction force actuator (20) applies an operation reaction force to an steering member (2) through a planetary gear mechanism (6). When failure occurs in a steering actuator (12), the reaction force actuator (20) is turned off, and a plunger (13) locks the rotation of one element (18) which is connected to the reaction force actuator (20), in the planetary gear mechanism (6). In turn, a manual steering mode is set up in which a rotation of the steering member (2) is transmitted to a pinion gear (14) at a transmission ratio of the carrier (16) holding planetary gears (17) and a sun gear (15).

Abstract: The present invention provides high-quality tantalum oxide or niobium oxide powders with more stable quality. These high-quality tantalum oxide or niobium oxide powders have an extremely high lightness of color, having an L* value from 97 to 100 both inclusive in the L*a*b* color system. These powders contain a small amount of impurities and have a stable form of pentoxide. To produce the above described tantalum oxide or niobium oxide powders having an extremely high lightness of color, oxygen is sufficiently supplied to a roasted product in a roasting step and a subsequent high-temperature step which are both carried out during their production process.

Abstract: In a vehicle steering apparatus, a steering actuator is controlled so that the steering angle varies in accordance with the operation of an operating member. A transmission mechanism connects an operating side rotating member that is mechanically connected to the operating member and a vehicle wheel side rotating member that is mechanically connected to the vehicle wheels so that the mutual transmission of rotation is possible. Furthermore, the rotational transmission ratio between the operating side rotating member and the vehicle wheel side rotating member can be varied.

Abstract: A method of manufacturing products, which have complex and accurate shape and exhibit high reliability of properties and enough corrosion resistance, at sufficiently high yield by employing a combination of casting and forging for forming magnesium alloy of which composition allows casting and which is excellent in forgeability. A magnesium alloy containing 2-10 mass % aluminum is cast to have crystal grain size not greater than 30 &mgr;m. After the cast semifinished product is subjected to solution treatment, the semifinished product is forged to have crystal grain size not greater than 10 &mgr;m and is then further forged to have a desired shape. A magnesium alloy containing 2-10 mass % aluminum is cast to have crystal grain size not greater than 10 &mgr;m and the cast semifinished product is forged after solution treatment.

Abstract: It is an object to provide a product having a good crystal particle size distribution of a high-purity potassium fluorotantalate crystal or a high-purity potassium fluoroniobate crystal without using a physical method for particle classification. To that end, a method for manufacturing a high-purity potassium fluorotantalate crystal or a high-purity potassium fluoroniobate crystal is used, wherein the recrystallizing step comprising a first cooling process of cooling a saturated solution with a temperature of 60° C. to 90° C. obtained in the dissolving step at a cooling speed of T° C./hour until the solution temperature of the saturated solution becomes a temperature of the range of 35 to 50° C., and a second cooling process of cooling the solution at a cooling speed of [T-18]° C./hour to [T-1]° C./hour from the end of the first cooling process to the solution temperature becoming a temperature of 10 to 20° C.

Abstract: In a working engine including a bearing mounted on an outer wall of a crankcase for carrying a crankshaft, an oil seal mounted on the outer wall of a crankcase and disposed outside and adjacent the bearing, and a cooling fan which is attached to an outer end of the crankshaft adjacent the oil seal with its blades turned toward the crankcase and which has blades protruding toward the crankcase, a cylindrical protective tube is formed on an outer sidewall of the crankcase to cover ends of bosses of the cooling fan, and a foreign matter-beating piece is formed on the cooling fan 16 in proximity to an outer peripheral surface of the protective tube. Thus, even if a long foreign matter drawn in by the cooling fan such as a weed and the like has been entangled around the crankshaft, it can be beaten and loosened, or cut by the foreign matter-beating piece rotated along with the cooling fan.

Abstract: Disclosed herein is a method for producing potassium fluorotantalate crystals, comprising heating, to 60° C. or higher, a starting solution prepared by adding hydrofluoric acid and hydrochloric acid, and, if necessary, water to a highly pure tantalum solution, adding potassium chloride to this starting solution, and cooling the mixture to 40° C. or lower at a cooling rate of less than 15° C./h to precipitate potassium fluorotantalate crystals, wherein the concentration of the hydrofluoric acid in the starting solution is not more than 20% by weight. By this method, highly pure, large-sized potassium fluorotantalate crystals can successfully be obtained in high yield. Moreover, disadvantages to equipment and operation in the prior art can be overcome to a significant extent with this method.

Abstract: In a working engine including a bearing mounted on an outer wall of a crankcase for carrying a crankshaft, an oil seal mounted on the outer wall of a crankcase and disposed outside and adjacent the bearing, and a cooling fan which is attached to an outer end of the crankshaft adjacent the oil seal with its blades turned toward the crankcase and which has blades protruding toward the crankcase, a cylindrical protective tube is formed on an outer sidewall of the crankcase to cover ends of bosses of the cooling fan, and a foreign matter-beating piece is formed on the cooling fan 16 in proximity to an outer peripheral surface of the protective tube. Thus, even if a long foreign matter drawn in by the cooling fan such as a weed and the like has been entangled around the crankshaft, it can be beaten and loosened, or cut by the foreign matter-beating piece rotated along with the cooling fan.

Abstract: An aluminum alloy having a composition represented by the general formula: AlbalCuaMb or AlbalCuaMbTMc wherein M represents one or two elements selected between Mn and Cr; TM represents at least one element selected from the group consisting of Ti, Zr, V, Fe, Co, and Ni; and a, b and c each represent an atomic percentage of 0<a≦3, 2<b ≦5, and 0<c≦2, containing quasi-crystals in the structure thereof, and having an elongation of at least 10% at room temperature and a Young's modulus of at least 85 GPa. The aluminum alloy exhibits excellent mechanical properties such as high-temperature strength, ductility, impact strength and tensile strength and is provided as a rapidly-solidified material, a heat-treated material obtained by heat-treating the rapidly-solidified material, or a consolidated and compacted material obtained by consolidating and compacting the rapidly-solidified material.

Abstract: A threaded fastener lighter in weight and easier to produce is made by the moderate temperature-forging, from a raw magnesium material that contains microcrystals whose diameter is about 100 &mgr;m or less. The raw material may be pure magnesium of industrial grade in one case, and alternatively be any magnesium alloy or such a composition as comprising as its matrix the alloy or pure magnesium, in the other cases. The raw material has a superplastic property and a fine-granulated metallographic internal texture, and when making the fastener, will be heated to 250-400° C. at which superplasticity takes place to facilitate the forging to form the fastener. A method proposed in the invention to make the fastener is thus such that the number of necessary processing steps is reduced and manufacture cost is lowered.

Abstract: An aluminum alloy having a composition represented by the general formula: