Abstract: An ozone processing apparatus for a semiconductor processing system includes an ozone generating unit and a reforming processing unit connected to each other through a connection piping section. The ozone generating unit includes an ozone generator and a pressure regulator connected to each other through a piping line. The connection piping section has a double-pipe structure consisting of an inner pipe and an outer pipe. The piping line and the inner pipe are made of a fluorocarbon resin. A branch line branches from the middle of the piping line, and is connected to a factory exhaust passageway. The branch line is provided with a flowmeter and an ozone densitometer. A controller is arranged to control the ozone generator with reference to the value of ozone concentration measured by the densitometer.

Abstract: An ozone processing apparatus for a semiconductor processing system includes an ozone generating unit and a reforming processing unit connected to each other through a connection piping section. The ozone generating unit includes an ozone generator and a pressure regulator connected to each other through a piping line. The connection piping section has a double-pipe structure consisting of an inner pipe and an outer pipe. The piping line and the inner pipe are made of a fluorocarbon resin. A branch line branches from the middle of the piping line, and is connected to a factory exhaust passageway. The branch line is provided with a flowmeter and an ozone densitometer. A controller is arranged to control the ozone generator with reference to the value of ozone concentration measured by the densitometer.

Abstract: The present invention relates to a bonded assembly characterized in that a board having a convexed portion on a jointing surface thereof and a board having, on a jointing surface thereof, a concaved portion or a through hole to be engaged with the convexed portion are jointed with adhesives. Also, the present invention relates to a bonded assembly characterized in that an adhesive is coated on the portion other than the convexed portion of the board so that the coating thickness is smaller than the height of the convexed portion, and then the board is jointed to another board having a concaved portion or a through hole, after making alignment of the boards. Further, the present invention relates to a rivet having means for fitting to and temporarily fixing to an inserting through hole, and a method of jointing boards which comprises a step for inserting, fitting and temporarily fixing the rivet having the means for temporarily fixing to the inserting through hole on the board.

Abstract: In a vertical substrate processing apparatus including a vertical reaction vessel having an open lower end, a lid closing the open lower end of the reaction vessel, a rotation shaft extending through the lid to rotate a wafer boat in the reaction vessel, a bore formed in a casing disposed below the lid to receive the rotation shaft is sealed hermetically by a magnetic sealing unit, the leakage of a gas emanated from magnetic fluid of the magnetic sealing unit into the reaction vessel is suppressed during a LPCVD process and, if the vertical processing apparatus is used for both a LPCVD process and an oxidation process, the corrosion of the components of a rotating mechanism by HCl gas is prevented. To achieve such functions, the bore is evacuated through an exhaust passage opening in to the bore at a position on the side of the reaction vessel with respect to the magnetic sealing unit. The deposition of reaction byproducts on rotating members can be prevented by supplying an inert gas, such as N.sub.

Abstract: The present invention relates to a bonded assembly characterized in that a board having a convexed portion on a jointing surface thereof and a board having, on a jointing surface thereof, a concaved portion or a through hole to be engaged with the convexed portion are jointed with adhesives. Also, the present invention relates to a bonded assembly characterized in that an adhesive is coated on the portion other than the convexed portion of the board so that the coating thickness is smaller than the height of the convexed portion, and then the board is jointed to another board having a concaved portion or a through hole, after making alignment of the boards. Further, the present invention relates to a rivet having means for fitting to and temporarily fixing to an inserting through hole, and a method of jointing boards which comprises a step for inserting, fitting and temporarily fixing the rivet having the means for temporarily fixing to the inserting through hole on the board.

Abstract: Motorcycles having front and rear swing arm assemblies as the suspension members therefor are employed with lower frame structures incorporating the power unit as a structural element thereof. The lower frame structures are shown to include brackets mounted to the power unit itself, separate loop frame members and an under channel member. Upper frames are shown to be associated with the lower frames. The upper frames do not support the suspension systems but do support motorcycle equipment such a fuel tanks, air cleaners and the like.

Abstract: A motorcycle having a swing-arm front suspension mechanism includes front and rear wheels, an engine disposed between the front and rear wheels and having an engine block, a front wheel steering knuckle disposed on one side of the front wheel and by which an axle of the front wheel is rotatably supported, an upper swing arm having a front end pivotally coupled to the knuckle and a rear end pivotally coupled to an upper portion of the engine block, the upper swing arm extending between the knuckle and the engine block, a lower swing arm having a front end pivotally coupled to the knuckle and at least one rear end pivotally coupled to a lower portion of the engine block, the lower swing arm extending between the knuckle and the engine block, and a damper having an upper end pivotally coupled to the engine block intermediate between two positions where the rear ends of the upper and lower swing arms are pivotally coupled to the engine block, and a lower end pivotally coupled to a base of the lower swing arm.

Abstract: A front wheel supporting member comprises a steering handle, a member supporting a single front wheel, an arm which supports the front wheel supporting member on a motor vehicle body, and a link assembly by which the steering handle and the front wheel supporting member are angularly movable coupled to each other. The link assembly includes a first universal joint operatively coupled to the steering handle and a second universal joint operatively coupled to the front wheel supporting member. The second universal joint has a center on the axis of angular movement of the front wheel supporting member.

Abstract: A motorcycle [1; 101; 201] includes an engine unit [2] disposed centrally in the motorcycle [1; 101; 201], front swing arms [14, 18] having rear ends operatively connected to the engine unit [2] for vertical swinging movement, with a steering arm [26] which supports a front wheel [15] being attached to the front ends of the front swing arms [14, 18], and a rear swing arm [33] supporting a rear wheel [34] on a rear end thereof and having a front end operatively connected to the engine unit [2[ for vertical swinging movement. The motorcycle [1; 101; 201] further includes a front subframe [5; 205] detachably mounted on a front portion of the engine unit [2], the rear ends of the front swing arms [14, 18] being pivotally coupled to the front subframe for vertical swinging movement. The motorcycle [101] further includes a support frame [110] attached to the front subframe [5] and supporting a steering post [8], the support frame [110] having an air cleaner case [113].

Abstract: According to progress of a vehicle, a pump is actuated to feed fluid into a brake pipe. The discharge of the pump is generally proportioned to vehicle speed. On the other hand, the fluid within the brake pipe is relieved to an upper stream side of the pump at a predetermined flow rate regulated by an orifice. Accordingly, when the flow rate of the fluid fed by the pump is less than the predetermined flow rate, in other words, when the vehicle speed is less than the predetermined speed, pressure within the brake pipe is not increased. However, when the discharge of the pump exceeds the predetermined flow rate, the pressure within the brake pipe is increased. Due to this increased pressure, a vehicle wheel braking device is actuated to brake the wheels. Thus, vehicle speed is lowered.

Abstract: Telescopic members which are expanded and contracted by means of a fluid pressure controlled by a steering mechanism are integrally connected to suspension springs. And when a vehicle makes a turn, the body is caused to decline toward the turning center side due to the telescopic movement of the telescopic members according to the steering operation. The fluid pressure may be fed from a hydraulic cylinder including a piston associated for movement with the steering mechanism. Alternatively, fluid pressurized by a pump may be fed through a controlling valve which is actuated in response to the steering mechanism. At a time when the vehicle makes a turn, a satisfactory steering sense similar to a motorcycle can be obtained.

Abstract: A steering member for reciprocating in the right and left direction relative to a vehicle body is connected with a tie rod. The steering member is engaged with a lean control member. The lean control member is mounted on the vehicle body for swinging in the right and left direction. The lean control member is mounted with an upper end of a suspension spring. When the steering member is reciprocated in the right and left direction, the lean control member is swung according to the reciprocation of the steering member. According to the foregoing swinging, the suspension spring pushes down or pulls up vehicle wheels relative to the vehicle body. As a result, the vehicle body is inclined toward the turning center side. In this way, a driver can enjoy the same steering sense as that of a motorcycle in an automobile or a motor tricycle.

Abstract: A suspension apparatus for a vehicle adapted to decline the body and/or the wheels toward the turning center side according to the steering operation when the vehicle makes a turn. In this suspension apparatus, the end portion of a suspension spring at the vehicle body side or the end portion of an upper arm at the vehicle body side are secured to a movable member associated with a steering operation member for movement. In the vehicle equipped with this suspension apparatus, driver can enjoy the similar steering sense or feeling as a motorcycle.

Abstract: A front wheel suspension system for a motorcycle including a telescopic hydraulic shock absorber mechanism which provides an anti-dive function upon braking of a front wheel of the motorcycle. In addition to a main oil passage which is intercepted upon braking of the front wheel, a bypass oil passage is provided between inner and outer tubular members comprising a fork pipe and a bottom case, respectively, disposed in a telescopically fitted relationship with each other. An adjustable orifice mechanism is provided in an intermediate position in the bypass oil passage. The suspension system provides an appropriate adjustment of the damping effect of the shock absorber mechanism in a direction of contraction of a front fork upon an anti-dive operation.