Patents by Inventor Kenji Kusao

Kenji Kusao has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Ion-beam etching method and an apparatus therefor
    Patent number: 4101772
    Abstract: The present invention enables a decrease in etching velocity in an ion-beam etching system without decreasing the current density of the ion beam. The ion-etching is performed at a constant value of ion-beam current density and an increased partial pressure of oxygen or other suitable gas in the specimen chamber. The partial pressure of oxygen is increased until the intensity of a secondary ion-beam from the specimen reaches a saturation value. Under these conditions a stable reduced etching velocity is obtained, the value of which is determined by the ion-beam current density, the partial pressure of oxygen and the previously determined characteristics of the specimen.
    Type: Grant
    Filed: January 17, 1977
    Date of Patent: July 18, 1978
    Assignee: Matsushita Electric Industrial Co., Ltd.
    Inventors: Fumiya Konishi, Kenji Kusao, Yoshiaki Yoshioka