Abstract: A substrate processing method includes a process of cooling a substrate to below a freezing point of a processing liquid using a cooling fluid brought into contact with the substrate opposite. While the substrate is cooled to below the freezing point of the processing liquid, a droplet of processing liquid is dispensed onto a surface of the substrate at a specified location of a foreign substance. The droplet then forms a frozen droplet portion at the specified location. The frozen droplet portion is then thawed.

Abstract: A substrate processing apparatus according to one embodiment includes a substrate holding part having a stage holding the substrate, a freezing solution supply part supplying the freezing solution to the substrate, a cooling part cooling the freezing solution to form a freezing film, and a thawing solution supply part having a nozzle extending in a first direction including a central part of the stage in a plan view, wherein an end and an other end opposite to the end of the nozzle in the first direction are located on an outer periphery outside of the central part, and the thawing solution supply part supplies a thawing solution having at least one of a different supply volume, temperature, or supply timing between the central part and the outer periphery to the substrate to thaw the freezing film.

Abstract: A substrate processing method includes a process of cooling a substrate to below a freezing point of a processing liquid using a cooling fluid brought into contact with the substrate opposite. While the substrate is cooled to below the freezing point of the processing liquid, a droplet of processing liquid is dispensed onto a surface of the substrate at a specified location of a foreign substance. The droplet then forms a frozen droplet portion at the specified location. The frozen droplet portion is then thawed.

Abstract: A substrate processing method includes a process of cooling a substrate to below a freezing point of a processing liquid using a cooling fluid brought into contact with the substrate opposite. While the substrate is cooled to below the freezing point of the processing liquid, a droplet of processing liquid is dispensed onto a surface of the substrate at a specified location of a foreign substance. The droplet then forms a frozen droplet portion at the specified location. The frozen droplet portion is then thawed.

Abstract: A substrate processing method includes a process of cooling a substrate to below a freezing point of a processing liquid using a cooling fluid brought into contact with the substrate opposite. While the substrate is cooled to below the freezing point of the processing liquid, a droplet of processing liquid is dispensed onto a surface of the substrate at a specified location of a foreign substance. The droplet then forms a frozen droplet portion at the specified location. The frozen droplet portion is then thawed.

Abstract: A substrate cleaning method includes: steps (a) to (d). In step (a), a liquid is supplied onto a nanoimprint template substrate that has a patterned surface with foreign particles to form a liquid film on the patterned surface. In step (b), the liquid film is solidified to form a solidified film including the foreign particles. In step (c), the substrate is reversed. In step (d), the solidified film is melted to remove the foreign particles.

Abstract: A substrate cleaning method includes: steps (a) to (d). In step (a), a liquid is supplied onto a nanoimprint template substrate that has a patterned surface with foreign particles to form a liquid film on the patterned surface. In step (b), the liquid film is solidified to form a solidified film including the foreign particles. In step (c), the substrate is reversed. In step (d), the solidified film is melted to remove the foreign particles.

Abstract: The invention provides a fat and oil composition which contains diacylglycerol at a high concentration recognized to have an action of suppressing the accumulation of body fat, has a low content of trans-unsaturated fatty acid having a risk of exerting an adverse influence on diseases in circulatory organs, and is used in bakery products. The invention relates to a fat and oil composition containing 60 to 80 wt % diacylglycerol in fats and oils, wherein 90 wt % or more of fatty acids constituting the diacylglycerol are unsaturated fatty acids, and, in triacylglycerol as the balance, tri-saturated triacylglycerol whose every constituent fatty acid is a saturated fatty acid accounts for 45 to 75 wt % and tri-unsaturated triacylglycerol whose every constituent fatty acid is an unsaturated fatty acid accounts for 10 to 50 wt %, and the content of trans-unsaturated fatty acids in total fatty acids constituting the fats and oils is 5 wt % or less.

Abstract: Described is a fat or oil composition which comprises at least 35 wt % of a diacylglycerol, the constituent fatty acids of said diacylglycerol satisfying the following equation: (an amount of a cis-form unsaturated fatty acid)/(an amount of a saturated fatty acid+an amount of a trans-form unsaturated fatty acid)?6, the usual intake of which as an edible oil makes it possible to reduce arteriosclerotic factors in blood, leading to the prevention of arteriosclerosis, and furthermore, various degenerative diseases.

Abstract: The invention provides a fat and oil composition which contains diacylglycerol at a high concentration recognized to have an action of suppressing the accumulation of body fat, has a low content of trans-unsaturated fatty acid having a risk of exerting an adverse influence on diseases in circulatory organs, and is used in bakery products. The invention relates to a fat and oil composition containing 60 to 80 wt % diacylglycerol in fats and oils, wherein 90 wt % or more of fatty acids constituting the diacylglycerol are unsaturated fatty acids, and, in triacylglycerol as the balance, tri-saturated triacylglycerol whose every constituent fatty acid is a saturated fatty acid accounts for 45 to 75 wt % and tri-unsaturated triacylglycerol whose every constituent fatty acid is an unsaturated fatty acid accounts for 10 to 50 wt %, and the content of trans-unsaturated fatty acids in total fatty acids constituting the fats and oils is 5 wt % or less.

Abstract: A substrate cleaning apparatus is provided that includes a cleaning cup for receiving a to-be-cleaned substrate, a table in the cleaning cup, a first, second, and third nozzles, a pure water heating mechanism configured to supply hot pure water, a branch line, a control mechanism, and an open/close valve, provided between the branch line and the pipe, wherein the open/close valve is configured to interrupt emission of hot water from the third nozzle by opening the open/close valve to lower the pressure in the pipe.

Abstract: The present invention provides a water-in-oil type emulsified fat and/or oil composition of which emulsification is stable in spite of containing a high content of water and which is excellent during storage in physical properties and feeling on eating. That is, the present invention provides a water-in-oil type emulsified oil and/or fat composition which is composed of (1) the oil phase comprising 35 to 95% by weight based on the total oils and fats, of a diglyceride(s) having its increasing melting point of lower than 20° C. and the balance of triglycerides having fatty acid parts comprising 13 to 60% by weight of palmitic acid and 5% by weight or less of fatty acids having 12 or less carbon atoms, polymorph of the triglycerides being stable in the form of &bgr;′ and (2) the aqueous phase based on water.

Abstract: The present invention provides a water-in-oil type emulsified fat and/or oil composition which comprises a diglyceride and which is excellent in a flavor release during the time for ingestion thereof. That is, the present invention provides a water-in-oil type fat and/or composition which is composed of (1) the aqueous phase based on water and (2) the oil phase comprising 15% by weight or more based on the total oils and fats, of diglycerides, the composition including a flavor component(s), 30% by weight or more of the said emulsified composition being able to be reversed in phase within one minute after it has been introduced into water at 36° C.

Abstract: A to-be-cleaned substrate is cleaned by use of an acid liquid agent in a cleaning cup, the remaining acid liquid agent is washed out by use of pure water, then an alkaline liquid agent is emitted to the surface of the to-be-cleaned substrate in the same cleaning cup to remove the acid liquid agent remaining on the to-be-cleaned substrate. A neutralization reaction between the acid and alkali is caused by emitting the alkaline liquid agent to the surface of the to-be-cleaned substrate so as to efficiently remove the acid liquid agent remaining on the surface of the to-be-cleaned substrate.

Abstract: A to-be-cleaned substrate is cleaned by use of an acid liquid agent in a cleaning cup, the remaining acid liquid agent is washed out by use of pure water, then an alkaline liquid agent is emitted to the surface of the to-be-cleaned substrate in the same cleaning cup to remove the acid liquid agent remaining on the to-be-cleaned substrate. A neutralization reaction between the acid and alkali is caused by emitting the alkaline liquid agent to the surface of the to-be-cleaned substrate so as to efficiently remove the acid liquid agent remaining on the surface of the to-be-cleaned substrate.

Abstract: Described is a fat or oil composition which comprises at least 35 wt % of a diacylglycerol, the constituent fatty acids of said diacylglycerol satisfying the following equation: (an amount of a cis-form unsaturated fatty acid)/(an amount of a saturated fatty acid+an amount of a trans-form unsaturated fatty acid)≧6, the usual intake of which as an edible oil makes it possible to reduce arteriosclerotic factors in blood, leading to the prevention of arteriosclerosis, and furthermore, various degenerative diseases.

Abstract: Described is a fat or oil composition which comprises at least 35 wt. % of a diacylglycerol, the constituent fatty acids of said diacylglycerol satisfying the following equation: (an amount of a cis-form unsaturated fatty acid)/(an amount of a saturated fatty acid+an amount of a trans-form unsaturated fatty acid)≧6. Usual intake of the above-described composition as an edible oil makes it possible to reduce arteriosclerotic factors in blood, leading to the prevention of arteriosclerosis, furthermore, various degenerative diseases.

Abstract: A to-be-cleaned substrate is cleaned by use of an acid liquid agent in a cleaning cup, the remaining acid liquid agent is washed out by use of pure water, then an alkaline liquid agent is emitted to the surface of the to-be-cleaned substrate in the same cleaning cup to remove the acid liquid agent remaining on the to-be-cleaned substrate. A neutralization reaction between the acid and alkali is caused by emitting the alkaline liquid agent to the surface of the to-be-cleaned substrate so as to efficiently remove the acid liquid agent remaining on the surface of the to-be-cleaned substrate.

Abstract: An oil or fat composition comprising an oil or fat comprising 15 wt. % or more of a diacylglycerol and 1.2 to 20 wt. % of phytosterol, dissolved or dispersed in the fat and oil is provided here, which can be used in the same way as usual oil and fat in daily life to reduce a hemal cholesterol value of a person having a high value of cholesterol and to raise no problem in appearance, taste, heating cooking and the like in comparison with usual edible oil and fat.

Abstract: An oil or fat composition comprising an oil or fat comprising 15 wt. % or more of a diacylglycerol and 1.2 to 20 wt. % of phytosterol, dissolved or dispersed in the fat and oil is provided here, which can be used in the same way as usual oil and fat in daily life to reduce a hemal cholesterol value of a person having a high value of cholesterol and to raise no problem in appearance, taste, heating cooking and the like in comparison with usual edible oil and fat.