Abstract: The present invention provides a semiconductor device including a resistor which achieves reduction of a chip size and variations in resistance value, and a manufacturing method thereof. The semiconductor device includes: a resistor which is linearly formed above the silicon substrate, and made mainly of silicon; contact forming areas each of which (i) is formed in contact with one end of the resistor, and (ii) has a surface made of metal silicide; and contact plugs each of which electrically connects an associated one of the contact forming areas to a metal wire formed on the interlayer insulating film. An in-plane pattern of each of the contact forming areas is bent at least twice in a planar direction with respect to a linear direction of the resistor, so that a part of the contact forming area is formed in parallel with the resistor.